Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.

A slew rate detection circuit connected to a sensor detects when an analog electrical signal from the sensor indicates a slew rate that exceeds a threshold value, and generates an interrupt electrical signal when the slew rate is detected as exceeding the threshold value. A control circuit determines a measurement value of the physical property in response to receiving the interrupt signal. The control circuit is connected to an A/D converter, which converts the analog electrical signal into a digital electrical signal, and performs a plurality of sensing system operations including determining the measurement value of the physical property as a function of the digital electrical signal.

A sensor arrangement includes a sensor which is arranged in a housing constructed of two plastic injection molded parts (2, 3). The electrical leads are sealingly led through the housing (1) and are sealed by way of O-rings which on the one hand bear in a groove of the lead and on the other hand bear in a recess forming the housing feed-through.

A differential pressure transmitter is disclosed, which comprises a body for housing a high-pressure sensor and a low-pressure sensor, a plurality of high-pressure process connectors formed in said body and fluidly coupled to said high-pressure sensor for transmitting a first pressure of a process fluid to said high-pressure sensor, each of said high-pressure process connectors comprising a conduit having an opening for receiving the process fluid, a plurality of low-pressure process connectors formed in said body and fluidly coupled to said low-pressure sensor for transmitting a second pressure of a process fluid to said low-pressure sensor, each of said low-pressure process connectors comprising a conduit having an opening for receiving the process fluid, wherein said second pressure is equal to or less than said first pressure, wherein said openings of the high-pressure connectors are spaced relative to said openings of the low-pressure connectors to allow a plurality of pair-wise connections to the process fluid.

The present invention relates to a differential pressure sensor. The differential pressure sensor includes: a housing including a body and a cover, the housing having a first chamber and a second chamber defined in the housing and separated from each other; a first pressure channel communicating with the first chamber; a second pressure channel communicating with the second chamber; a substrate on which an electronic component is mounted and in which a terminal is formed, the substrate including a first surface facing the first chamber and a second surface extending parallel to the first surface and facing the second chamber, the substrate configured to cover the second chamber; a sensor element installed on the first surface of the substrate so as to generate an electric signal corresponding to a pressure difference between the first chamber and the second chamber; a lead frame installed in the housing with one end thereof extending into the first chamber, the lead frame configured to transmit the electric signal of the sensor element to an external device; a conductive wire configured to connect the terminal of the substrate and the lead frame so as to transmit the electric signal of the sensor element to the lead frame; a first sealing member disposed in a region where the body and the cover make contact with each other, the first sealing member configured to seal the first chamber with respect to the outside; and a second sealing member disposed in a region where the substrate and the body make contact with each other, the second sealing member configured to seal the second chamber with respect to the first chamber.

According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement.

A method, device and system for a gage pressure transducer including the making thereof are provided. In one embodiment, a method includes receiving, at a first diaphragm, a first pressure, wherein the first diaphragm is composed of metal; transferring, from the first diaphragm, to a first sensor, the first pressure using a first oil region, wherein the first oil region is disposed between the first diaphragm and the first sensor; receiving, at the first sensor, the first pressure; measuring, by the first sensor, the first pressure to generate a first pressure signal; and outputting, from the first sensor, to a first header pin, the first pressure signal, wherein the first header pin is electrically coupled to the first sensor using a first conductive glass frit.

A differential pressure sensor includes: a sensor module including: a sensor case including a port through which a target fluid is to be introduced and a base attached with the port; a sensor configured to detect a physical quantity of the target fluid; a sensor substrate attached with the sensor, the sensor substrate having an outer circumferential surface facing an inner circumferential surface of the base; and a cover configured to press the sensor substrate against the base; and a case body including an electric circuit that is housed therein and electrically connectable to the sensor module, the case body having an open end to which the sensor module is externally attached, in which a sensor module clearance is defined between the outer circumferential surface of the sensor substrate and an inner circumferential surface of the sensor case.

The present invention provides a pressure change measuring apparatus and a pressure change measuring method, which are capable of detecting a change in pressure to be measured with respect to a time axis with high accuracy. Specifically, a reference value setting unit (60) included in a pressure change measuring apparatus (1) is configured to generate a reference value signal based on an output signal of a differential pressure measuring cantilever (4) under a predetermined state, and to output the reference value signal. An arithmetic processing unit (30) is configured to calculate the pressure change in pressure to be measured based on the output signal, the reference value signal, a volume of a cavity (10), a flowing quantity of a pressure transmission medium flowing into and out of the cavity (10) for every unit of a predetermined time period, and the like.

Exemplary embodiments of the present invention provide a differential pressure transducer that comprises first and second diaphragms of different configurations, i.e., different diameters and/or thicknesses. The pressure transducer provides more versatility over prior art designs as the diaphragms can be of different configurations yet still maintain substantially similar back pressures. Therefore, the errors commonly associated with back pressures are eliminated because the back pressures from the diaphragms ultimately cancel out in the sensor's differential pressure measurement.