A pressure output device (POD) assembly for sensing fluid pressure in a fluid processing system, is provided. This POD assembly includes a shell defining a shell interior, and a movable diaphragm disposed in the shell interior and separating the shell interior into a flow-through chamber and a pressure sensing side. A sensor port is in fluid communication with the pressure sensing side. An inlet port and an outlet port are in fluid communication with the flow-through chamber. The inlet port and the outlet port define an inlet and an outlet, respectively, of a flow-through channel that passes through the flow-through chamber. A boss protrudes from the interior wall of the shell and extends into the flow-through channel to prevent occlusion of flow under different pressure conditions within the flow-through chamber.

A pressure output device (POD) assembly for sensing fluid pressure in a fluid processing system, is provided. This POD assembly includes a shell defining a shell interior, and a movable diaphragm disposed in the shell interior and separating the shell interior into a flow-through chamber and a pressure sensing side. A sensor port is in fluid communication with the pressure sensing side. An inlet port and an outlet port are in fluid communication with the flow-through chamber. The inlet port and the outlet port define an inlet and an outlet, respectively, of a flow-through channel that passes through the flow-through chamber. A boss protrudes from the interior wall of the shell and extends into the flow-through channel to prevent occlusion of flow under different pressure conditions within the flow-through chamber.

A mass flow controller includes a flow meter, a mechanical pressure-regulating valve disposed adjacent to and on an upstream side of the flow meter, and a flow control valve disposed on a downstream side of the flow meter. The mechanical pressure-regulating valve is embedded in a base of the mass flow controller. The mass flow controller also includes a compulsive valve-opening mechanism configured to compulsorily open the mechanical pressure-regulating valve. Thereby, the mass flow controller can instantly recover pressure on the upstream side of the flow meter to its original pressure even in a case where the pressure changes, and can raise measurement accuracy of a flow rate measured by the flow meter.

A mass flow controller includes a flow meter, a mechanical pressure-regulating valve disposed adjacent to and on an upstream side of the flow meter, and a flow control valve disposed on a downstream side of the flow meter. The mechanical pressure-regulating valve is embedded in a base of the mass flow controller. The mass flow controller also includes a compulsive valve-opening mechanism configured to compulsorily open the mechanical pressure-regulating valve. Thereby, the mass flow controller can instantly recover pressure on the upstream side of the flow meter to its original pressure even in a case where the pressure changes, and can raise measurement accuracy of a flow rate measured by the flow meter.

A pressure sensing device includes a case provided on a liquid flow path through a liquid, a diaphragm that is provided so as to divide a space in the case into a first space with the liquid flowing therethrough and a second space filled with a gas, a pressure sensor to measure pressure of the gas, and a diaphragm initial position adjustment mechanism capable of adjusting an initial position of the diaphragm to a desired position. The diaphragm initial position adjustment mechanism includes a reciprocating pump that includes a cylinder in communication with the second space, a plunger provided so as to be able to advance and retract within the cylinder, and a plunger driving part to advance and retract the plunger, and adjusts a filling amount of the gas filling the second space by advancing and retreating the plunger in the cylinder by the plunger driving part.

A micromechanical component, whose diaphragm is supported and has support structures on its inner diaphragm side. Each of the support structures includes a first and second edge element structure, and at least one intermediate element structure positioned between the first and second edge element structures. For each of the support structures, a plane of symmetry is definable, with respect to which at least the first edge element structure of the respective support structure and the second edge element structure of the respective support structure are specularly symmetric. In each of support structures, a first maximum dimension of its first edge element structure perpendicular to its plane of symmetry and a second maximum dimension of its second edge element structure perpendicular to its plane of symmetry are greater than the maximum dimension of its intermediate element structure perpendicular to its plane of symmetry.

A pressure sensor that includes a housing with an upper housing part and a lower housing part, the upper housing part and the lower housing part being configured such that a chamber is formed between them. A diaphragm is provided between the upper housing part and the lower housing part, and dividing the chamber into an upper chamber and a lower chamber. A magnetic core is linked to the diaphragm. An operating spring includes a top end and a bottom end, the top end being supported against the upper housing part and the bottom end being supported against the magnetic core. At least one of the top end and the bottom end of the operating spring is provided with an adhesive layer. The pressure sensor enables the operating spring and the magnetic core to move integrally with each other, thereby improving the precision of the pressure sensor.

A pressure measurement device is provided. The pressure measurement device includes a pressure gauge having a hermetically sealed cavity. The cavity includes a pressure transferring media. The materials chosen for both the pressure gauge and the pressure transferring media are selected so that thermal effects on the pressure measurement device are minimized. The pressure transferring media includes a first material and a second material. The material for the pressure gauge and the materials for the pressure transferring media, in particular the first material and the second material, may be selected so that the volume of the pressure transferring media substantially fills the volume of the cavity of the pressure gauge within a particular temperature range. The pressure measurement device includes a pressure reading mechanism coupled to the pressure gauge and operative to convert a displacement of the pressure gauge to a pressure measurement reading.

The present invention discloses a diaphragm type ultra-thin pressure gauge, including a mounting base, a gauge core inner cover and an elastic diaphragm. The gauge core inner cover includes an inner cover body portion covering on the top surface of the mounting base and an inner cover edge portion located at the outer side of the lower end of the inner cover body portion. An edge of the elastic diaphragm is fixedly clamped between an inner side of the inner cover edge portion and the top surface of the mounting base. The mounting base and the gauge core inner cover are made of a hot-melt plastic. The outer side of the inner cover edge portion is in hot-melt adhesion with the top surface of the mounting base. A diaphragm central hole is provided in the middle of the elastic diaphragm.

The present invention discloses a diaphragm type ultra-thin pressure gauge, including a mounting base, a gauge core inner cover and an elastic diaphragm. The gauge core inner cover includes an inner cover body portion covering on the top surface of the mounting base and an inner cover edge portion located at the outer side of the lower end of the inner cover body portion. An edge of the elastic diaphragm is fixedly clamped between an inner side of the inner cover edge portion and the top surface of the mounting base. The mounting base and the gauge core inner cover are made of a hot-melt plastic. The outer side of the inner cover edge portion is in hot-melt adhesion with the top surface of the mounting base. A diaphragm central hole is provided in the middle of the elastic diaphragm.