A method for forming a pressure sensor includes forming a base of a sapphire material, the base including a cavity formed therein; forming a sapphire membrane on top of the base and over the cavity; forming a lower electrode on top of the membrane; forming a piezoelectric material layer on an upper surface of the lower electrode, the piezoelectric material layer being formed of aluminum nitride (AIN); and forming at least one upper electrode on an upper surface of the piezoelectric material layer.

A pressure measuring device configured as a multi-function device operable as a differential pressure switch (DPS), a differential pressure transducer (DPT), a pressure switch (PS), a pressure transducer (PT) providing readings of high and low pressure zones, a data recording logger, and a backwashing controller. The pressure measuring device may use at least two piezoelectric sensors operable to measure pressure attributes. The associated electronic hardware, processing unit, cables and pressure tubing are retrofittable and packaged in a molded case, with no moving parts with the electronic hardware fully coated to make the device reliable and resistant to extreme environmental conditions. The device is configured for remote access, enabling remote device configuration, maintenance and servicing. The device is further operable to communicate with various external devices: a tablet, a smartphone and the like as a user interface and further provides wired interface with a programmable logic controller (PLC) via RS-485 interface.

According to some aspects of the subject technology, an apparatus includes a first electrode, a second electrode and a dielectric membrane disposed between the first electrode and the second electrode. The first electrode and the second electrode include a number of pores within a region of an input port of the apparatus. The first electrode, the second electrode and the dielectric membrane form a capacitor that is configured to enable detection of occlusion of the input port by water.

Pressure measuring device, comprising a connector extending along a longitudinal direction around a central longitudinal axis, the connector comprising a first longitudinal end intended to be fixed to an element containing pressurized gas, and a second longitudinal end provided with a diaphragm intended to be subjected to the pressure, the diaphragm comprising a pressure sensor of the piezoelectric type generating an electrical signal representative of the pressure measured, the pressure sensor being connected to an electronics board comprising electronic logic for processing the electrical signal of the sensor, the device furthermore comprising a transmission/reception antenna of the radiofrequency type fitted on the electronics board in order to receive and transmit data from and to the electronic logic, the electronics board being housed in a protective casing fixed to the connector, wherein the antenna is located on or adjacent to an axis passing through the central longitudinal axis of the connector.

A differential pressure sensor for determining a differential pressure value, comprising: a differential pressure measuring transducer having a measuring membrane; a membrane seal having a membrane seal body including a pressure chamber filled with a transmission fluid in which a filling body having a recess is arranged, wherein the differential pressure measuring transducer arranged in the recess, wherein a first pressure is applied to the differential pressure measuring transducer on a first measuring membrane side and a second pressure is applied to a second measuring membrane side such that deformation of the measuring membrane represents a differential pressure value between the first pressure and the second pressure, wherein a piezoelectric layer for determining an absolute pressure value of the first pressure is provided inside the pressure chamber.

A displacement detection device includes a piezoelectric sensor. The piezoelectric sensor is provided with a piezoelectric sheet on both principal surfaces of which detection electrodes are formed. When stress is applied to the piezoelectric sensor, charge is generated, and an output voltage in accordance with this generated charge is detected in a DC voltage detector. A controller measures this output voltage at a predetermined time interval. Every time the controller measures the output voltage, the controller makes a short-circuit control of a switch, and causes the charge generated in the piezoelectric sensor to be released. The controller can thereby detect an amount of change in output voltage generated at the predetermined time interval in accordance with an amount of displacement of the piezoelectric sensor. By sequentially integrating this, the controller can accurately detect the amount of displacement of the piezoelectric sensor which changes across measurement timings.

According to one embodiment, a pressure sensor includes a base, and a first sensor unit. The first sensor unit includes a first transducer thin film, a first strain sensing device and a second strain sensing device. The first strain sensing device includes a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first and the second magnetic layers. The second strain sensing device is provided apart from the first strain sensing device on the first membrane surface and provided at a location different from a location of the barycenter, the second strain sensing device including a third magnetic layer, a fourth magnetic layer, and a second intermediate layer provided between the third and the fourth magnetic layers, the first and the second intermediate layers being nonmagnetic. The first and the second strain sensing devices, and the barycenter are in a straight line.

A base for supporting a piezoelectric sensor which includes a generally planar support frame having an opening and a housing mounted in the opening. The housing has an upper portion including a sensor and a lower portion including a biasing member in contact with the sensor. The sensor is biased by the biasing force of the biasing member against the upper portion of the housing, whereby the upper portion is in turn biased by the biasing force against a floor of a cage positioned on the upper side of the support frame.

A diaphragm pressure gauge includes: a structure disposed under pressure to be measured; two diaphragms attached to the structure so as to oppose each other; and a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.

A pressure sensor die especially suitable for high-temperature, high-pressure operating environment and delivering accurate and reliable pressure measurement at low cost. A single crystalline silicon includes a cap, a substrate and a base connected together. A recess formed on the cap creates an upper sealed cavity with the substrate. A silicon oxide layer is formed between the substrate and the cap. A recess formed on the base creates a lower sealed cavity with the substrate. The upper sealed cavity and the lower sealed cavity overlap in their projections. The substrate includes at least two sets of piezoresistive sensing elements located within the overlapping projections, perpendicular to each other, and oriented in different crystallographic directions.