There is provided a method for manufacturing a substrate with a sensor in which a sensor is disposed on a plate-shaped substrate. The method comprises: holding the sensor by a magnetic force from a position on an opposite surface of a surface of the plate-shaped substrate on which the sensor is disposed that corresponds to a position where the sensor is fixed; and fixing the sensor to the plate-shaped substrate by curing an adhesive attached to the sensor in a state where the sensor is held by the magnetic force.

An isolated signal transmission device includes a resistor element and a heat flow sensor. The resistor element generates heat as a result of a current based on an inputted signal being applied to the resistor element. The heat flow sensor is provided such as to be electrically isolated from the resistor element. The heat flow sensor detects an amount of heat flowing to the heat flow sensor itself when the resistor element generates heat. The heat flow sensor outputs a signal based on the detected amount of heat.

An isolated signal transmission device includes a resistor element and a heat flow sensor. The resistor element generates heat as a result of a current based on an inputted signal being applied to the resistor element. The heat flow sensor is provided such as to be electrically isolated from the resistor element. The heat flow sensor detects an amount of heat flowing to the heat flow sensor itself when the resistor element generates heat. The heat flow sensor outputs a signal based on the detected amount of heat.

A thermocouple may have a first thermoelement wire formed of a first material and a first sheath covering at least part of the first thermoelement wire. The first sheath may provide thermal insulation and may be formed of a third material, different from the first material, that is subject to oxidation in response to exposure to a surrounding material. The thermocouple may further have a second sheath covering at least a first portion of the first sheath. The second sheath may act as a barrier between the first portion of the first sheath and the surrounding material and may be formed of a fourth material that is resistant to oxidation in the surrounding material. The first thermoelement wire may be joined, at a junction, with one of the first sheath, and a second thermoelement wire formed of a second material different from the first material.

A thermocouple arrangement comprising: a first thermocouple including a first thermoelement and a second thermoelement coupled at a first junction, the first junction subject to a first temperature, the second material different from the first material; a second thermocouple including a third thermoelement and a fourth thermoelement coupled to the third thermoelement at a second junction connected to the first thermoelement, the second junction arranged at a second portion subject to a second temperature, the fourth material different from the third material; and a third thermocouple including a fifth thermoelement and a sixth thermoelement coupled to the fifth thermoelement at a third junction connected to the second thermoelement, the third junction arranged at the second portion exposed to the second temperature, the fifth material different from the third material and the fourth material, the sixth material different from the third material, the fourth material, and the fifth material.

A thermocouple arrangement comprising: a first thermocouple including a first thermoelement and a second thermoelement coupled at a first junction, the first junction subject to a first temperature, the second material different from the first material; a second thermocouple including a third thermoelement and a fourth thermoelement coupled to the third thermoelement at a second junction connected to the first thermoelement, the second junction arranged at a second portion subject to a second temperature, the fourth material different from the third material; and a third thermocouple including a fifth thermoelement and a sixth thermoelement coupled to the fifth thermoelement at a third junction connected to the second thermoelement, the third junction arranged at the second portion exposed to the second temperature, the fifth material different from the third material and the fourth material, the sixth material different from the third material, the fourth material, and the fifth material.

A thermocouple for temperature measurement according to an embodiment may include a first wire of a first metallic material and a second wire of a second metallic material different from the first metallic material, a first section in which the first wire and the second wire are electrically insulated from each other, a second section in which the first wire and the second wire are connected to each other to form a measuring junction, a first layer of a thermally conductive and electrically insulating first material enclosing the second section, and a second layer of an ultrasonic-weldable second material enclosing at least part of the first layer.

A thermocouple for temperature measurement according to an embodiment may include a first wire of a first metallic material and a second wire of a second metallic material different from the first metallic material, a first section in which the first wire and the second wire are electrically insulated from each other, a second section in which the first wire and the second wire are connected to each other to form a measuring junction, a first layer of a thermally conductive and electrically insulating first material enclosing the second section, and a second layer of an ultrasonic-weldable second material enclosing at least part of the first layer.

Provided are a nitriding apparatus and a method of nitriding, which are capable of suppressing generation of a compound layer by accurately measuring temperature of an object to be treated by nitriding. A nitriding apparatus includes a chamber, a gas supplying unit, a support, a plasma source, a heater, a thermocouple wire including a temperature measuring section, an accommodating member, a power supply for an object to be treated, and a treatment condition control unit. The accommodating member internally accommodates the thermocouple wire to cover the temperature measuring section, while being insulated from the thermocouple wire. The power supply for an object to be treated applies a predetermined voltage to an object to be treated and the housing member so that the object to be treated and the accommodating member are set to an identical potential on the negative side.

Provided are a nitriding apparatus and a method of nitriding, which are capable of suppressing generation of a compound layer by accurately measuring temperature of an object to be treated by nitriding. A nitriding apparatus includes a chamber, a gas supplying unit, a support, a plasma source, a heater, a thermocouple wire including a temperature measuring section, an accommodating member, a power supply for an object to be treated, and a treatment condition control unit. The accommodating member internally accommodates the thermocouple wire to cover the temperature measuring section, while being insulated from the thermocouple wire. The power supply for an object to be treated applies a predetermined voltage to an object to be treated and the housing member so that the object to be treated and the accommodating member are set to an identical potential on the negative side.