A waterproof member includes a laminated body including a second silicon layer and a second silicon oxide layer, and a through hole that is provided in the laminated body, prevents passing of liquid, and allows passing of gas, the through hole includes a first through hole that passes through the second silicon layer, and a second through hole passing through the second silicon oxide layer and communicating with the first through hole, and a width of the second through hole is smaller than a width of the first through hole.

Provided is a pressure detection device including: a pressure detection unit; a flow passage unit; and a mounting unit configured to removably mount the flow passage unit on the pressure detection unit. The pressure detection unit has a pressure detecting diaphragm and a sensor rod arranged at the center part of a first surface of the pressure detecting diaphragm, protruding toward the flow passage unit along a first axis orthogonal to the pressure detecting diaphragm, and having a top surface orthogonal to the first axis. The flow passage unit has a flow passage diaphragm, and a displacement of the flow passage diaphragm in contact with the top surface is transmitted to the pressure detecting diaphragm via the sensor rod in a state where the flow passage unit is mounted on the pressure detection unit by the mounting unit.

A differential pressure sensor comprises a cavity having a base including a base electrode and a membrane suspended above the base which includes a membrane electrode, wherein the first membrane is sealed with the cavity defined beneath the first membrane. A first pressure input port is coupled to the space above the sealed first membrane. A capacitive read out system is used to measure the capacitance between the base electrode and membrane electrode. An interconnecting channel is between the cavity and a second pressure input port, so that the sensor is responsive to the differential pressure applied to opposite sides of the membrane by the two input ports.

A method of and system for automatically adjusting airflow and sensors for use therewith are disclosed. A sensor assembly includes a first face on an opposite side of the sensor assembly relative to a second face. The assembly includes an electrical plug on the first face and an electrical outlet on the second face. The electrical outlet is of a same type that is complimentary to the electrical plug on the first face. The assembly includes a sensor for sensing a value of an environmental variable in a space and a sensor communication system for transmitting and receiving information. A sensor system includes a plurality of sensor assemblies disposed in a building. Each sensor assembly includes a sensor for sensing a value of an environmental variable of the space within which the sensor is placed. The system determines gradient values for the sensed environmental variable.

A pressure sensor includes a diaphragm that flexurally deforms when pressurized, a plurality of piezoresistive elements provided in the diaphragm, and a plurality of temperature-sensitive elements provided in the diaphragm in correspondence with the plurality of piezoresistive elements, wherein a separation distance between the piezoresistive element and the temperature-sensitive element corresponding to each other is shorter than a separation distance between the piezoresistive element and the temperature-sensitive element not corresponding to each other. Further, each of the temperature-sensitive elements is provided to at least partially overlap with the corresponding piezoresistive element in a plan view of the diaphragm.

Pressure measurement system (e.g., for an extracorporeal treatment system), method and pressure pod apparatus including a position sensor for use in repositioning a diaphragm that separates a liquid side cavity from a transducer side cavity (e.g., operatively connected to a pressure transducer); the liquid side cavity being in fluid communication with an inlet and an outlet.

A method for expanding the dynamic range of a capacitive pressure sensor and a capacitive pressure sensor having an expanded dynamic range are provided. The capacitive pressure sensor may comprise capacitive plates. At least one plate may be contoured to increase a surface area exposed to the other of the capacitive plates. The capacitive pressure sensor may comprise a diaphragm that is movably responsive to pressure. The diaphragm may have a hollowed volume within an interior of the diaphragm operative to increase a flexibility of the diaphragm in response to the pressure. The capacitive pressure sensor may be one of a plurality of capacitive pressure sensors in a pressure sensing device. The capacitive pressure sensors may have different capacitive responses and may each output a pressure measurement, whereby the device may select a pressure measurement to output based at least in part on the capacitive responses.

Provided is a pressure sensor for detecting the pressure of liquid flowing in a main flow path, including: an introduction flow path to which liquid is introduced from the main flow path; a pressure detection element having a pressure receiving surface and for detecting the pressure of liquid received by the pressure receiving surface in the introduction flow path; a diaphragm provided in a downstream-side end part of the introduction flow path and for transferring the pressure of the liquid to the pressure receiving surface while isolating a contact between the liquid in the introduction flow path and the pressure receiving surface; and a leak sensor for detecting a leakage of liquid into an internal space in communication with the pressure receiving surface.

Provided is a pressure sensor for detecting the pressure of liquid flowing in a main flow path, including: an introduction flow path to which liquid is introduced from the main flow path; a pressure detection element having a pressure receiving surface and for detecting the pressure of liquid received by the pressure receiving surface in the introduction flow path; a diaphragm provided in a downstream-side end part of the introduction flow path and for transferring the pressure of the liquid to the pressure receiving surface while isolating a contact between the liquid in the introduction flow path and the pressure receiving surface; and a leak sensor for detecting a leakage of liquid into an internal space in communication with the pressure receiving surface.

A diaphragm seal system, which is filled with a pressure transmission medium, wherein the pressure measurement instrument is welded by its connecting thread into a connecting adapter.