Devices, including wireless temperature sensors, are provided. The devices may include a patch including a conductive material, a substrate, and a ground plane. The devices may be used in the systems and methods provided herein to measure a temperature. The substrates of the devices may include a dielectric material or a metal.

An apparatus and method for real-time sensing of properties in industrial manufacturing equipment are described. The sensing system includes first plural sensors mounted within a processing environment of a semiconductor device manufacturing system, wherein each sensor is assigned to a different region to monitor a physical or chemical property of the assigned region of the manufacturing system, and a reader system having componentry configured to simultaneously and wirelessly interrogate the plural sensors. The reader system uses a single high frequency interrogation sequence that includes (1) transmitting a first request pulse signal to the first plural sensors, the first request pulse signal being associated with a first frequency band, and (2) receiving uniquely identifiable response signals from the first plural sensors that provide real-time monitoring of variations in the physical or chemical property at each assigned region of the system.

A system for determining a signature frequency of a photonic device includes a reference cell that receives a first light beam of a plurality of light beams. Based on a predetermined characteristic of the reference cell, the reference cell produces a first identifiable output indicative of a reference frequency in response to light in the first light beam having a particular frequency. A photonic device receives a second light beam of the plurality of light beams, and produces a second identifiable output in response to light in the second light beam having a frequency at the signature frequency. A computing device uses electrical signals representative of the first and second identifiable outputs to determine the signature frequency of the photonic device. A light source may emit a light beam having a controlled change of frequency and an optical splitter splits the light beam to produce the plurality of light beams.

A system for determining a signature frequency of a photonic device includes a reference cell that receives a first light beam of a plurality of light beams. Based on a predetermined characteristic of the reference cell, the reference cell produces a first identifiable output indicative of a reference frequency in response to light in the first light beam having a particular frequency. A photonic device receives a second light beam of the plurality of light beams, and produces a second identifiable output in response to light in the second light beam having a frequency at the signature frequency. A computing device uses electrical signals representative of the first and second identifiable outputs to determine the signature frequency of the photonic device. A light source may emit a light beam having a controlled change of frequency and an optical splitter splits the light beam to produce the plurality of light beams.

This disclosure relates to a system and method for measuring average temperature of mixed fluid in an enclosed chamber. Measurement is based on two independent principle as measuring variation in acoustic wave velocity and variation in resistivity that works on a single setup. First principle is based on measuring acoustic wave velocity in a known medium, which is isolated from the surrounding. The system comprises a primary pipe and a secondary pipe, wherein the ends of the pipes reside inside the enclosed chamber. The primary pipe is made out of good conductor of heat and filled with air. Ends of the primary pipe is fitted with a transducers have one transmitter at one end and one receiver at another end. Average temperature of the mixed fluid is measured based on the variations in sound velocity of acoustic wave passed through the primary pipe and resistivity variations of the primary pipe.

This disclosure relates to a system and method for measuring average temperature of mixed fluid in an enclosed chamber. Measurement is based on two independent principle as measuring variation in acoustic wave velocity and variation in resistivity that works on a single setup. First principle is based on measuring acoustic wave velocity in a known medium, which is isolated from the surrounding. The system comprises a primary pipe and a secondary pipe, wherein the ends of the pipes reside inside the enclosed chamber. The primary pipe is made out of good conductor of heat and filled with air. Ends of the primary pipe is fitted with a transducers have one transmitter at one end and one receiver at another end. Average temperature of the mixed fluid is measured based on the variations in sound velocity of acoustic wave passed through the primary pipe and resistivity variations of the primary pipe.

A sensor device comprises at least one transducer and a sensing material disposed on the transducer. The sensing material adsorbs or absorbs an amount of analyte (e.g., a target gas) that depends on a temperature of the sensing material and a concentration of the analyte. At least one detector is arranged to measure responses of the transducer to sorption or desorption of the analyte in the sensing material while the sensing material is heated and/or cooled according to at least one temperature profile. The device also comprises a humidity sensor that is arranged to detect a humidity level of the environment or sample containing the analyte. A processor or controller is programmed to determine the quantity (e.g., concentration) of the analyte by comparing values of the transducer measurement signals to reference data indicative of expected or pre-measured responses of the transducer to known concentrations of the analyte at the same humidity level as indicated by the humidity sensor while the sensing material is subjected to the same or similar temperature profile.

A sensor device comprises at least one transducer and a sensing material disposed on the transducer. The sensing material adsorbs or absorbs an amount of analyte (e.g., a target gas) that depends on a temperature of the sensing material and a concentration of the analyte. At least one detector is arranged to measure responses of the transducer to sorption or desorption of the analyte in the sensing material while the sensing material is heated and/or cooled according to at least one temperature profile. The device also comprises a humidity sensor that is arranged to detect a humidity level of the environment or sample containing the analyte. A processor or controller is programmed to determine the quantity (e.g., concentration) of the analyte by comparing values of the transducer measurement signals to reference data indicative of expected or pre-measured responses of the transducer to known concentrations of the analyte at the same humidity level as indicated by the humidity sensor while the sensing material is subjected to the same or similar temperature profile.

An air data system includes an air data probe and a surface acoustic wave (SAW) sensor attached to the air data probe for detecting particulate accumulation. The air data probe includes a probe head, a strut connected to the head, and a mounting plate connected to the strut. The probe head has an inlet, an interior surface extending from the inlet, and an exterior surface extending from the inlet.

An antenna device according to an exemplary embodiment includes a first metal layer, a first dielectric layer, a second metal layer, and a second dielectric layer. The first dielectric layer has a thermal conductivity and heat resistance that are higher than those of an FR-4 resin. The antenna device includes a first metal terminal and a second metal terminal, and a thermosensor. A pair of an input terminal and an output terminal of the thermosensor are electrically connected to the first metal terminal and the second metal terminal, respectively, and the second metal layer includes a first segment and a second segment. The first metal terminal is disposed above the first segment, and the second metal terminal is disposed above the second segment.