The present disclosure is provided with a measuring element (M) and a measuring device. The measuring element includes a base body, a diaphragm and a permeation resistant layer, the diaphragm is fixedly connected to the base body, with a sealed cavity being defined between the diaphragm and the base body. The permeation resistant layer is arranged on an inner side surface, facing the sealed cavity, of the diaphragm, and extended continuously on the inner side surface of the diaphragm at least beyond a connection region of the diaphragm with the base body. The measuring device includes the measuring element (M).

Provided is a differential pressure sensor capable of improving joining stability of a filter. The differential pressure sensor includes: a sensor module configured to detect a pressure difference between an atmospheric pressure and a pressure of a measured medium; a case body, which is configured to contain the sensor module, and in which an atmosphere introducing hole for introducing atmospheric air into the case body is formed; and a filter provided from inside the case body to cover the atmosphere introducing hole, the case body having a protrusion, which protrudes to an inside of the case body, the atmosphere introducing hole being formed in the protrusion, the filter being joined to the protrusion.

A method for assessing the state of a sensor. The sensor comprises a deflectable micromechanical sensor structure for detecting a physical input variable and converting the physical input variable into an electrical sensor signal. A medium surrounding the sensor acts on the micromechanical sensor structure. The micromechanical sensor structure is deflectable using an excitation signal. The method includes: generating an excitation signal using a driver unit; outputting the excitation signal to the micromechanical sensor structure; deflecting the micromechanical sensor structure using the excitation signal; detecting a response behavior of the micromechanical sensor structure in response to the excitation signal; comparing the response behavior to a reference behavior to determine a measure of deviation for the response behavior in relation to the reference behavior; and assessing, based on the measure of deviation, the state of the sensor with respect to the presence of a deposit.

A pressure sensor device has: a pressure detection structure provided in a first die of semiconductor material; a package, configured to internally accommodate the pressure detection structure in an impermeable manner, the package having a base structure and a body structure, arranged on the base structure, with an access opening in contact with an external environment and internally defining a housing cavity, in which the first die is arranged covered with a coating material. A piezoelectric transduction structure, of a ultrasonic type, is accommodated in the housing cavity, in order to allow detection of foreign material above the coating material and within the package. In particular, the piezoelectric transduction structure is integrated in the first die, which comprises a first portion, wherein the pressure detection structure is integrated, and a second portion, separate and distinct from the first portion, wherein the piezoelectric transduction structure is integrated.

A corrosion protection element is described, with which in simple and cost effective manner a reliable corrosion protection of field devices can be provided, which field devices comprise at least one component of stainless steel in contact with an environment of the field device. Corrosion protection elements of the invention are distinguished by features including that they are embodied as sacrificial anodes comprising iron or rustable steel and have a form, which is embodied in such a manner that they can be applied to the component of the field device in such a manner that the sacrificial anode is in electrically conducting contact with the component.

A method for manufacturing a sensor. The sensor includes a sensing element and a housing, the housing including an interior space, which is accessible through a housing opening, and the sensing element being situated in the interior space and being designed to detect a property and/or a composition of an ambient medium of the sensor. The method includes filling the interior space with a protective medium through the housing opening, the protective medium being designed to transfer the property and/or the composition of the ambient medium to the sensing element; fixing a preferably flexible diaphragm at or in the housing opening preferably for sealing the housing opening, the diaphragm including at least one diaphragm opening; and sealing the at least one diaphragm opening. A sensor, which is manufactured according to this method, is also described.

The present disclosure relates to a piston diaphragm seal for transmitting a pressure of a medium to a pressure-measuring sensor a base body having a recess and a bore which is connected to the recess. The recess and the bore can be filled with a pressure transfer medium. A piston is arranged in the recess and can be moved within a predetermined region in the recess. A surface of the piston facing the medium can be loaded with the pressure of the medium, wherein the piston is separated by at least two sealing elements from the medium and the pressure transfer medium. A cavity is arranged in the piston between the at least two sealing elements. An attachment region is provided for connecting the piston diaphragm seal to the pressure-measuring sensor. A monitoring unit is designed to determine and/or monitor entry of medium and/or pressure transfer medium into the cavity.

A technique facilitates monitoring of parameters related to a downhole operation, e.g. a water injection operation. A completion string may be deployed in a borehole with at least one water injection mandrel combined with a side pocket. A sensor tool is constructed for conveyance down through the completion string and into sealing engagement with the interior surface of the side pocket. The sensor tool comprises at least one sensor for sensing a desired parameter or parameters, e.g. pressure and/or temperature. Additionally, the sensor tool comprises a nose which is positioned to mechanically open a check valve coupled to the side pocket so as to enable monitoring of the desired parameter or parameters via the at least one sensor.

A pressure sensor assembly, which includes a pressure sensing element having a diaphragm, a plurality of piezoresistors connected to the diaphragm, and at least one layer of sealing glass connected to the diaphragm. The pressure sensor assembly also includes a base, a layer of sealing glass is connected to the base, and is configured to maximize the sensitivity of the plurality of piezoresistors via tailoring the side surfaces of the glass surface to control the deformable diaphragm. The layer of sealing glass includes a first recess portion, and a second recess portion formed as part of the layer of sealing glass on the opposite side of the layer of sealing glass as the first recess portion. One of the plurality of piezoresistors is partially surrounded by the first recess portion, and another of the plurality of piezoresistors is partially surrounded by the second recess portion.

The present invention relates to a differential pressure sensor device, comprising a substrate, another layer formed on a main surface of the substrate and a first cavity and a second cavity separated from each other by a membrane. The first cavity is in fluid communication with a channel that is in fluid communication with a vent hole through which air can enter from an environment of the sensor device. The channel extends within the other layer or the substrate in a plane that is substantially parallel to the main surface.