An electronic pressure sensor includes a housing having a distal end configured to be exposed to a flow of a fluid media, the distal end opposite a proximal end, wherein the proximal end is configured not to be exposed to the fluid media. A chamber and connected passageway are disposed within the housing. The passageway is connected at one end to the chamber and connected at another end to an opening disposed at the distal end of the housing. The opening is configured to be in fluidic communication with the fluid media. A pressure sensor is disposed within the chamber. A first temperature sensor is disposed within the chamber. A viscous gel is disposed within the chamber, the viscous gel separating on a first side both the pressure sensor and the first temperature sensor apart from the passageway on a second side of the viscous gel.

A pressure sensor has a housing, an air lead-in hole, a pressure lead-in hole, an inner cavity, a sensor chip, a lead frame and a cover plate. One end of the air lead-in hole is in communication with the inner cavity of the housing, and the other end of the air lead-in hole is in communication with the air; the pressure lead-in hole is perpendicularly disposed at the center of the upper surface of the housing, two steps are disposed on the upper surface of the inner cavity, and a horizontal surface-mounted device surface is disposed on each of the steps. The center of the sensor chip is aligned with the centers of the pressure lead-in hole, and the lower end of the pressure lead-in holes are in communication with the cavity of the sensor chip.

A pressure sensor having a housing with a control and evaluation unit, wherein a plurality of pressure ports are arranged at the housing of the pressure sensor, wherein a pressure measuring cell is associated with every pressure port, wherein the pressure measurement cells are connected to the control and evaluation unit, wherein the pressure sensor has at least one digital output interface, and wherein at least one pressure port is a port for inserting a pressure line, with the pressure line being installable without tools and with the pressure line being surrounded by a seal of the pressure port and being secured against being pulled out.

A pressure sensor module detects a fluid pressure on the basis of a differential pressure between a reference pressure and the fluid pressure, and includes: a housing; a sensor element that can contact each of the reference pressure and the fluid pressure; a support member that supports the sensor element and is held in the housing; a first pressure passage that guides the fluid pressure to a first contact surface of the sensor element; and a second pressure passage that is sealed from the first pressure passage and guides the reference pressure to a second contact surface of the sensor element.

A flow-through pressure transducer comprising a cylindrical diaphragm positionable to allow fluid to flow therethrough which responds to variations in fluid pressure to generate an electrical signal proportional to such variations and which is incorporated in a housing for interconnecting with fluid delivery tubing. The diaphragm is made of relatively thin resilient metal, shaped to be a tube, elliptical in cross-section, with transducers, located on the elliptical major and minor axes which change their electrical state in response to movement of the diaphragm walls, and which are coupled in a bridge circuit for signal measurement. The housing is constructed for either gage or absolute fluid pressure measurements.

A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.

A pressure sensor for a gas-filled cylinder, which comprises a body from which a connector protrudes for coupling to an opening for filling a gas-filled cylinder with gas, a first through hole which passes through the connector and the body and a second hole which connects the first through hole to a sensor element which is connected electrically to at least one electronic board for processing a signal that can be detected by the sensor element.

Pressure sensor assemblies comprise a sensor body having a sensing membrane and wherein a fluid is placed in communication with the membrane to determine a fluid pressure. A support is connected with the body and includes an opening for receiving the fluid from an external source, wherein the opening is in fluid-flow communication with the membrane. The pressure sensor comprises one or more elements disposed therein configured to mitigate transmission of a fluid pressure spike to the sensing membrane. The body or the support may have a pressure mitigating element, e.g., an internal channel, for receiving the fluid from the opening and transferring it to the membrane, wherein the channel may itself be configured to provide the desired protection against fluid pressure spikes, or may be connected with another internal element to provide such protection.

A compressible element for a sensor assembly includes an elastomer matrix having a first compressibility and a plurality of closed areas distributed within the elastomer matrix and each surrounded by the elastomer matrix. Each of the closed areas has a second compressibility greater than the first compressibility.

A monitoring system for a travel drive includes a rotational speed sensor of a hydrostatic motor. The rotational speed sensor is configured to determine acceleration. At least one signal from a pressure sensor mounted on at least one working line that connects a pump to the hydrostatic motor of a hydrostatic travel drive is evaluated. The pressure sensor is preferably arranged on at least one working connection of the pump. The system uses the additional pressure signal to evaluate in a reliable manner whether the hydrostatic travel drive generates an unwanted drive torque.