A pressure sensor includes a connection portion provided with a screw portion configured to fix the pressure sensor to a combustion chamber of a vehicle engine; a hollow liquid-enclosing container fixed to one end of the connection portion; a pressure transmission fluid enclosed inside the liquid-enclosing container; a diaphragm fixed to one end of the liquid-enclosing container and elastically deformed when receiving pressure to transmit the pressure to the pressure transmission fluid; a pressure detection element fixed to the other end of the liquid-enclosing container and detecting the pressure transmitted to the pressure transmission fluid and converts the detected pressure into an electric signal; and a heat-dissipating rod provided inside the liquid-enclosing container. The connection portion and the liquid-enclosing container, and the connection portion and the diaphragm are mechanically connected to each other by welding or the like.

In order to produce accurate sensor element in a simple way, the invention provides a method for producing a sensor element (10) for a pressure or force sensor. Steps include, providing a component (13) to be deformed. Applying to the component (13), a sensor function and contact layer (24) consisting of a material with a k-factor between 2 and 10. Performing planar ablation of the material of the sensor function and contact layer (24) by means of a laser, in such a manner that strain gauges (44) with a resistance structure with a meandering shape and contact pads (46.1, 46.2, 46.3, 46.4) remain standing.

In order to produce accurate sensor element in a simple way, the invention provides a method for producing a sensor element (10) for a pressure or force sensor. Steps include, providing a component (13) to be deformed. Applying to the component (13), a sensor function and contact layer (24) consisting of a material with a k-factor between 2 and 10. Performing planar ablation of the material of the sensor function and contact layer (24) by means of a laser, in such a manner that strain gauges (44) with a resistance structure with a meandering shape and contact pads (46.1, 46.2, 46.3, 46.4) remain standing.

Provided are a dynamic quantity measuring device having higher accuracy and longer-term reliability than in the prior art, and a pressure sensor using the same. A dynamic quantity measuring device is provided with a first Wheatstone bridge configured by an impurity diffused resistor on a principal surface of one semiconductor substrate, and detects a difference between strain quantities respectively generated in an x-axis direction and a y-axis direction that are orthogonal to each other on the principal surface of the semiconductor substrate by the first Wheatstone bridge, the dynamic quantity measuring device being provided with, on the principal surface of the semiconductor substrate, a second Wheatstone bridge for detecting the strain quantity in the x-axis direction, and a third Wheatstone bridge for detecting the strain quantity in the y-axis direction.

A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

A pressure sensor which detects variation in pressures, the pressure sensor including a cantilever which is bent according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and an intra-lever gap which is formed on a proximal end portion of the cantilever. The proximal end portion is partitioned into a first support portion and a second support portion by an intra-lever gap in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion are connected to each other in plan view. A doped layer which is provided on a portion of the first and second support portions forms a first displacement detection portion and a second displacement detection portion. Lengths of the first and second displacement detection portions are shorter than those of the first and second supports along the second direction.

A pressure sensor arrangement includes a tube with a diaphragm to pressure to be measured is applied arranged in the cross-section of the tube, wherein the diaphragm is fastened to the tube inner wall via an articulation extending along the circumferential region of the diaphragm, where deformation of the diaphragm results in rotation of the articulation directly on the wall of the tube which can therefore be detected from the outside by suitable structure such that that strain sensors, for example, which can be used to detect deformation are advantageously not in contact with the process medium and there is advantageously no need for a pressure-tight bushing for electrical signals, and where the pressure sensor arrangement has a particularly simple structure and can be advantageously used in measuring transducers for process instrumentation.

A pressure sensor arrangement includes a tube with a diaphragm to pressure to be measured is applied arranged in the cross-section of the tube, wherein the diaphragm is fastened to the tube inner wall via an articulation extending along the circumferential region of the diaphragm, where deformation of the diaphragm results in rotation of the articulation directly on the wall of the tube which can therefore be detected from the outside by suitable structure such that that strain sensors, for example, which can be used to detect deformation are advantageously not in contact with the process medium and there is advantageously no need for a pressure-tight bushing for electrical signals, and where the pressure sensor arrangement has a particularly simple structure and can be advantageously used in measuring transducers for process instrumentation.

A pressure sensor includes: a diaphragm joined to a front side of a housing via a joint portion; a sensor portion; a connection portion connecting the diaphragm to the sensor portion; and a heat receiving portion disposed at the front side of the diaphragm. When: a minimum value of an area of a minimum inclusion region which is a virtual region, which include a cross-section of a portion from the heat receiving portion to the diaphragm and of which an overall length of a contour become minimum on a cross-section perpendicular to the axial line, is defined as a connection area Sn; and an area of a region surrounded by the joint portion on a projection plane perpendicular to the axial line when the diaphragm and the heat receiving portion are projected onto the projection plane is defined as a diaphragm effective area Sd, (Sn/Sd)0.25 is satisfied.

A pressure sensor includes: a diaphragm joined to a front side of a housing via a joint portion; a sensor portion; a connection portion connecting the diaphragm to the sensor portion; and a heat receiving portion disposed at the front side of the diaphragm. When: a minimum value of an area of a minimum inclusion region which is a virtual region, which include a cross-section of a portion from the heat receiving portion to the diaphragm and of which an overall length of a contour become minimum on a cross-section perpendicular to the axial line, is defined as a connection area Sn; and an area of a region surrounded by the joint portion on a projection plane perpendicular to the axial line when the diaphragm and the heat receiving portion are projected onto the projection plane is defined as a diaphragm effective area Sd, (Sn/Sd)0.25 is satisfied.