A process device for coupling to an industrial process for use in monitoring or controlling the process includes a device housing configured to physically couple to the industrial process. A process variable sensor is configured to measure a process variable and measurement circuitry coupled to the process variable sensor provides an output related to the sensed process variable. A piezoelectric transducer provides an electrical output related to pressure pulsations in the industrial process. Electrical circuitry in the housing includes an input configured to receive the electrical output from the piezoelectric sensor.

A pressure transducer comprising a flexible member made of amorphous quartz and a crystalline quartz sensor are coupled together without an adhesive material. Instead, the amorphous quartz and the crystalline quartz sensor are coupled together at the molecular level. In some embodiments, the crystalline quartz sensor remains in compression or tension during the entire operating range of the pressure transducer. In one embodiment, the crystalline quartz sensor is pre-stressed in either compression or tension when the pressure transducer is exposed to atmospheric pressure. In one embodiment, pressure transducer is located in pressure stabilizing system.

A method of manufacturing a sensor set-up for determining at least one pressure of a fluid medium. The method includes: a) providing a blank of a sensor set-up including at least one pressure connection, the pressure connection including at least one pressure deformation element made up of at least one material suitable for induction; b) positioning at least one glass element onto a surface of the pressure deformation element; c) measuring at least one temperature of the pressure deformation element using at least one pyrometer; d) inducing a voltage in the pressure deformation element using at least one inductor in such a manner, that the glass element melts and a glass layer forms on the pressure deformation element; e) positioning a sensor element onto the glass layer in such a manner, that an integral bond forms between the sensor element and the glass layer.

The invention relates to a pressure sensor including an electromagnetic resonator with waveguide having a dielectric material with a dielectric permittivity that varies with temperature. There is an excitation circuit configured to propagate an electromagnetic field through the resonator and a device for heating the resonator. There is also a device for detecting the electromagnetic resonant frequency of the resonator and a device for determining the pressure of the gas surrounding the sensor as a function of the detected resonant frequency of the resonator.

A meter electronics (20) for determining a vapor pressure using a vapor pressure meter factor is provided. The meter electronics (20) comprises a processing system (200) communicatively coupled to a meter assembly (10). The processing system (200) is configured to provide a drive signal to the meter assembly (10) having a fluid, measure a drive gain of the drive signal provided to the meter assembly (10), and determine the vapor pressure of the fluid based on a previously determined relationship between the drive gain and a reference gas-liquid ratio.

A pressure gauge for measuring pressure in a vacuum chamber includes a flange couplable with the vacuum chamber, a pressure sensor configured to measure pressure, an air valve between the flange and the pressure sensor, and a vibration dampening assembly configured to dampen vibration in the pressure gauge. A sputtering system for sputter deposition includes a sputter chamber and the pressure gauge. The flange of the pressure gauge is coupled with the sputter chamber. A method of measuring pressure in a vacuum chamber with the pressure gauge includes coupling the flange with the vacuum chamber, dampening vibration in the pressure gauge with the vibration dampening assembly, and obtaining a pressure measurement from the pressure sensor.