Provided herein are particle detection systems, and related methods configured to characterize a liquid sample, comprising: a first probe configured to determine a first parameter set of a plurality of first particles in a liquid sample, the first particles characterized by a size characteristic selected from a first size range; wherein the first parameter set comprises a first size distribution and a first concentration; and a second probe configured to determine a second parameter set of one or more second particles in the liquid sample, the second particles being characterized by a size characteristic selected from a second size range; wherein the second parameter set comprises a second size distribution and a second concentration.

By irradiating target liquid L containing fine bubbles with ultrasonic waves from an ultrasonic irradiation device 102, the fine bubbles in the target liquid L is reduced. By irradiating the target liquid L with ultrasonic waves, fine bubbles in the target liquid L can be reduced effectively. By using ultrasonic waves, bubbles with small diameters, particularly fine bubbles, can be effectively reduced, so that fine bubbles in the target liquid L can be efficiently reduced.

A particle detector for rapidly detecting and identifying sub 20 nm particles in Ultra Pure Water (UPW) is disclosed. The detector has a nano particle extractor, a nanoparticle collector, and a tracer particle introducer. The extractor limits the size of droplets output to a predetermined size. The extractor includes (1) a liquid sample inlet, (2) a nebulizer connected to the liquid sample inlet (the nebulizer has a gas supply, and an outlet), (3) an impactor arranged to receive material output from the nebulizer, (4) an evaporator connected to the nebulizer and impactor for providing an aerosol at the extractor outlet, and (5) an aerosol connected to the evaporator. The collector us connected to the extractor and has: (1) a collector inlet connected to the aerosol outlet of the extractor, (2) a vapor condensation growth tube connected to the collector inlet, and (3) a repositionable particle capture plate arranged to receive material output from the growth tube at spatially varying positions. The tracer particle introducer is connected to the liquid sample inlet of the extractor. It includes a tracer particle supply connected to a pump which is connected to the extractor. A method for rapid identification of sub 20 nm particles in UPW is also disclosed.