The present disclosure relates to a relative-pressure sensor for determining a pressure of a medium in relation to an atmospheric pressure, the sensor comprising a housing; a measuring element arranged in the housing, wherein the pressure to be measured acts upon an outer surface of the measuring element, said surface being in contact with the medium; a reference-pressure supply, which supplies an inner surface of the measuring element with atmospheric pressure in the form of ambient air; an evaluation unit, which determines the pressure of the medium from a variable determined using the measuring element; and at least one drying chamber arranged in the housing for taking up atmospheric humidity from the ambient air supplied through the reference-pressure supply. Here, a bushing is provided, which can be pressed into the housing and has a capillary-type groove, which is helical at least in sections and runs around the bushing.

A sensor device includes a housing frame defining a first opening and a second opening; a sensing element having first and second sides is disposed within the housing frame and defines therein a first cavity at its first site and a second cavity at its second site, wherein the sensing element determines a differential pressure between the first and second sides; a first corrugated diaphragm configured to close the first opening to seal the first cavity, and a second corrugated diaphragm configured to close the second opening to seal the second cavity; and an inert hydraulic fluid disposed within the first and second cavities that fluidly couples an external pressure acting on the respective corrugated diaphragm to the respective side of the sensing element, wherein the first corrugated diaphragm and the second corrugated diaphragm is built by a conformal coating process using a substrate with structured surface.

A method for manufacturing a micromechanical sensor, in particular a pressure difference sensor, including creating a functional layer on a substrate; creating at least one rear side trench area proceeding from a rear side of a substrate, for exposing the functional layer for a sensor diaphragm; creating at least one front side trench area for forming at least one supporting structure, in particular an energy storage structure, preferably in the form of a spring structure, in the substrate as a mounting for the sensor diaphragm; and at least partially filling at least a front side trench area with a gel.

A system and method for sensing and indicating air pressure within an enclosed space is described. The system comprises a pressure sensing device and pressure indicator further comprising a housing enabled to house a plurality of electronic devices and having an opening, an elastomeric membrane covering the opening of the housing and capable of flexing inwards and outwards, a light emitting device to provide an illumination and a projector for projecting a positive pressure symbol and a negative pressure symbol. The elastomeric membrane flexes inwards along with a representation of the positive pressure symbol with an illumination of a first color when the pressure within the enclosed space is positive and the elastomeric membrane flexes outwards along with a representation of the negative pressure symbol with the illumination of a second color when the pressure within the enclosed space is negative.

To provide a pressure sensor element and a pressure sensor that have stable pressure sensitivity without the need for improving the accuracy of alignment between a diaphragm and a holding member, a pressure sensor element includes a thin plate diaphragm, a holding member that holds the diaphragm, and one or more strain resistance gauges that are provided on a first surface of the diaphragm and which change in resistance values according to deformation of the diaphragm, in which the holding member has recesses that, formed on an annular first end surface facing the first surface of the diaphragm, cut out parts of an inner circumference of the first end surface, and the strain resistance gauges are disposed near the regions corresponding to the recesses on the first surface of the diaphragm.

A pressure sensor includes a first pressure sensing portion and a second pressure sensing portion, each including a first rigid electrode, a second rigid electrode, and a deflectable membrane structure, wherein the second rigid electrode is between the first rigid electrode and the deflectable membrane structure, and wherein the first rigid electrode, the second rigid electrode and the deflectable membrane structure are in a vertical configuration, and wherein the first and second rigid electrode of the first pressure sensing portion form a reference capacitor, and wherein the second rigid electrode and the deflectable membrane structure of the first pressure sensing portion form a sensing capacitor, and wherein the first and second rigid electrode of the second pressure sensing portion form a reference capacitor, and wherein the second rigid electrode and the deflectable membrane structure of the second pressure sensing portion form a sensing capacitor.

Various embodiments are directed to a pressure sensor and method of using the same. A pressure sensor may comprise a substrate having a substrate thickness extending between a first substrate surface and a second substrate surface, wherein the first substrate surface and the second substrate surface define opposing ends of the substrate thickness; a first pressure sensing assembly attached to the first substrate surface and configured to detect a first pressure force associated with a first fluid volume, wherein a portion of the first substrate surface adjacent the first pressure sensing assembly is fluidly isolated from the first volume of fluid; and a second pressure sensing assembly attached to the second substrate surface and configured to detect a second pressure force associated with a second volume of fluid, wherein a portion of the second substrate surface adjacent the second pressure sensing assembly is fluidly isolated from the second fluid volume.

An oil-fill pressure transducer including a flexible member configured to protect an isolation diaphragm and sensing element. The pressure transducer includes a sensing element mounted to the header, an isolation diaphragm mounted on the front side of the header, and adjacent to the sensing element such that an oil-fill cavity is defined between the sensing element and the isolation diaphragm. The flexible member is disposed adjacent to the isolation diaphragm and a retention member is disposed adjacent to the flexible member. A cavity in communication with the retention member is configured to transmit pressure media to the isolation diaphragm via the flexible member. The flexible member can include thru-holes. The flexible member may compress under an applied positive pressure change. The flexible member may temporarily separate from at least a portion of the isolation diaphragm under an applied negative pressure change.

A pressure detector includes a first board with a first pressure inlet, a first groove, and a first board electrode; a second board with a second pressure inlet, a second groove, and a second board electrode; and a sensing unit arranged therebetween with a diaphragm. The first groove is in communication with the first pressure inlet so as to prevent the formation of a closed space between the first board and the diaphragm when they contact with each other. The second groove is in communication with the second pressure inlet so as to prevent the formation of a closed space between the second board and the diaphragm when they contact each other.

A temperature compensated differential pressure system is provided. The system includes a pair of flanges affixed together each having a flange diaphragm therein, wherein a plurality of capillary tubes extends between the pair of flanges and a pair of opposed remote diaphragm housings. The remote diaphragm housings include a remote diaphragm therein, wherein the remote diaphragm displaces a fill fluid in pressure capillaries to displace each flange diaphragm to detect a differential pressure between each location of the remote diaphragm housings. A compensating capillary extends from the remote diaphragm housings to an opposing flange diaphragm, wherein the compensating capillary is not in operable communication with the remote diaphragms. As such, any fluctuation in fill fluid volume of the compensating capillaries due to temperature fluctuations is applied to an opposing flange diaphragm to cancel temperature effects from the differential pressure determination.