Methods and systems of estimating a size of a chip in engine fluid of an engine are provided. One method comprises detecting the chip at a magnetic chip detector immersed in the engine fluid, burning the chip by Joule heating using a single delivery of electric current through the chip via the first and second terminals of the magnetic chip detector, determining an amount of energy consumed to burn the chip, and estimating the size of the chip based on the amount of energy consumed to burn the chip.

The present invention provides an evaluation method for evaluating a state in an apparatus concerning particles existing inside a substrate processing apparatus for processing a substrate, including arranging a plate in a charged state inside the apparatus and obtaining the number of particles adhered to the plate by performing a dummy operation different from an operation of processing the substrate, and evaluating the state in the apparatus based on a coefficient representing a ratio of the number of particles adhered to the plate by performing the dummy operation for the plate in an uncharged state to the number of particles adhered to the plate in the charged state, and the number of particles obtained in the arranging the plate.

A sensor relating to one embodiment of the present invention includes a first electrode, a second electrode, an attracting portion arranged between the first electrode and the second electrode, where the attracting portion attracts conductive particles smaller than a gap between the first electrode and the second electrode to cause a change in electrical resistance between the first electrode and the second electrode, and a short circuit preventing portion for preventing a large-diameter conductive piece from causing a short circuit between the first electrode and the second electrode, where the large-diameter conductive piece has a larger dimension than the gap between the first electrode and the second electrode.

A gas turbine engine can have a magnetic chip detector system with a first conductor member and a second conductor member both exposed to a lubricant flow path of the gas turbine engine, at least a first one of the conductor members including an electromagnet including a coil wrapped around a ferromagnetic core. As part of an engine shutdown procedure, an intrinsic magnetic field strength within the ferromagnetic core can be increased by circulating electrical current in the coil, and the electrical current circulation can then be interrupted for the magnetic field to remain active during engine shutdown.

Provided is a sensor that can appropriately sense the amount of abrasion powder (conductive substance) in a mechanical device of any size, and thereby to provide a sensor that can be generally used for preventive maintenance of any mechanical parts. The sensor includes a first electrode and a second electrode. A voltage is applied between the first electrode and the second electrode to accumulate conductive substance between the first and second electrodes in order to sense a decrease in electric resistance between the first and second electrodes. The distance between the first electrode and the second electrode is adjustable.

A mold sensor is configured with an enclosed chamber in which a nutrient-treated substrate is positioned. The mold sensor includes a sensing system that is configured to measure properties of pressure waves within the enclosed chamber. A controller operates the sensing system and is programmed to detect a presence of mold growing in the chamber based on the characteristics of the pressure wave response within the chamber.

A sensor relating to one embodiment of the present invention includes a first electrode, a second electrode, an attracting portion arranged between the first electrode and the second electrode, where the attracting portion attracts conductive particles smaller than a gap between the first electrode and the second electrode to cause a change in electrical resistance between the first electrode and the second electrode, and a short circuit preventing portion for preventing a large-diameter conductive piece from causing a short circuit between the first electrode and the second electrode, where the large-diameter conductive piece has a larger dimension than the gap between the first electrode and the second electrode.

A counting method includes aggregating particles in a sample by the action of first dielectrophoretic force, dispersing the aggregated particles by the action of second dielectrophoretic force, which is different from the first dielectrophoretic force, capturing a dispersion image including the dispersed particles, and determining the number of particles on the basis of the dispersion image.

A device collects material from air. The device swirls air within a fluid housing so as to deposit the material, such as viruses, bacteria, fungi and other particles, from the air in a way that the material can later be analyzed. The device can be used to provide for detection of airborne organisms or properties of material in the air.

A resistive particle sensor is described for detecting soot in the exhaust gas of an internal combustion engine, including a sensor element having two strip conductors, which extend spaced apart in meanders in parallel to one another in an area of the sensor element that may be exposed to the exhaust gas, and a resistance strip conductor, the two strip conductors each being capacitively connected via capacitor elements to the resistance strip conductor.