A transmitter for measuring a process pressure includes a pressure sensor and a temperature sensor providing an input temperature signal. A first remote pressure sensitive diaphragm couples to the transmitter by a first capillary tube filled with a fill fluid having a density as a function of fill fluid temperature. An input circuit is operably connected to at least the pressure sensor and provides an intermediate pressure signal at least roughly representative of the process pressure. A correcting circuit is coupled to the temperature sensor and to the input circuit. The correcting circuit processes the intermediate pressure signal by compensating for the fill fluid density as a function of the temperature and provides a compensated output more closely representative of the process pressure. The correction circuit further performs an initial height determination based upon a pressure measurement made while no pressure is applied to the first diaphragm.

A high accuracy capacitive pressure transducer capable of performing measurements at a fixed temperature, with stability better than 2mK, in the temperature range of 15 C.30 C. and which does not require the use of correction for thermal transpiration effect. The pressure transducer includes a vacuum gauge having a pressure sensor and a pressure sensor sheath, a temperature control unit secured in a cap; an aluminum block having a lower surface in contact with the pressure sensor sheath and an upper surface in contact with a main plate; and a temperature sensor located between the main plate and the upper surface of the aluminum block. The vacuum gauge is connected to a vacuum system by means of a connecting pipe.

A temperature difference calculation unit determines a temperature difference between a temperature measured by a first temperature measurement mechanism and a temperature measured by a second temperature measurement mechanism. The first temperature measurement mechanism is disposed on an outer wall surface of an inner container at a position corresponding to an element-arrangement-side space in the inner container. The second temperature measurement mechanism is disposed on an outer peripheral surface of a heater. The heater is disposed outside an outer container that accommodates the inner container and positioned on a wall surface of the outer container.

A capacitive pressure transducer includes a shielded spacer positioned between the capacitor electrodes and driven with a separate voltage source.

A sensing device is provided. The sensing device includes a processing circuit and a multi-sensor integrated single chip. The multi-sensor integrated single chip includes a substrate and a temperature sensor, a pressure sensor, and an environmental sensor disposed on the substrate. The temperature sensor senses temperature. The pressure sensor senses pressure. The environmental sensor senses an environmental state. The processing circuit obtains a first sensed temperature value from the temperature sensor when the environmental sensor does not operate, and it obtains a second sensed temperature value from the temperature sensor when the environmental sensor operates. The processing circuit obtains a sensed pressure value from the pressure sensor. The processing circuit obtains at least one temperature calibration reference of the pressure sensor according to the first and second sensed temperature values and calibrates the sensed pressure value according to the temperature calibration reference.

Various embodiments include a capacitive pressure transducer for measuring the pressure of a medium adjacent to the transducer comprising: a measurement diaphragm including a first surface in contact with the medium and a second surface facing away from the medium; a measurement electrode integrated with the measurement diaphragm; a base body arranged opposite the second surface, the base body comprising a counter electrode forming a measurement capacitance with the measurement electrode; and an electrically insulating chamber bounded by the base body and the measurement diaphragm. The counter electrode is in contact with the electrically insulating chamber. At least one of the measurement electrode or the counter electrode comprises a meandering pattern layer in direct contact with the electrically insulating chamber.

The invention relates to a method for compensating measured values in capacitive pressure measuring cells using a measuring capacity and at least one reference capacity, comprising the following steps: determination of a pressure-induced capacitance change of the reference capacitance as a function of a pressure-induced capacitance change of the measuring capacitance, determination of a thermal shock-induced capacitance change of the reference capacitance as a function of a thermal shock-induced capacitance change of the measuring capacitance, measurement of the measuring capacitance and of the at least one reference capacitance, determination of the thermal shock-induced capacitance change of the measuring capacitance from a combination of the above dependencies, compensation of the measured measuring capacitance by the thermal shock induced capacitance change of the measuring capacitance, and determination and output of the pressure-induced capacitance change or a quantity derived therefrom.

The invention relates to various means for implementing a method for compensating measured values in capacitive pressure measuring cells using a measuring capacity and at least one reference capacity, comprising the following steps: determination of a pressure-induced capacitance change of the reference capacitance as a function of a pressure-induced capacitance change of the measuring capacitance, determination of a thermal shock-induced capacitance change of the reference capacitance as a function of a thermal shock-induced capacitance change of the measuring capacitance, measurement of the measuring capacitance and of the at least one reference capacitance, determination of the thermal shock-induced capacitance change of the measuring capacitance from a combination of the above dependencies, compensation of the measured measuring capacitance by the thermal shock induced capacitance change of the measuring capacitance, and determination and output of the pressure-induced capacitance change or a quantity derived therefrom.

The invention relates to various means for implementing a method for compensating measured values in capacitive pressure measuring cells using a measuring capacity and at least one reference capacity, comprising the following steps: determination of a pressure-induced capacitance change of the reference capacitance as a function of a pressure-induced capacitance change of the measuring capacitance, determination of a thermal shock-induced capacitance change of the reference capacitance as a function of a thermal shock-induced capacitance change of the measuring capacitance, measurement of the measuring capacitance and of the at least one reference capacitance, determination of the thermal shock-induced capacitance change of the measuring capacitance from a combination of the above dependencies, compensation of the measured measuring capacitance by the thermal shock induced capacitance change of the measuring capacitance, and determination and output of the pressure-induced capacitance change or a quantity derived therefrom.

An environmental sensor including sensor elements to measure multiple physical quantities associated with a surrounding environment, and includes a state determination unit that determines whether the environmental sensor is in a first state in which the sensor is fixed at a predetermined installation location or in a second state in which the sensor is away from an installation location, and an operation switch unit that switches an operation of each sensor element that measures the physical quantities based on whether a state determined by the determination unit is the first state or the second state.