Sensor arrangement and method for monitoring a person with a sensor arrangement, which includes measuring electronics and a sensor structure that can be fitted onto a base. The sensor structure includes at least one sensor, and the arrangement determines, by the data measured by the measuring electronics and the sensor, a change in the moisture of the base and the presence of a person on the base.

A pressure sensor includes a first plate (102), a second plate (104) and a foam (106) disposed between the first and second plate. The foam is a polyurethane foam having an average cell size of about 50 to 250 urn and a density of between 5 to 30 lbs/ft3.

A space-saving pressure sensor for a metal or plastics processing tool is configured to perform date stamping during injection molding with the processing tool. The pressure sensor is configured to be inserted into a single drilled hole of the tool. A first cast-compatible mark and a second cast-compatible mark of the pressure sensor may be adjusted against one another in such a way that a variety of different date marks can be created, which may then be applied to different injection-molded products. The pressure sensor may be used within the framework of manufacturing an injection-molded product.

The disclosure relates to method and apparatus for micro-contact printing of micro-electromechanical systems (MEMS) in a solvent-free environment. The disclosed embodiments enable forming a composite membrane over a parylene layer and transferring the composite structure to a receiving structure to form one or more microcavities covered by the composite membrane. The parylene film may have a thickness in the range of about 100 nm-2 microns; 100 nm-1 micron, 200-300 nm, 300-500 nm, 500 nm to 1 micron and 1-30 microns. Next, one or more secondary layers are formed over the parylene to create a composite membrane. The composite membrane may have a thickness of about 100 nm to 700 nm to several microns. The composite membrane's deflection in response to external forces can be measured to provide a contact-less detector. Conversely, the composite membrane may be actuated using an external bias to cause deflection commensurate with the applied bias. Applications of the disclosed embodiments include tunable lasers, microphones, microspeakers, remotely-activated contact-less pressure sensors and the like.

A system includes a safety system having one or more valves configured to block a flow of fluid from a source to a destination, a non-invasive pressure measurement system having a plurality of non-invasive pressure sensors configured to monitor a pressure of the fluid without directly contacting the fluid, and a controller configured to receive feedback from the non-invasive pressure measurement system and to adjust a position of the one or more valves of the safety system based on the feedback.

The invention relates to a sensor mat (4) for an area sensor system (1.2), particularly for monitoring a room (101) of a building (100), comprising a flexible base unit (10) that has a first carrier element (11) with a planar extension and a first main side (11.1) and a second main side (11.2), and at least one detection means (30) for detecting an event (3). In addition, the invention relates to an area sensor system (1.2) for detecting an event (3), and to a method (200) for producing a sensor mat (4).

A pressure sensing device (1000) comprises first and second electrodes (10, 20) spaced from each other by a distance. At least one of the electrodes is formed of/comprises a unitary piece of non-metallic conductive material. The distance is changeable in response to a pressure/force applied to the first and/or second electrode. The device comprises a measurement module (500) connected to the first/second electrode at a plurality of sensing points (S1 . . . ). The measurement module is configured to measure a change in capacitance between the first and second electrodes, in response to a change in the distance when a pressure/force is applied to the first and/or second electrode, at each sensing point individually and/or at all sensing points simultaneously. The measurement module is configured to determine the location, area and amount of applied pressure on the first and/or second electrode from the individual measurements, and/or the amount of the applied pressure from the simultaneous measurement.

The present disclosure includes a pressure transducer comprising: a frame; a cantilevered beam; a resilient beam portion; a signal processing circuit; a wiring terminal; and a support member. The resilient beam portion anchors the cantilevered beam to the frame.

The cantilevered beam moves in response to a pressure-induced force applied to the cantilevered beam and the resilient beam portion bends producing a strain within the resilient beam portion. The support member comprises a cavity and the signal processing circuit is entirely installed inside the cavity. There is a strain gauge diffused into, implanted into, and/or affixed to the resilient beam portion. The cavity of the support member includes a first aperture disposed along the first surface of the support member and the inner surface of the frame covers the first aperture.

The invention provides an electroactive material (preferably electroactive polymer) sensor system, comprising an electroactive material sensor (22) and a control system (28) for performing measurements relating to the impedance of the electroactive material sensor at at least first and second different frequencies. From these measurements a temperature at the sensor and an external pressure or force applied to the sensor can be determined. The sensor can thus be used as a pressure sensor and as a temperature sensor. When used in combination with actuation, an electroactive material actuator with integrated temperature sensing functionality is able to measure the temperature at the exact actuator position, which is always closer than an external thermocouple.

A micromechanical sensor includes a base substrate, a cap substrate, and a MEMS substrate that is connected to each of the base and cap substrates by respective metallic bond connections and that includes a mechanical functional layer including movable MEMS elements, an electrode device for acquiring an indication of a movement of the MEMS elements and fashioned by layer deposition, and a sacrificial layer that is lower than the mechanical function layer, is fashioned by layer deposition, and is omitted in a region underneath the movable MEMS elements.