A temperature compensated differential pressure system is provided. The system includes a pair of flanges affixed together each having a flange diaphragm therein, wherein a plurality of capillary tubes extends between the pair of flanges and a pair of opposed remote diaphragm housings. The remote diaphragm housings include a remote diaphragm therein, wherein the remote diaphragm displaces a fill fluid in pressure capillaries to displace each flange diaphragm to detect a differential pressure between each location of the remote diaphragm housings. A compensating capillary extends from the remote diaphragm housings to an opposing flange diaphragm, wherein the compensating capillary is not in operable communication with the remote diaphragms. As such, any fluctuation in fill fluid volume of the compensating capillaries due to temperature fluctuations is applied to an opposing flange diaphragm to cancel temperature effects from the differential pressure determination.

A pressure sensor assembly includes a pressure sensor, a pedestal and an electrically conductive header having a header cavity. The pressure sensor includes, an electrically conductive sensing layer having a sensor diaphragm, an electrically conductive backing layer having a bottom surface that is bonded to the sensing layer, an electrically insulative layer having a bottom surface that is bonded to a top surface of the backing layer, and a sensor element having an electrical parameter that changes based on a deflection of the sensor diaphragm in response to a pressure difference. The pedestal is bonded to the electrically insulative layer and attached to the header within the header cavity.

To provide a pressure sensor element and a pressure sensor that have stable pressure sensitivity without the need for improving the accuracy of alignment between a diaphragm and a holding member, a pressure sensor element includes a thin plate diaphragm, a holding member that holds the diaphragm, and one or more strain resistance gauges that are provided on a first surface of the diaphragm and which change in resistance values according to deformation of the diaphragm, in which the holding member has recesses that, formed on an annular first end surface facing the first surface of the diaphragm, cut out parts of an inner circumference of the first end surface, and the strain resistance gauges are disposed near the regions corresponding to the recesses on the first surface of the diaphragm.

The present disclosure is provided with a measuring element (M) and a measuring device. The measuring element includes a base body, a diaphragm and a permeation resistant layer, the diaphragm is fixedly connected to the base body, with a sealed cavity being defined between the diaphragm and the base body. The permeation resistant layer is arranged on an inner side surface, facing the sealed cavity, of the diaphragm, and extended continuously on the inner side surface of the diaphragm at least beyond a connection region of the diaphragm with the base body. The measuring device includes the measuring element (M).

Provided is a differential pressure sensor capable of improving joining stability of a filter. The differential pressure sensor includes: a sensor module configured to detect a pressure difference between an atmospheric pressure and a pressure of a measured medium; a case body, which is configured to contain the sensor module, and in which an atmosphere introducing hole for introducing atmospheric air into the case body is formed; and a filter provided from inside the case body to cover the atmosphere introducing hole, the case body having a protrusion, which protrudes to an inside of the case body, the atmosphere introducing hole being formed in the protrusion, the filter being joined to the protrusion.

A sensor element includes a sensor chip and a diaphragm base joined to a surface of the sensor chip. The sensor chip includes a first diaphragm for measuring differential pressure between a first pressure and a second pressure and a second diaphragm for measuring absolute pressure or gage pressure of the second pressure. The diaphragm base includes a third diaphragm to directly receive a fluid that is a measurement target and has the first pressure, and a fourth diaphragm to directly receive a fluid that is a measurement target and having the second pressure. The sensor element has a liquid amount adjustment chamber to make an amount of a first pressure transmission medium filled in a first pressure introduction path and an amount of a second pressure transmission medium filled in a second pressure introduction path to be equal to each other.

The invention includes differential pressure transducer assembly systems and methods in which headers are configured with header pins that extend perpendicular with respect to an axis of the assembly and through header sidewalls, enabling a compact configuration, ease of assembly, enhanced reliability and/or redundancy. Channels and ports defined in a housing portion of the assembly are configured to enable the use of substantially straight tubing sections for routing main and/or reference pressures to one or more differential sensing elements mounted on the headers. Two or more headers with associated sensing elements can be stacked to provide redundant differential pressure sensing.

A pressure sensor includes: a cylindrical case defining an inner space in communication with an outer space; a pressure detector provided in the inner space of the cylindrical case and configured to detect a gauge pressure of a target fluid; an atmospheric pressure detector configured to detect an atmospheric pressure; and an electronic component configured to calculate an absolute pressure of the target fluid on a basis of the gauge pressure of the target fluid detected by the pressure detector and the atmospheric pressure detected by the atmospheric pressure detector.

Differential density system and method. A differential pressure transmitter measures a pressure difference between first and second pressure sensing locations. A reference vessel in fluid communication with the first pressure sensing location contains a reference fluid and a sample vessel in fluid communication with the second pressure sensing location contains a sample fluid. The reference fluid is in a first column above the first pressure sensing location and the sample fluid is in a second column above the second pressure sensing location. The second column is of substantially equal height as the first column. A value of total dissolved solids (TDS) in the sample fluid is determined based on the pressure difference.

According to an example aspect of the present invention, there is provided a MEMS pressure sensor, comprising: a sensor portion comprising a deformable membrane and a first volume, and a valve portion comprising a first output to a first side of the pressure sensor and a second output to a second side of the pressure sensor. The valve portion is operable to close the second output and open the first output to equalize pressure in the first volume with pressure at the first side of the pressure sensor for calibrating the sensor; and close the first output and open the second output to equalize pressure in the first volume with pressure at the second side of the pressure sensor for pressure measurement.