G01L1/162

Resonating sensor for high-pressure and high-temperature environments

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.

RESONATING SENSOR FOR HIGH-PRESSURE AND HIGH-TEMPERATURE ENVIRONMENTS

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.

RESONATOR DEVICE

A resonator device for measuring stress comprises at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate, wherein the at least two resonators are arranged and positioned such that they have two different wave propagation directions, and each resonator comprises at least two parts with the area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators and wherein for at least one resonator, in particular, all resonators, the inter-digitated transducer structure comprises a first material and the reflecting structures a second material different from the first material and/or the inter-digitated transducer structure and the reflecting structures have different geometrical parameters. A differential sensing device comprises at least one resonator device as described herein.

Waterproof MEMS button device, package housing the button device, and method of manufacturing the button device

A button device includes a fixed support structure; a movable structure, laterally surrounded by the support structure and configured to deform at least in part under the action of an external force; and a fluid-tight protection cap. The movable structure includes a piston element, deformable elements having piezoelectric transducers arranged thereon, and anchor elements that couple the piston element to the deformable elements. When an external force acts on the piston element, the anchor elements transfer this force to the deformable elements and to the piezoelectric transducers, so as to sense the extent of this force.

WATERPROOF MEMS BUTTON DEVICE, PACKAGE HOUSING THE BUTTON DEVICE, AND METHOD OF MANUFACTURING THE BUTTON DEVICE

Button device comprising: a fixed support structure; a movable structure, laterally surrounded by said support structure and configured to deform at least in part under the action of an external force; and a fluid-tight protection cap. The movable structure includes a piston element, deformable elements having piezoelectric transducers arranged thereon, and anchor elements that couple the piston element to the deformable elements. When an external force acts on the piston element, the anchor elements transfer this force to the deformable elements and to the piezoelectric transducers, so as to sense the extent of this force.

ELECTRONIC DEVICE COMPRISING SENSOR MODULE FOR SENSING PRESSURE AND TRANSMITTING AND RECEIVING ULTRASOUND SIGNAL BY USING PIEZOELECTRIC ELEMENT
20210319196 · 2021-10-14 ·

Various embodiments of the present invention relate to an electronic device having a sensor module performing a plurality of functions, the electronic device comprising: the sensor module comprising a plurality of piezoelectric elements including a plurality of first electrodes and a plurality of second electrodes, a first signal terminal connected to the plurality of first electrodes, a second signal terminal, and a plurality of switches capable of selectively connecting at least some electrodes of the plurality of second electrodes to the second signal terminal; and a control circuit. The control circuit is configured to: in a state where the second signal terminal is connected to the at least some electrodes by means of the plurality of switches, detect a pressure inputted into the sensor module by means of the first signal terminal, by using at least some of the plurality of piezoelectric elements; on the basis of the pressure, in a state where the second signal terminal is connected to the at least some electrodes by means of the plurality of switches, output an ultrasound signal by using at least some of the plurality of piezoelectric elements by means of the first signal terminal; in a state where the second signal terminal is disconnected from the at least some electrodes by means of the plurality of switches, receive the ultrasound signal reflected to an external object, by using at least some of the plurality of piezoelectric elements; and generate biometric information on the external object, at least on the basis of the received ultrasound signal. Thus, when waiting for a user's fingerprint touch, the sensor module operates as a pressure sensor, and when a predetermined pressure due to the user's fingerprint touch is detected, the sensor module can operate as a fingerprint sensor. Various other embodiments are possible.

Compound sensor
11137302 · 2021-10-05 · ·

A compound sensor that is capable of being used with robotics is provided such that the compound sensor includes a distance measurement unit and a pressure measurement unit. Further, a contact detection unit, which is dedicated to performing a detection when a measurement target contacts with a surface of the sensor is included.

Non-invasive assessment of anatomic vessels

Devices, systems, and methods of the present disclosure are directed to accurate and non-invasive assessments of anatomic vessels (e.g., the internal jugular vein (IJV)) of vertebrates. For example, a piezoelectric crystal may generate a signal and receive a pulse echo of the signal along an axis extending through the piezoelectric crystal and an anatomic vessel. A force sensor disposed relative to the piezoelectric crystal may measure a force exerted (e.g., along skin of the vertebrate) on the anatomic vessel along the axis. The pulse echo received by the piezoelectric crystal and the force measured by the force sensor may, in combination, non-invasively and accurately determine a force response of the anatomic vessel. In turn, the force response may be probative of any one or more of a variety of different characteristics of the anatomic vessel including, for example, location of the anatomic vessel and pressure of the anatomic vessel.

PROCEDURE FOR MEASURING A MEASURED VARIABLE IN A PROCESS STEP OF A MANUFACTURING PROCESS AND MEASUREMENT CHAIN FOR CARRYING OUT SAID PROCEDURE
20230405849 · 2023-12-21 ·

A procedure for measuring a measured variable in a process step of a manufacturing process uses a measurement chain with an evaluation unit and a plurality of measurement units having a sensor, a converter unit and a secondary antenna. The evaluation unit has a primary antenna. A measurement unit is positioned for measuring the measured variable and automatically coupled to the evaluation unit by establishing a transmission connection between the secondary antenna and the primary antenna. The sensor automatically generates measurement signals indicative of the measured variable. The converter unit automatically converts the measurement signals into measurement data, which the secondary antenna automatically transmits to the primary antenna.

MECHANICAL-STRESS SENSOR AND MANUFACTURING METHOD
20200408619 · 2020-12-31 ·

A mechanical-stress sensor comprises a piezoelectric transducer (10), which is able to generate an electrical signal representing a shear stress. The piezoelectric transducer (10) comprises: a layer of piezoelectric material (11), which extends in a longitudinal direction and has a polarization axis (A), which extends in a direction transverse to the longitudinal direction; and at least one first electrode (E1) and one second electrode (E2), each having a plurality of fingers (F1, F2), which extend at a first major face and a second major face, respectively, of the layer of piezoelectric material (11). The piezoelectric transducer (10) comprises at least one third electrode (E3) and one fourth electrode (E4), each having a plurality of fingers (F3, F4), which extend at the first major face and second h major face, respectively, of the layer of piezoelectric material (11), the fingers (F3) of the third electrode (E3) being interdigitated or alternating with the fingers (F1) of the first electrode (E1), and the fingers (F4) of the fourth electrode (E4) being interdigitated or alternating with the fingers (F2) of the second electrode (E2).