Apparatus and associated methods relate to generating a temperature measurement signal based upon a weighted average of signals generated by a resistive temperature detector (RTD) and a thermocouple device. The thermocouple device includes first and second thermocouple junctions. The first thermocouple junction is thermally coupled to the RTD, and the second thermocouple junction is thermally isolated from the RTD. The thermocouple is configured to generate a signal indicative of a difference between first and second thermocouple junctions, which is substantially equal to the difference between the RTD and the second thermocouple junction due to the thermal coupling configuration. The RTD generates a signal indicative of a temperature of the RTD. A weighted sum of the first and second signals is indicative of a temperature of the second thermocouple junction, which responds rapidly to temperature fluctuations, due to its having a relatively small thermal mass compared with the RTD.

Apparatus and associated methods relate to generating a temperature measurement signal based upon a weighted average of signals generated by a resistive temperature detector (RTD) and a thermocouple device. The thermocouple device includes first and second thermocouple junctions. The first thermocouple junction is thermally coupled to the RTD, and the second thermocouple junction is thermally isolated from the RTD. The thermocouple is configured to generate a signal indicative of a difference between first and second thermocouple junctions, which is substantially equal to the difference between the RTD and the second thermocouple junction due to the thermal coupling configuration. The RTD generates a signal indicative of a temperature of the RTD. A weighted sum of the first and second signals is indicative of a temperature of the second thermocouple junction, which responds rapidly to temperature fluctuations, due to its having a relatively small thermal mass compared with the RTD.

A package comprises a photonic integrated circuit (PIC) with a modulator having a first modulator input, and a PIC interconnect region within two millimeters or fifty microns from the modulator. Additionally, an electric integrated circuit (EIC) is included with a driver circuit and an EIC interconnect region within two millimeters or fifty microns from the driver circuit. The driver circuit is electrically connected to the first modulator input via the EIC interconnect region, a first metal interconnect, and the PIC interconnect region. The modulator receives a temperature-dependent bias voltage, where the temperature dependence of the bias voltage inversely matches the temperature dependence of the modulator across an extended temperature range.

A package comprises a photonic integrated circuit (PIC) with a modulator having a first modulator input, and a PIC interconnect region within two millimeters or fifty microns from the modulator. Additionally, an electric integrated circuit (EIC) is included with a driver circuit and an EIC interconnect region within two millimeters or fifty microns from the driver circuit. The driver circuit is electrically connected to the first modulator input via the EIC interconnect region, a first metal interconnect, and the PIC interconnect region. The modulator receives a temperature-dependent bias voltage, where the temperature dependence of the bias voltage inversely matches the temperature dependence of the modulator across an extended temperature range.

A device for sensing pressure and temperature in a fluid environment includes a cover defining an interior. A thermistor tube is positioned at least partially within the interior, the thermistor tube extending substantially along a longitudinal axis. A port body is also positioned at least partially within the interior, the port body forming a channel which extends along the longitudinal axis for receiving a fluid from the fluid environment. A diaphragm is affixed within the port body. The diaphragm has a first surface exposed to the fluid within the channel and a second surface sealed from the channel.

A disclosed linearization circuit includes a reference component, a charging and discharging controller, and a comparator circuit. The reference component has a non-linear dependence on current or voltage. The charging and discharging controller is configured to control alternating charging and discharging of the reference component. A voltage associated with the reference component forms a reference signal. The charging and discharging are controlled such that the reference signal has a periodic time dependence. The reference signal and a measurement signal are received by the comparator circuit. The comparator circuit is configured to generate and output a square-wave signal based on a reference time point during a charge-discharge cycle, and based on a result of a comparison of the reference signal with the measurement signal, such that the square-wave signal represents a linearized output signal. This disclosure further relates to a corresponding method.

A disclosed linearization circuit includes a reference component, a charging and discharging controller, and a comparator circuit. The reference component has a non-linear dependence on current or voltage. The charging and discharging controller is configured to control alternating charging and discharging of the reference component. A voltage associated with the reference component forms a reference signal. The charging and discharging are controlled such that the reference signal has a periodic time dependence. The reference signal and a measurement signal are received by the comparator circuit. The comparator circuit is configured to generate and output a square-wave signal based on a reference time point during a charge-discharge cycle, and based on a result of a comparison of the reference signal with the measurement signal, such that the square-wave signal represents a linearized output signal. This disclosure further relates to a corresponding method.

Apparatus, including a multiplexer, having a first output and multiple first inputs receiving analog input signals and an analog feedback signal and cycling through and selecting the signals for transfer in sequential signal groupings to the first output. The apparatus also includes an amplification circuit, having a second output and a second input connected to the multiplexer first output, that amplifies signals corresponding to the analog input signals with a selected gain so as to generate respective amplified analog signals at the second output. Circuitry selects a characteristic of the respective amplified analog signals from an initial signal grouping, feeds the characteristic back for input to the multiplexer as the analog feedback signal, selects a subsequent characteristic of the respective amplified analog signals from a subsequent signal grouping, and adjusts the amplification circuit gain so that the analog feedback signal and the subsequent characteristic have the same amplitude.

Apparatus, including a multiplexer, having a first output and multiple first inputs receiving analog input signals and an analog feedback signal and cycling through and selecting the signals for transfer in sequential signal groupings to the first output. The apparatus also includes an amplification circuit, having a second output and a second input connected to the multiplexer first output, that amplifies signals corresponding to the analog input signals with a selected gain so as to generate respective amplified analog signals at the second output. Circuitry selects a characteristic of the respective amplified analog signals from an initial signal grouping, feeds the characteristic back for input to the multiplexer as the analog feedback signal, selects a subsequent characteristic of the respective amplified analog signals from a subsequent signal grouping, and adjusts the amplification circuit gain so that the analog feedback signal and the subsequent characteristic have the same amplitude.

Mass flow controllers and methods for controlling mass flow controllers are disclosed. A method includes providing a gas through a thermal mass flow sensor of the mass flow controller and processing a flow sensor signal from the thermal mass flow sensor of the mass flow controller to produce a measured flow signal. The measured flow signal is corrected to produce a corrected flow signal by gradually applying non-linearity correction to the measured flow signal when a flow rate of the gas changes. A valve of the mass flow controller is controlled using the corrected flow signal and a setpoint signal.