A pressure sensor outputting an electrical signal upon a fluid pressure in a target space includes a diaphragm having a pressure receiving surface disposed in the target space for receiving a fluid pressure, and a back surface on a back side of the pressure receiving surface, an inner member disposed to face the back surface and a diaphragm supporting portion connected to the diaphragm. The diaphragm includes a center portion disposed to face the inner member and is distorted as a concave shape toward the detecting direction because of the heat transmitted to the pressure receiving surface and the distortion of the center portion as a concave shape toward the detecting direction. A contacting portion provided on a connecting portion between the center portion and the outside portion is in contact with the inner member.

A load sensing system for sensing a load on a structure can include an optical load sensing element configured to change an optical state based on a force applied thereto, an optical source operatively connected to the optical load sensing element and configured to input an input optical signal to the optical load element, and an optical detector configured to receive a returned optical signal from the optical load sensing element. The optical detector can be configured to detect one or more frequency peaks of the returned optical signal and to use the one or more frequency peaks of the returned optical signal to correlate to a load value of the load and output the load value indicative of the load.

An industrial process differential pressure sensing device includes a housing having first and second isolation cavities that are respectively sealed by first and second diaphragms, a differential pressure sensor, a static pressure sensor, an eddy current displacement sensor, and a controller. The static pressure sensor is configured to output a static pressure signal that is based on a pressure of fill fluid in the first isolation cavity. The differential pressure sensor is configured to output a differential pressure signal that is indicative a pressure difference between the first and second isolation cavities. The eddy current displacement sensor is configured to output a position signal that is indicative of a position of the first isolation diaphragm relative to the housing. The controller is configured to detect a loss of a seal of the isolation cavity based on the position signal, the static pressure signal and the differential pressure signal.

[Object] Provided are a pressure detection unit and a pressure sensor using the same capable of suppressing an increase in manufacturing man-hours due to use of an additional member, and ensuring insulation of a semiconductor type pressure detection device.

[Solving Means] A pressure detection unit includes a base formed in a lid shape and made of ceramic, a receiving member formed in a plate shape, a diaphragm interposed between the base and the receiving member, a semiconductor type pressure detection device installed on a side of a pressure receiving space formed between the base and the diaphragm in the base, and terminal pins electrically connected to the semiconductor type pressure detection device, the terminal pins penetrating the base, wherein a metal layer is provided in a region around the semiconductor type pressure detection device on a surface of the base on the side of the pressure receiving space.

Provided is a pressure detection device including: a pressure detection unit configured to detect a pressure transmitted to a pressure detecting surface; a flow passage unit in which a pressure transmitting surface for transmitting a pressure of a fluid to the pressure detecting surface is formed; and a mounting unit for removably mounting the flow passage unit on the pressure detection unit. The pressure detection unit has a sensor unit having the pressure detecting surface, a holding unit configured to hold the sensor unit to be movable along an axis orthogonal to the pressure detecting surface, and an urging unit configured to generate urging force to urge the sensor unit toward the pressure transmitting surface. The mounting unit mounts the flow passage unit on the pressure detection unit with the pressure detecting surface being in contact with the pressure transmitting surface under urging force generated by the urging unit.

Provided is a pressure detection device including: a pressure detection unit; and a flow channel unit provided with a flow channel and a pressure receiving portion. The pressure detection unit includes a pressure sensor including a diaphragm, and a pressure transmission portion which is disposed in a state where one end of the pressure transmission portion is in contact with the diaphragm and the other end thereof is in contact with the diaphragm, and transmits a pressure of a fluid received by the diaphragm to the diaphragm. The pressure transmission portion is disposed in a state where the diaphragm is displaced toward the flow channel and an urging force directed from the diaphragm to the diaphragm is received.

A differential pressure sensor for determining a differential pressure value, comprising: a differential pressure measuring transducer having a measuring membrane; a membrane seal having a membrane seal body including a pressure chamber filled with a transmission fluid in which a filling body having a recess is arranged, wherein the differential pressure measuring transducer arranged in the recess, wherein a first pressure is applied to the differential pressure measuring transducer on a first measuring membrane side and a second pressure is applied to a second measuring membrane side such that deformation of the measuring membrane represents a differential pressure value between the first pressure and the second pressure, wherein a piezoelectric layer for determining an absolute pressure value of the first pressure is provided inside the pressure chamber.

In a pressure sensor, a cap-shaped shielding member (17) to block an electric field undesirable for a signal processing electronic circuit unit of a sensor chip (16) is supported by an end surface of a disk conductive plate (19) between one end surface of the sensor chip (16) in a liquid sealing chamber (13) and a diaphragm (32). The conductive plate (19) is electrically connected via a group of input-output terminals (40ai) and bonding wires (Wi), for example, and the sensor chip 16 is supported by one end portion of a chip mounting member (18) which is electrically connected via the group of input and output terminals (40ai) and the bonding wires (Wi).

A remote seal assembly for a process transmitter includes a seal body containing a cavity sealed by a diaphragm. The seal body configured to be mounted to a process element containing a process fluid such that a first side of the diaphragm is exposed to the process fluid. A capillary contains a fill fluid that is in fluid communication with the cavity and a second side of the diaphragm. A coupling has a capillary recess and two cavities separated by a second diaphragm. The capillary extends through the capillary recess and connects to the coupling such that the fill fluid in the capillary is in fluid communication with one of the two cavities and the second diaphragm. A thermally conductive element preferably extends continuously along the capillary from the seal body toward the coupling and into the capillary recess without contacting the coupling.

A pressure sensor includes an elongate body which deforms in response to an applied pressure having a cavity formed therein. An isolation diaphragm seals the cavity from a process fluid and is configured to deflect in response to applied process pressure from the process fluid. An isolation fill fluid in the cavity applies pressure to the elongate body in response to deflection of the isolation diaphragm thereby causing deflection of the elongate body. A deformation sensor is coupled to the elongate body and provides a sensor output in response to deformation of the elongate body which is indicative of the process pressure.