A vibration sensor according to an embodiment includes a laminated body. The laminated body includes a support layer a first end of which is fixed; a piezoelectric layer on the support layer; an insulating layer disposed between the support layer and the piezoelectric layer; a common electrode disposed on a first principal surface of the piezoelectric layer; a first sensing electrode disposed in a first area on a second principal surface of the piezoelectric layer on the side opposite to the first principal surface; and a drive electrode disposed in a second area different from the first area on the second principal surface of the piezoelectric layer. The first area is located near the first end of the support layer.

Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.

The invention relates to a vibrating wire sensor (20, 30, 40 and 50) having a vibrating wire (21, 31, 41 and 51), which is tensioned accordingly differently under measurement conditions of a current factor to be detected, and having an exciter arrangement for exciting the vibrating wire (21, 31, 41 and 51) in the range of the respective natural frequency thereof, wherein the exciter arrangement has at least one exciter layer (22, 32, 42 and 52) provided on a longitudinal portion of the vibrating wire (21, 31, 41 and 51), having a piezoelectric activation layer (33, 46 and 54), which has a different length depending on the activation state, and thus creates a correspondingly different vibration position of the vibrating wire (21, 31, 41 and 51). A vibrating wire sensor can thus be designed to be more robust, wherein the power consumption is additionally considerably less. The invention further relates to a vibrating wire having an exciter layer (22, 32, 42 and 52), which has a piezoelectric activation layer.

A vibrating beam accelerometer (VBA) with an in-plane translational proof mass that may include at least two or more resonators and be built with planar geometry, discrete lever arms, four-fold symmetry and a single primary mechanical anchor between the support base and the VBA. In some examples, the VBA of this disclosure may be built according to a micro-electromechanical systems (MEMS) fabrication process. Use of a single primary mechanical anchor may minimize bias errors that can be caused by external mechanical forces applied to the circuit board, package, and/or substrate that contains the accelerometer mechanism.

The invention relates to a vibrating wire sensor (20, 30, 40 and 50) having a vibrating wire (21, 31, 41 and 51), which is tensioned accordingly differently under measurement conditions of a current factor to be detected, and having an exciter arrangement for exciting the vibrating wire (21, 31, 41 and 51) in the range of the respective natural frequency thereof, wherein the exciter arrangement has at least one exciter layer (22, 32, 42 and 52) provided on a longitudinal portion of the vibrating wire (21, 31, 41 and 51), having a piezoelectric activation layer (33, 46 and 54), which has a different length depending on the activation state, and thus creates a correspondingly different vibration position of the vibrating wire (21, 31, 41 and 51). A vibrating wire sensor can thus be designed to be more robust, wherein the power consumption is additionally considerably less. The invention further relates to a vibrating wire having an exciter layer (22, 32, 42 and 52), which has a piezoelectric activation layer.

A vibration sensor according to an embodiment includes a laminated body. The laminated body includes a support layer a first end of which is fixed; a piezoelectric layer on the support layer; an insulating layer disposed between the support layer and the piezoelectric layer; a common electrode disposed on a first principal surface of the piezoelectric layer; a first sensing electrode disposed in a first area on a second principal surface of the piezoelectric layer on the side opposite to the first principal surface; and a drive electrode disposed in a second area different from the first area on the second principal surface of the piezoelectric layer. The first area is located near the first end of the support layer.

A resonator is suitable for reducing or suppressing a force transmitted by a vibrating portion of the resonator to a support part. To this end, the vibrating portion includes two extensions which are each meander shaped such that two segments of each extension have respective speed components that are oriented in opposite directions. Such a resonator, which is balanced, can advantageously be used within a rate gyro or a force sensor.

A measurement transducer for measuring a force includes a resonator element, which can be excited to at least one resonance frequency, and at least one force application element on which the force is applied and which transmits the force to the resonator element. The force application element is a hollow body defining a top surface, a lateral surface and a cavity. The top and lateral surfaces are mechanically connected and enclose the cavity, which contains the resonator element that is mechanically connected to the lateral surface. The lateral surface defines at least one recessed area that extends into the cavity and prevents transmission of the force from the top surface. The lateral surface defines at least one non-recessed area that transmits the force from the top surface.

In a load sensor detecting a magnitude of an external load applied in a direction parallel to a sheet shape of a sheet-shaped quartz crystal resonator, the load sensor comprising: a quartz crystal resonator layer including the sheet-shaped quartz crystal resonator and a pair of electrode portions on a pair of surfaces opposite to each other in a plate thickness direction of the quartz crystal resonator; and a pair of holding layers disposed to sandwich both sides of the sheet shape of the quartz crystal resonator layer and causing a displacement in substantially the same amount as the quartz crystal resonator layer when the external load is applied to the quartz crystal resonator layer, the holding layers and the quartz crystal resonator layer are made of materials having substantially equivalent rates of thermal expansion.

A piezoelectric sensor is fixed to a detection object and detects distortion of the detection object includes first and second principal surfaces, and extends in the lengthwise direction. The piezoelectric sensor includes a piezoelectric body whose polarization axis extends in a direction parallel or substantially parallel to the lengthwise direction, and first and second detecting electrodes that are provided on a surface of the piezoelectric body and that extend in a direction parallel or substantially parallel to the lengthwise direction. Distortion of the detection object is detected based on electric output corresponding to shear stress of the piezoelectric body.