Embodiments of the disclosure include a miniature optical PM sensor module. A miniature optical particulate matter sensor module may comprise a housing; a micro airflow generator positioned within the housing; an actuator positioned adjacent to the micro airflow generator and configured to drive the micro airflow generator; a miniature particulate matter sensor board assembly in fluid communication with the micro airflow generator; and a flex cable assembly configured to attach to at least one of the housing and the miniature particulate matter sensor board assembly.

The present invention relates to the rapid and electricity-free, point-of-care, multiplexed detection and quantification of at least one or more nucleic acid sequences from nucleic acids corresponding to a plurality of pathogens or biomarkers using a micropatterned lateral flow device. Rapid and molecular-level sensitive differential diagnosis of a disease condition may be enabled without the need for a delayed laboratory test so that timely treatment can be administered.

A device (100) includes a flow channel (115) having a first end (120) to receive fluid flow (122) and a second end (125) to exhaust fluid flow (127), the flow channel (115) having a flow channel opening (135). A piston (130) is disposed within the flow channel (115), the piston (130) having a piston passage (140) to allow airflow through the piston (130). A spring (132) is coupled to the piston (130) and coupled to the flow channel (115). The spring (132) is positioned to allow the piston (130) to move responsive to fluid flow velocity in the flow channel (115), wherein the piston (130) moves to modulate fluid flow through the flow channel opening (135).

A method of dust processing comprises measuring (PC1) a first amount of particles of a first size (e.g. PM10), and measuring (PC2) a second amount of particles of a second size (e.g. PM2.5) smaller than the first size. In accordance with the invention, it is determined () whether the first amount exceeds the second amount by a predefined threshold. If so, a robotic vacuum cleaner (RVC) may be prompted to start cleaning a room.

A device, system and method for the detection and screening of plastic microparticles in a sample is disclosed. A nanoporous silicon nitride membrane is used to entrap plastic microparticles contained in the sample. The sample may be a water sample, an air sample, or other liquid or gas sample. The entrapped plastic microparticles are then heated or otherwise processed on the nanoporous silicon nitride membrane. An imaging system observes the nanoporous silicon nitride membrane with the entrapped plastic microparticles to determine the type and quantity of the various plastic microparticles that are entrapped on the membrane.

There is provision of a plasma processing apparatus including a chamber; a gas inlet for supplying a first gas containing fluorine and supplying a second gas into the chamber; a plasma generator configured to generate a plasma from the first gas and the second gas supplied into the chamber; an optical emission spectrometer (OES) configured to measure light emission intensities of first radicals and second radicals in the plasma, the first radicals originating from the first gas, the second radicals originating from the second gas; an expendable part disposed in the chamber; and a processor configured to determine a wastage rate of the expendable part based on the measured light emission intensities of the first radicals and the second radicals.

A detection device comprises a cyclone-type collection part for collecting particles contained in a gas into a collection liquid with a swirling airflow, a detection part for detecting the particles collected by the cyclone-type collection part; and a cleaning part for cleaning the cyclone-type collection part with a cleaning liquid. The cleaning part cleans the cyclone-type collection part by swirling the cleaning liquid with the swirling airflow generated in the cyclone-type collection part.

A method for detecting the concentration of particles in a fluid is disclosed. The method comprises the steps of: S1: introducing a pure fluid into a detection device to obtain a scatter background noise value U noise output by the detection device; S2: introducing a fluid to be detected into the detection device, obtaining scatter signals output by the detection device, and obtaining voltage signals of standard particles; S3: sampling signals of the fluid in a certain period of time, extracting effective signals, carrying out threshold value analysis on the effective signals Ux obtained by sampling, and obtaining the number of particles present in the period of time; and S4: obtaining the concentration of the particles in the fluid according to the number of particles in S3. According to this method, the accuracy in calculation of the concentration of particles in a fluid can be effectively improved.

The present invention discloses a system for detecting the concentration of non-metal particles in a fluid and detection method thereof. The detection system comprises a particle morphology detection device, a metal particle detection device, and a detection pipeline, the particle morphology detection device and the metal particle detection device being connected to each other and wound around the detection pipeline. The detection method comprises: S1, detecting the concentration of fluid particles; S2, detecting the concentration of fluid metal particles; and S3, detecting concentration of fluid non-metal particles. By means of the detection system and the detection method, the concentration of non-metal particles in a fluid can be more accurately detected, and the detection accuracy is improved.

An object is to provide a liquid chemical exhibiting excellent defect inhibitive performance even in a case of being applied to a resist process by KrF excimer laser exposure and ArF excimer laser exposure. Another object is to provide a method for analyzing a test target solution and a method for producing a liquid chemical.

A liquid chemical includes an organic solvent; and metal-containing particles containing a metal atom and having a particle size of 10 to 100 nm, in which the number of the metal-containing particles contained is 1.010.sup.2 to 1.010.sup.12 particles/cm.sup.3.