In a substrate processing system according to an exemplary embodiment, gas supply units are configured to supply gases to chambers through first gas flow channels thereof, respectively. Chamber pressure sensors are configured to measure pressures in the chambers. A second gas flow channel is connected to the first gas flow channel of each of the gas supply units. A reference pressure sensor is configured to measure a pressure in the second gas flow channel. In a method according to an exemplary embodiment, each of the chamber pressure sensors is calibrated by using a measurement value thereof and a measurement value of the reference pressure sensor which are obtained in a state where pressures in a corresponding chamber, the first gas flow channel of a corresponding gas supply unit, and the second gas flow channel are maintained.

A testbench system is disclosed. The system includes a network interface; a memory storage; a transducer; and one or more processors. The one or more processors are configured to operate in a first phase and: perform calibration of the transducer and generate calibration data; generate a unique identification (CTS-ID) for the transducer based on the calibration data; mark the transducer with the CTS-ID; and provide the CTS-ID and the calibration data to the network interface for transmission to a database.

A display structure of a pressure gauge of an air compressor, the air compressor is received in an accommodation box, and a scale portion of the pressure gauge is viewable via a displaying opening of the accommodation box, the pressure gauge includes a cylindrical body which is transparent and is formed in a pen shape, and the pressure gauge includes a colored O-ring configured to indicate a pressure value of the scale portion. The scale portion is not printed on the cylindrical body of the pressure gauge and includes a transparent panel on which the pressure value of the scale portion is marked on an internal face of the transparent panel, and the internal face faces the cylindrical body of the pressure gauge.

The present invention discloses a residual pressure measurement system for a MEMS pressure sensor with an F-P cavity and method thereof, the measurement system includes a low-coherence light source, a 3 dB coupler, a MEMS pressure sensor, an air pressure chamber, a thermostat, a pressure control system, a cavity length demodulator, an acquisition card and a computer. The measurement method comprises: performing cavity length measurement by using the reflecting light by the pressure control system at two temperatures, respectively, so as to calibrate the MEMS pressure sensor and establish a relationship between the absolute phase of a monochromatic frequency and the external pressure; performing linear fitting to the two measurement data to obtain all the external pressure when the cavity length of two measurement data are equal to each other, and substituting the theoretical equation for calculation to obtain the residual pressure under the flat condition of the diaphragm.

An airflow sensor assembly for an air duct is provided. The airflow sensor assembly includes the air duct having an interior wall and an exterior wall, a high pressure pickup device, a low pressure pickup device, a pressure redirection device, and a pressure sensor. The pressure redirection device is fluidly coupled to the high pressure pickup device and the low pressure pickup device and includes a low inlet, a high inlet, and a common outlet. The pressure sensor is selectively fluidly coupled to the high pressure pickup device and the low pressure pickup device and includes a first inlet and a second inlet. The second inlet is fluidly coupled to the common outlet of the pressure redirection device.

A pressure sensor with calibration device includes a casing, a diaphragm, a sensing element, a medium, and at least one calibration element. The diaphragm is disposed on the casing, wherein the casing and the diaphragm define an accommodating space. The sensing element is disposed in the casing. The medium is filled in the accommodating space and in contact with the sensing element. The at least one calibration element is adjustably disposed at the casing and extended into the accommodating space to be in contact with the medium, wherein when the at least one calibration element is moved relative to the casing in a direction toward the accommodating space or in a direction away from the accommodating space, the at least one calibration element changes the pressure applied to the medium. The pressure sensor with calibration device adjusts the pressure value sensed by the sensing element via the calibration element.

When a diesel engine is determined to be in a motoring state, a hysteresis zero angle H.sub.0 is determined (step S14). Subsequently, a gradient d.sub.n is calculated (step S16). The gradient d.sub.n is calculated based on data (θ.sub.n, Δh.sub.n) of a deviation Δh.sub.n at a retardation side from the hysteresis zero angle H.sub.0 and at an advance side from a predetermined crank angle. Subsequently, the gradient d.sub.n and the hysteresis zero angle H.sub.0 are updated (step S18). When the diesel engine is determined to be in a non-motoring state, data (θ.sub.n, P.sub.n) of an actual in-cylinder pressure is corrected based on a newest correction coefficient η and hysteresis zero angle H.sub.0 (step S22).

According to one embodiment, a calibration method includes placing a pressure sensor on a base material having magnetic properties, placing a magnet on the pressure sensor, attracting the magnet to the base material while interposing the pressure sensor therebetween and applying a predetermined pressing force onto the pressure sensor, detecting a sensor output of a pressure-sensitive portion pressed by the magnet, estimating the deterioration of the pressure sensor by comparing the sensor output with a specified value corresponding to characteristics of the magnet, generating correction data to calibrate the degradation and inputting the generated correction data to the pressure sensor.

A microphone device comprises a microphone die including a first microphone motor and a second microphone motor, an acoustic integrated circuit structured to process signals produced by the first microphone motor and the second microphone motor, and a sensor die stacked on top of the acoustic integrated circuit, wherein the sensor die comprises a pressure sensor. Another microphone comprises a microphone die including a first microphone motor and a second microphone motor and an integrated circuit die. The integrated circuit die comprises an acoustic integrated circuit structured to process signals produced by the first microphone motor and the second microphone motor, a pressure sensor, and a pressure integrated circuit structured to press signals produced by the pressure sensor.

Determining calibration values for atmospheric sensors that provide measured pressures used for estimating altitudes of mobile devices. Particular systems and methods determine if any uncalibrated reference-level pressure estimates associated with an unstable pressure sensor should not be used when calibrating the unstable pressure sensor, and calibrate the unstable pressure sensor using all of the uncalibrated reference-level pressure estimates except any uncalibrated reference-level pressure estimate that should not be used when calibrating the unstable pressure sensor.