A semiconductor manufacturing apparatus includes: a gas introduction pipe connected to a processing container of the semiconductor manufacturing apparatus in order to introduce a gas into the processing container; and a temperature sensor provided in the gas introduction pipe in order to measure a temperature of a gas in the gas introduction pipe.

A method includes receiving temperature measurements from multiple temperature sensors in a power supply system that includes multiple coils arranged in a series downstream of a turbine, each coil configured to receive thermal energy from an air stream exhausted from the turbine as the air stream moves toward a data center, each coil associated with at least one fluid loop. The method also includes using a first subset of the temperature measurements to determine a blended fluid mix from a primary fluid path and a heated fluid reservoir in order to obtain a predetermined leaving fluid temperature at a first coil of the multiple coils. The method further includes controlling a position of one or more valves associated with the primary fluid path and the heated fluid reservoir to achieve the determined blended fluid mix.

A method includes receiving temperature measurements from multiple temperature sensors in a power supply system that includes multiple coils arranged in a series downstream of a turbine, each coil configured to receive thermal energy from an air stream exhausted from the turbine as the air stream moves toward a data center, each coil associated with at least one fluid loop. The method also includes using a first subset of the temperature measurements to determine a blended fluid mix from a primary fluid path and a heated fluid reservoir in order to obtain a predetermined leaving fluid temperature at a first coil of the multiple coils. The method further includes controlling a position of one or more valves associated with the primary fluid path and the heated fluid reservoir to achieve the determined blended fluid mix.

A method of determining a turbine inlet temperature for a gas turbine engine includes measuring pressure changes within a combustion section of the gas turbine engine during operation of the gas turbine engine to produce pressure versus time data, extracting a resonant frequency from the pressure versus time data, and calculating the turbine inlet temperature based solely on the resonant frequency.

A method of determining a turbine inlet temperature for a gas turbine engine includes measuring pressure changes within a combustion section of the gas turbine engine during operation of the gas turbine engine to produce pressure versus time data, extracting a resonant frequency from the pressure versus time data, and calculating the turbine inlet temperature based solely on the resonant frequency.

The present invention provides, in order to improve detection accuracy, a freezing detection device comprising: a strut having a mounting space formed therein, the strut being installed in a freezing measurement area in which a freezing detection object unit is disposed; a probe made of a magnetostrictive material and disposed to penetrate the strut, the lower end of the probe being inserted into the mounting space, the upper end thereof being exposed to the freezing measurement area, the probe having a drive coil disposed so as to surround the outer periphery of one side of the interior of the mounting space such that a driving magnetic field for magnetostrictive vibration is formed, and the probe having a feedback coil disposed so as to surround the outer periphery of the other side of the interior of the mounting space while being spaced apart from the drive coil by a predetermined interval; a variable adjustment unit circuit-connected to the drive coil and the feedback coil such that errors of a vibration frequency occurring in the probe are adjusted; a magnet unit disposed along outer peripheries of the drive coil and the feedback coil such that the vibration displacement of the probe increases, thereby forming a bias magnetic field; an elastic member disposed in the mounting space and provided to have an elastic modulus preconfigured such that a vibration frequency occurs in the probe, the elastic member generating magnetostrictive vibration and elastically supporting the probe; and so as to apply a voltage corresponding to a vibration frequency, the calculation control unit indirectly assessing the freezing condition of the freezing detection object unit through a change in the vibration frequency of the probe resulting from a freezing load.

The present invention provides, in order to improve detection accuracy, a freezing detection device comprising: a strut having a mounting space formed therein, the strut being installed in a freezing measurement area in which a freezing detection object unit is disposed; a probe made of a magnetostrictive material and disposed to penetrate the strut, the lower end of the probe being inserted into the mounting space, the upper end thereof being exposed to the freezing measurement area, the probe having a drive coil disposed so as to surround the outer periphery of one side of the interior of the mounting space such that a driving magnetic field for magnetostrictive vibration is formed, and the probe having a feedback coil disposed so as to surround the outer periphery of the other side of the interior of the mounting space while being spaced apart from the drive coil by a predetermined interval; a variable adjustment unit circuit-connected to the drive coil and the feedback coil such that errors of a vibration frequency occurring in the probe are adjusted; a magnet unit disposed along outer peripheries of the drive coil and the feedback coil such that the vibration displacement of the probe increases, thereby forming a bias magnetic field; an elastic member disposed in the mounting space and provided to have an elastic modulus preconfigured such that a vibration frequency occurs in the probe, the elastic member generating magnetostrictive vibration and elastically supporting the probe; and so as to apply a voltage corresponding to a vibration frequency, the calculation control unit indirectly assessing the freezing condition of the freezing detection object unit through a change in the vibration frequency of the probe resulting from a freezing load.

Methods, devices, and systems for adjusting for air flow temperature changes in an aspirating smoke detector are described herein. In some examples, one or more embodiments include a blower configured to cause air to flow through the aspirating smoke detector, and a controller configured to determine a temperature of the air flowing through the aspirating smoke detector has changed by a particular amount and adjust a speed of the blower in response to compensate the air flowing through the aspirating smoke detector that has changed by the particular amount.

A sensor assembly includes a housing defining a potting chamber and arranged along a sensor axis, a mounting flange extending about the sensor axis the axially offset along the sensor axis from the housing, and one or more intermediate flange. The one or more intermediate flange is arranged between the housing and the mounting flange along the sensor axis, the one or more intermediate flange coupling the mounting flange to the housing. The one or more intermediate flange is spaced apart from mounting flange to limit thermal communication between the mounting flange and the housing. Gas turbine engines and methods of cooling sensor assemblies are also described.

A sensor assembly includes a housing defining a potting chamber and arranged along a sensor axis, a mounting flange extending about the sensor axis the axially offset along the sensor axis from the housing, and one or more intermediate flange. The one or more intermediate flange is arranged between the housing and the mounting flange along the sensor axis, the one or more intermediate flange coupling the mounting flange to the housing. The one or more intermediate flange is spaced apart from mounting flange to limit thermal communication between the mounting flange and the housing. Gas turbine engines and methods of cooling sensor assemblies are also described.