Embodiments disclosed herein include a substrate support having a sensor assembly, and processing chamber having the same. In one embodiment, a substrate support has a puck. The puck has a workpiece support surface and a gas hole exiting the workpiece support surface. A sensor assembly is disposed in the gas hole and configured to detect a metric indicative of a deflection of a workpiece disposed on the workpiece support surface, wherein the sensor assembly is configured to allow gas to flow past the sensor assembly when positioned in the gas hole.

A long-term in-situ observation device for the deep sea bottom supported engineering geological environment is provided, including: a sediment acoustic probe, a sediment pore water pressure probe, a three-dimensional resistivity probe, a water observation instrument, a long-term observation power supply system, a probe hydraulic penetration system, a general control and data storage transmission system, an acoustic releaser, an underwater acoustic communication apparatus, and an instrument platform. The observations include the engineering properties, physical properties, mechanical properties, and biochemical properties of a seawater-seabed interface-sediment. The engineering properties and the physical and mechanical indexes of seafloor sediments are comprehensively determined by three-dimensional measurement of seafloor resistivity and acoustic wave measurements. The physical and biochemical properties of seawater are expected to be acquired by sensors. The observation probe penetrates into the sediments following the hydraulic method. Powered by seawater dissolved oxygen batteries; data transmission is achieved through sea surface relay buoys and satellite communications. The present invention provides an effective integrated, in situ and long-term observation device and method for the deep sea engineering geological environment.

In an example, this document discloses an apparatus for insertion into a body lumen, the apparatus comprising an optical fiber pressure sensor. The optical fiber pressure sensor comprises an optical fiber configured to transmit an optical sensing signal, a temperature compensated Fiber Bragg Grating (FBG) interferometer in optical communication with the optical fiber, the FBG interferometer configured to receive a pressure and modulate, in response to the received pressure, the optical sensing signal, and a sensor membrane in physical communication with the FBG interferometer, the membrane configured to transmit the received pressure to the FBG interferometer.

The present invention concerns apparatus (1) for obtaining distributed pressure measurements in a wellbore (2), the apparatus (1) comprising: a flexible rod (10; 110) arranged to be disposed in the wellbore (2); and an elongate sensing member (15; 115) extending along the rod, the sensing member comprising at least one optical sensing fibre member (16; 116) arranged to afford a continuous length of sensing capability, wherein the sensing member extends in a groove formed in the exterior surface of the rod.

A passive microscopic flow sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fiber. The three-dimensional microscopic optical structure includes a post attached off-center to and extending longitudinally from the cleaved tip of the optical fiber. A rotor of the three-dimensional microscopic optical structure is received for rotation on the post. The rotor has more than one blade. Each blade has a reflective undersurface that reflects a light signal back through the optical fiber when center aligned with the optical fiber, the blades of the rotor shaped to rotate at a rate related to a flow rate.

A sensor to sense pressure in a pressure bottle and a method of assembling the sensor involve two or more fiber Bragg gratings (FBGs) affixed to a different radial location of a diaphragm seal of the pressure bottle. The sensor includes a light source to provide incident light to the two or more FBGs, and a photodetector to detect reflected light resulting from the two or more FBGs. Processing circuitry determines a pressure change in the pressure bottle based on the reflected light resulting from each of the two or more FBGs.

A device for testing temperature conduction and frost-heaving strain of a concrete lining canal comprises: a frost-heaving device comprising a lining canal body and a temperature control device, the temperature control device being configured to provide a predetermined temperature for the lining canal body; a detection device comprising a transverse deformation detection device, a vertical deformation detection device and a plurality of temperature sensors, the transverse deformation detection device being configured to detect a transverse frost-heaving strain parameter of the lining canal body, and the plurality of temperature sensors being arranged along an axial direction of the lining canal body, being embedded inside the lining canal body and being configured to detect temperature conduction performance of the lining canal body.

An active apparatus includes a pressure sensor array. The pressure sensor array includes at least one transducer and a standard optical fiber mechanically coupled thereto. The active apparatus includes a distributed Bragg reflector fiber laser located within the optical fiber. The fiber laser emits a wavelength. The fiber laser consists of two fiber Bragg gratings, which define a linear cavity. The linear cavity is mechanically coupled to the at least one transducer. A pressure change detected by the at least one transducer causes at least one property change in the optical fiber. For example, the at least one property change in the optical fiber causes a change in the cavity length. The change in the cavity length causes a wavelength shift relative to the wavelength emitted by the fiber laser.

A temperature correcting pressure gauge which has a diaphragm having at least one surface coupled to a source of pressure to be measured, the diaphragm first surface having a first FBG from a first optical fiber attached in an appropriately sensitive region of the diaphragm, a FBG from a second optical fiber attached to the opposite surface from the first FBG, the first and second FBGs reflecting or transmitting optical energy of decreasing or increasing wavelength, respectively, in response to an applied pressure. The first and second FBGs have nominal operating wavelength ranges that are adjacent to each other but are exclusive ranges and the FBGs also have closely matched pressure coefficients and temperature coefficients.

A distributed optical fibre sensor is discussed which is arranged to detect acoustic vibration and at least a first of two or more other measurands, which could be for example two or more of changes in temperature, changes in static pressure, and changes in static strain. At least first and second optical waveguides are arranged to have optical path length response characteristics to at least one of the other measurands which are different from each other, and an analyser is arranged to determine at least said first other measurand using differences between the interference signals from each of the optical waveguides.