A pressure sensing device includes a deflectable membrane structure to provide a deflection dependent output signal based on a pressure load, and a mechanical abutment structure for adjusting a spring constant of the deflectable membrane structure depending on the deflection of the deflectable membrane structure, wherein the mechanical abutment structure provides an abutting condition of the deflectable membrane structure when the deflection of the deflectable membrane structure exceeds a deflection threshold, wherein the abutting condition results in a change from a first spring constant to an increased, second spring constant of the deflectable membrane structure.

A pressure measuring device includes a ceramic pressure sensor including a ceramic measuring membrane and a sensor mounting configured to secure the pressure sensor such that a membrane region of the measuring membrane surrounded by a membrane edge is contactable with a medium having a pressure to be measured. The sensor mounting includes a titanium or titanium alloy mounting element including an opening through which the membrane region is contactable with the medium. The membrane edge is connected directly with the mounting element by a diffusion weld produced by a diffusion welding method.

A pressure sensor assembly includes a pressure sensor, a pedestal and an electrically conductive header having a header cavity. The pressure sensor includes, an electrically conductive sensing layer having a sensor diaphragm, an electrically conductive backing layer having a bottom surface that is bonded to the sensing layer, an electrically insulative layer having a bottom surface that is bonded to a top surface of the backing layer, and a sensor element having an electrical parameter that changes based on a deflection of the sensor diaphragm in response to a pressure difference. The pedestal is bonded to the electrically insulative layer and attached to the header within the header cavity.

The invention relates to a replaceable cartridge (1) for an ophthalmological apparatus (2), comprising at least one hard region as a housing and at least one soft region, the hard region and the soft region forming inner liquid channels of the replacement cartridge (1). The soft region embodies functional elements of the replacement cartridge (1), said functional elements comprising at least one pump device for pumping liquid into the liquid channels, a valve device for modifying a through-flow cross-section in at least one of the liquid channels, and a pressure-detecting device for determining a liquid pressure in at least one of the liquid channels. The pressure-detecting device comprises a pressure chamber which is connected to one of the liquid channels, and a flexible membrane which peripherally surrounds a coupling element. The coupling element is designed with a recess such that a fork-shaped arm of a force-measuring device, which is oriented substantially parallel to the membrane, can be inserted into the recess in such a way that the coupling element has at least two sides, and with the arm, a force effect occurring in a substantially normal direction in relation to the membrane can be detected on the membrane.

A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.

A pressure measuring device configured as a multi-function device operable as a differential pressure switch (DPS), a differential pressure transducer (DPT), a pressure switch (PS), a pressure transducer (PT) providing readings of high and low pressure zones, a data recording logger, and a backwashing controller. The pressure measuring device may use at least two piezoelectric sensors operable to measure pressure attributes. The associated electronic hardware, processing unit, cables and pressure tubing are retrofittable and packaged in a molded case, with no moving parts with the electronic hardware fully coated to make the device reliable and resistant to extreme environmental conditions. The device is configured for remote access, enabling remote device configuration, maintenance and servicing. The device is further operable to communicate with various external devices: a tablet, a smartphone and the like as a user interface and further provides wired interface with a programmable logic controller (PLC) via RS-485 interface.

A leakage of liquid inside a differential pressure detection device is reliably preventable. A diaphragm portion that detects a differential pressure as a pressure difference between a high pressure side and a low pressure side includes an annular member, a strain gauge provided in a hollow portion of the annular member, and a first plate and a second plate provided such that the annular member and the strain gauge are sandwiched. The first plate and the second plate each abut on a first annular packing. A first groove and a second groove (the first annular packing) overlap with the annular member when viewed from a first direction along an axis of the first hole.

The invention includes differential pressure transducer assembly systems and methods in which headers are configured with header pins that extend perpendicular with respect to an axis of the assembly and through header sidewalls, enabling a compact configuration, ease of assembly, enhanced reliability and/or redundancy. Channels and ports defined in a housing portion of the assembly are configured to enable the use of substantially straight tubing sections for routing main and/or reference pressures to one or more differential sensing elements mounted on the headers. Two or more headers with associated sensing elements can be stacked to provide redundant differential pressure sensing.

An electrical connector includes a main body portion, connection portions, a first temperature sensing element and a second temperature sensing element. The connection portions allow the main body portion to be electrically connected to a charged element provided in a flow channel. The main body portion includes a first side and a second side which are parallel to a flow direction of fluid. The first temperature sensing element and the second temperature sensing element are provided at mutually opposite positions on the first side and the second side in an electrically insulated manner. A fluid state test device having the electrical connector and a fluid heat exchange system are further provided. Thus, the original flow field where the electrical connector of the electrode of the electric heater is located may not change, and destruction to the flow field is avoided.

A differential MEMS pressure sensor includes a topping wafer with a top side and a bottom side, a diaphragm wafer having a top side connected to the bottom side of the topping wafer and a bottom side, and a backing wafer having a top side connected to the bottom side of the diaphragm wafer and a bottom side. The topping wafer includes a first cavity formed in the bottom side of the topping wafer. The diaphragm wafer includes a diaphragm, a second cavity formed in the bottom side of the diaphragm wafer underneath the diaphragm, an outer portion surrounding the diaphragm, and a trench formed in the top side of the diaphragm wafer and positioned in the outer portion surrounding the diaphragm.