A capacitance sensor 1A in which first electrodes 3(1) to 3(4) and a second electrode 4 are arranged on a base material 2 made of a dielectric includes grounded electrostatic shielding members (5(1) to 5(6)). The electrostatic shielding members 5 are arranged, for example, at positions between first wiring portions 6(1)in, 6(2)in, 6(4) in connected to the first electrodes 3(1), 3(2), 3(4) and the second electrode 4, at a position between a second wiring portion 6(5)in connected to the second electrode 4 and the first electrode 3(4), and at a position between the second wiring portion 6(5)in and the first wiring portion 6(4)in.

A capacitance sensor 1A in which first electrodes 3(1) to 3(4) and a second electrode 4 are arranged on a base material 2 made of a dielectric includes grounded electrostatic shielding members (5(1) to 5(6)). The electrostatic shielding members 5 are arranged, for example, at positions between first wiring portions 6(1)in, 6(2)in, 6(4) in connected to the first electrodes 3(1), 3(2), 3(4) and the second electrode 4, at a position between a second wiring portion 6(5)in connected to the second electrode 4 and the first electrode 3(4), and at a position between the second wiring portion 6(5)in and the first wiring portion 6(4)in.

In a tactile sensing system, a sensor portion of a tactile sensor is provided at a grasping portion of a robot, and outputs plural signals respectively corresponding to plural first electrodes that face a second electrode. On the basis of all or some of the plural signals, an output section calculates respective pressure values of plural pressure detecting positions within a contacting surface of the sensor portion which contacting surface contacts a workpiece, and outputs data of a pressure distribution. Further, on the basis of all or some of the plural signals, the output section calculates one aggregate shearing force value for the entire contacting surface, and outputs data of the aggregate shearing force value.

A force sensor includes a support member, a force receiving member to be displaced with respect to the support member by an action of an external force, and a strain generating member having a scale holding portion and an elastic connection portion connecting the support member and the force receiving member. The force sensor further includes scales each serving as a detection target object and disposed on the elastic connection portion and the scale holding portion, and displacement detection elements mounted on a sensor substrate of the support member to face the scales in a one-to-one correspondence to detect movements of the scales. The force receiving member includes metal, and the strain generating member includes resin.

A strain body of a force sensor according to the present invention includes a tilting structure disposed between a force receiving body and a support body, a force-receiving-body-side deformable body connecting the force receiving body and the tilting structure, and a support-body-side deformable body connecting the tilting structure and the support body. The tilting structure includes a first tilting body that extends in a second direction orthogonal to a first direction and that is elastically deformable by the action of force in the first direction.

The invention relates to a force sensor 100 that detects a force acting from the outside, and provides the force sensor 100 whose reduction in size and cost can be achieved. The force sensor 100 includes a support member 20, a force receiving member 4 that is displaced with respect to the support member 20 by the action of an external force, an elastic connection member 5 connecting the support member 20 and the force receiving member 4, scales 8a to 8d, which are detection target object bodies, disposed at the elastic connection member 5, displacement detection elements 9a to 9d that are mounted on the sensor substrate 7 composing the support member 20 so as to face the scales 8a to 8d in a one-to-one manner, and that detect movements of the scales 8a to 8d.

A capacitance sensor 1A in which first electrodes 3(1) to 3(4) and a second electrode 4 are arranged on a base material 2 made of a dielectric includes grounded electrostatic shielding members (5(1) to 5(6)). The electrostatic shielding members 5 are arranged, for example, at positions between first wiring portions 6(1)in, 6(2)in, 6(4) in connected to the first electrodes 3(1), 3(2), 3(4) and the second electrode 4, at a position between a second wiring portion 6(5)in connected to the second electrode 4 and the first electrode 3(4), and at a position between the second wiring portion 6(5)in and the first wiring portion 6(4)in.

A mutual and overlap capacitance based sensor may include a top stretchable layer including a first electrode configured in a serpentine pattern, a bottom layer including a second electrode, and a dielectric layer positioned between the first electrode and the second electrode. The second electrode may have a line shape which runs perpendicular to a wavelength direction of the first electrode and parallel to an amplitude direction of the of the first electrode.

The capacitance sensor 1 includes a self-capacitance electrode 5, first electrodes 3 (3(1) to 3(4)), and a second electrode 4 which are arranged being separated from each other in a thickness direction of an elastically deformable base material 2 formed by a dielectric. The self-capacitance electrode 5 is connected to a first connection portion 10a for measuring capacitance by a self-capacitance method and a grounded second connection portion 10b via a switch 10 so as to be selectively connected to the first connection portion 10a and the second connection portion 10b.

A proximity and three-axis force sensor based sensor may include a first taxel including a first electrode formed within a top layer configured in a serpentine pattern, a second electrode formed within a bottom layer, and a dielectric layer positioned between the top layer and the bottom layer and a second taxel including a first electrode formed within the top layer and having a first surface area, a second electrode formed within the bottom layer and having a second surface area, and a ground electrode formed within the top layer above the first electrode of the second taxel having a surface area greater than the first surface area of the first electrode of the second taxel. The second surface area may be different than the first surface area. A first edge of the first electrode may be vertically aligned with a first edge of the second electrode.