A measurement method performed by a semiconductor manufacturing apparatus including a chamber is provided. In the measurement method, first measurement data including a signal of a resonance frequency of the chamber is acquired as reference data, in response to transmitting an electrical signal into the chamber while a jig capable of performing wireless communication is not placed in the chamber. Subsequently, second measurement data including the signal of the resonance frequency of the chamber and including a signal of a resonance frequency of a sensor installed in the jig is acquired, in response to transmitting an electrical signal into the chamber while the jig is placed in the chamber. By subtracting the reference data from the second measurement data, third measurement data is calculated.

A sensing sensor includes an oscillator circuit, a base, a connection portion, and a temperature changing unit. The oscillator circuit oscillates the piezoelectric resonator. The base includes a base main body in which a depressed portion is provided and a lid portion at one side, supports the piezoelectric resonator at another side, and is for taking the oscillation frequency to an outside of the sensing sensor. The depressed portion houses the oscillator circuit. The lid portion covers the depressed portion. The connection portion is disposed at the one side of the base and connected to a cooling mechanism for cooling the base from the one side. The temperature changing unit is interposed between the piezoelectric resonator and the base, so as to cool and heat the piezoelectric resonator and transfer a heat radiated for cooling the piezoelectric resonator from the other side of the base to the one side.

A sensing sensor includes an oscillator circuit, a base, a connection portion, and a temperature changing unit. The oscillator circuit oscillates the piezoelectric resonator. The base includes a base main body in which a depressed portion is provided and a lid portion at one side, supports the piezoelectric resonator at another side, and is for taking the oscillation frequency to an outside of the sensing sensor. The depressed portion houses the oscillator circuit. The lid portion covers the depressed portion. The connection portion is disposed at the one side of the base and connected to a cooling mechanism for cooling the base from the one side. The temperature changing unit is interposed between the piezoelectric resonator and the base, so as to cool and heat the piezoelectric resonator and transfer a heat radiated for cooling the piezoelectric resonator from the other side of the base to the one side.

An improved ultrasonic waveguide for an ultrasonic thermometry system is provided. The waveguide includes a series of sensing zones, each of which is tuned to a specific narrow frequency band. The waveguide is acoustically coupled to a transducer, which launches a longitudinal elastic wave of desired waveform and frequency. The wave propagates down the waveguide, and is reflected from the sensing zone that is tuned to that frequency. Each sensing zone is designed to be highly reflective to a narrow frequency band while being transparent to other frequencies.

An improved ultrasonic waveguide for an ultrasonic thermometry system is provided. The waveguide includes a series of sensing zones, each of which is tuned to a specific narrow frequency band. The waveguide is acoustically coupled to a transducer, which launches a longitudinal elastic wave of desired waveform and frequency. The wave propagates down the waveguide, and is reflected from the sensing zone that is tuned to that frequency. Each sensing zone is designed to be highly reflective to a narrow frequency band while being transparent to other frequencies.

An apparatus and a method for determining and/or monitoring at least one process variable of a medium in a container, comprising: a mechanically oscillatable unit, a driving/receiving unit for exciting the mechanically oscillatable unit to execute mechanical oscillations by means of an electrical exciting signal and for receiving and transducing mechanical oscillations into an electrical, received signal, an electronics unit, which electronics unit is embodied, to produce the exciting signal starting from the received signal, to set a predeterminable phase shift () between the exciting signal and the received signal, and from the received signal, to determine and/or to monitor the at least one process variable. A phase correction unit is provided, which phase correction unit is at least embodied, to ascertain a phase correction value (.sub.kor) from at least one process parameter dependent, characteristic variable of at least one component of the apparatus, especially the driving/receiving unit, and to set the predeterminable phase shift () in accordance with the phase correction value (.sub.kor).

An apparatus and a method for determining and/or monitoring at least one process variable of a medium in a container, comprising: a mechanically oscillatable unit, a driving/receiving unit for exciting the mechanically oscillatable unit to execute mechanical oscillations by means of an electrical exciting signal and for receiving and transducing mechanical oscillations into an electrical, received signal, an electronics unit, which electronics unit is embodied, to produce the exciting signal starting from the received signal, to set a predeterminable phase shift () between the exciting signal and the received signal, and from the received signal, to determine and/or to monitor the at least one process variable. A phase correction unit is provided, which phase correction unit is at least embodied, to ascertain a phase correction value (.sub.kor) from at least one process parameter dependent, characteristic variable of at least one component of the apparatus, especially the driving/receiving unit, and to set the predeterminable phase shift () in accordance with the phase correction value (.sub.kor).

This disclosure relates to a system and method for measuring average temperature of mixed fluid in an enclosed chamber. Measurement is based on two independent principle as measuring variation in acoustic wave velocity and variation in resistivity that works on a single setup. First principle is based on measuring acoustic wave velocity in a known medium, which is isolated from the surrounding. The system comprises a primary pipe and a secondary pipe, wherein the ends of the pipes reside inside the enclosed chamber. The primary pipe is made out of good conductor of heat and filled with air. Ends of the primary pipe is fitted with a transducers have one transmitter at one end and one receiver at another end. Average temperature of the mixed fluid is measured based on the variations in sound velocity of acoustic wave passed through the primary pipe and resistivity variations of the primary pipe.

A motor or work machine having a housing part, a stator element, a rotor element with a monitoring device for monitoring a state parameter of the rotor. The monitoring device includes a sensor unit contains a coupling element and a conductor structure, SAW sensor element connecting the aforementioned elements, and a query unit. The query unit preferably operates according to the S-FSCW principle. The unit has a signal generator for generating query signals and a coupling structure. The coupling structure is positioned along an air gap formed between the rotor element and stator element or a section of the housing covered by the coupling element when the rotor element is rotated. The positioning is such that a coupling is enabled between the coupling structure and the coupling element for signal transmission over the air gap. The query unit has an evaluation circuit for evaluating received response signals.

A system for recording a physical property of an item to be cooked or of a cooking process auxiliary means during a cooking process performed by a cooking appliance (10) comprises: a sensor means (20) for sensing the physical property of the item to be cooked or of the cooking process auxiliary means; a first transmission means for wirelessly transmitting a status signal freely through space, which status signal corresponds to the physical property of the item to be cooked or of the cooking process auxiliary means, wherein the first transmission means is connected to the sensor means (20); a first receiving means (22) for receiving the pot status signal transmitted by the first transmission means, the first receiving means (22) being arranged in a separate unit (12), which is independent from the cooking appliance (10); a second transmission means (24) electrically connected to the first receiving means (22), the second transmission means (24) being configured to forward the status signal transmitted by the first transmission means or to transmit a processed signal generated by processing the status signal, wherein the second transmission means (24) is arranged in or at the separate unit (12); anda second receiving means (28, 30) for receiving the processed signal or the status signal transmitted by the second transmission means (24), the second receiving means (28, 30) being arranged in or at the cooking appliance (10) and electrically connected to a control unit of the cooking appliance (10).