Patent classifications
G01N15/088
Critical Dimension Measurements With Gaseous Adsorption
Methods and systems for performing optical measurements of geometric structures filled with an adsorbate by a gaseous adsorption process are presented herein. Measurements are performed while the metrology target under measurement is treated with a flow of purge gas that includes a controlled amount of fill material. A portion of the fill material adsorbs onto the structures under measurement and fills openings in the structural features, spaces between structural features, small volumes such as notches, trenches, slits, contact holes, etc. In one aspect, the desired degree of saturation of vaporized material in the gaseous flow is determined based on the maximum feature size to be filled. In one aspect, measurement data is collected when a structure is unfilled and when the structure is filled by gaseous adsorption. The collected data is combined in a multi-target model based measurement to reduce parameter correlations and improve measurement performance.
Porosity Measurement Of Semiconductor Structures
Methods and systems for performing optical measurements of the porosity of geometric structures filled with a fill material by a capillary condensation process are presented herein. Measurements are performed while the structure under measurement is treated with a flow of purge gas that includes a controlled amount of vaporized fill material. A portion of the fill material condenses and fills openings in the structural features such as pores of a planar film, spaces between structural features, small volumes such as notches, trenches, slits, contact holes, etc. In one aspect, the desired degree of saturation of vaporized material in the gaseous flow is determined based on the maximum feature size to be filled. In another aspect, measurement data is collected when a structure is unfilled and when the structure is filled. The collected data is combined in a multi-target model based measurement to estimate values of porosity and critical dimensions.
Method for recovering porosity evolution process of sequence stratigraphy of carbonate rocks
The present disclosure provides a method for recovering a porosity evolution process of sequence stratigraphy of carbonate rocks. The method comprises: a step of establishing a sequence stratigraphic framework of carbonate rocks; a step of dividing diagenetic stages; a step of simulating diagenesis and porosity evolution with increasing reservoir thickness and continuous superposition of multiple reservoirs during cyclic rise and fall of sea level to obtain a simulation result; and a step of calculating the porosity evolution in space over time by using the simulation result as initial values for simulation of diagenetic evolution process and simulating in stages and continuity the multi-stage diagenetic evolution process that the carbonate rock strata undergo after sediment based on the divided diagenetic stages. Compared with the traditional recovery of single reservoir porosity with time evolution, the method fully considers the superposition effect of multiple upper reservoirs in the process of reservoir sedimentary-diagenesis.
METHOD AND SYSTEM FOR DETECTING MASS OF OIL IN INORGANIC MINERAL OF SHALE
A system is provided for detecting the mass of oil in an inorganic mineral of shale. The system operates by performing an extraction test on a first shale sample by using chloroform to obtain a total content of shale oil in the shale; enriching kerogen from the second shale sample to obtain dry kerogen; and performing an extraction test on oven-dried kerogen by using chloroform to determine the mass of extracted kerogen. The system also operates by determining the mass of the oil in the organic matter of the shale sample and the mass of the oil in an inorganic mineral of the shale; establishing a model for predicting a ratio of the mass of the oil in the inorganic mineral of the shale to the mass of the oil in the organic matter; and using the prediction model to determine the mass of oil in an inorganic mineral.
TEST SYSTEM AND TEST METHOD FOR A SIMULATION EXPERIMENT OF GAS HYDRATE IN A POROUS MEDIUM
The present invention disclosures a test system and test method for a simulation experiment of gas hydrate in a porous medium. The test system comprises a reactor, a sensor system, a hardware interface apparatus and a data processing system; the reactor is used for containing tested medium, the sensor system is mounted inside the reactor, and the sensor system is connected to the data processing system through the hardware interface apparatus; the test method comprises a procedure of experiment and measurement data acquisition, and a procedure of analyzing and processing measurement signals; by establishing of electrical model I, acoustic model II and the fused model III, realizing the simulation of the synthesis/decomposition processes of gas hydrate in the deposits in laboratory environment and implementation of the acoustic and electrical parameters combined test, an accurate gas hydrate saturation calculation model can be established at last.
METHOD OF PREDICTING FORMED BODY DENSITY AND METHOD OF MANUFACTURING CERAMIC FIRED BODY
The method of predicting a formed body density includes: a correlation calculating step of obtaining the correlation between the formed body density of the formed body and the porosity of the fired body; and a formed body density predicting step including: in a case of preparing a kneaded material A from a ceramic raw material having substantially the same composition as a ceramic raw material used for preparing a kneaded material, preparing a formed body B by forming the kneaded material A, preparing a dried body C by drying the formed body B, and preparing a fired body D having a desired porosity by firing the dried body C, calculating a predicted value of the formed body density of the formed body B corresponding to the desired porosity of the fired body D using the correlation.
METHODS FOR IMPROVING MATRIX DENSITY AND POROSITY ESTIMATES IN SUBSURFACE FORMATIONS
Methods may include estimating the weight fractions of kerogen and inorganic mineral components of at least an interval of a subsurface formation; determining the grain density of kerogen and inorganic mineral components, wherein at least the grain density of kerogen is determined by one or more infrared measurements; and calculating the formation matrix density of at least an interval of the subsurface formation from the estimated weight fractions and the determined grain density. In another aspect, methods may include estimating the weight fractions of kerogen and inorganic mineral components of at least an interval of a subsurface formation; determining the grain density of kerogen and inorganic mineral components, wherein at least the grain density of kerogen is determined by one or more infrared measurements; and calculating the formation matrix density of at least an interval of the subsurface formation from the estimated weight fractions and the determined grain density; calculating the bulk density for at least an interval of the subsurface formation; and determining the total porosity of at least an interval of the subsurface formation as a function of depth by combining the calculated formation matrix density and the calculated bulk density.
PREDICTING TOTAL ORGANIC CARBON (TOC) USING A RADIAL BASIS FUNCTION (RBF) MODEL AND NUCLEAR MAGNETIC RESONANCE (NMR) DATA
Systems, methods, and software for predicting total organic carbon (TOC) values are described. A representative method includes obtaining nuclear magnetic resonance (NMR) data and training a radial basis function (RBF) model based on the NMR data and measured total organic carbon (TOC) values. The method also includes obtaining subsequent NMR data and employing the trained RBF model to predict TOC values based at least in part on the subsequent NMR data. The method also includes storing or displaying the predicted TOC values.
SYSTEM AND METHOD FOR DETECTING GASOCHROMIC EMISSION SPECTRA
A detection method and system includes applying a gas to an article, the article including a gasochromic material capable of emitting a radiation emission spectrum in the presence of the gas, the article further including a first absorptive material capable of absorbing radiation in a first narrow bandwidth within the emission spectrum to produce a first narrow bandwidth absorption line in the emission spectrum, irradiating the article in the presence of the gas; and detecting the emission spectrum having the first narrow bandwidth absorption line.
Characterization method for a reservoir micro pore structure and a system thereof
The present application provides a method for characterizing reservoir micro pore structures, in particular structures smaller than 50 nm and a system therefore. The method can include fabricating a reservoir sheet; fabricating a reservoir sheet electrode using the reservoir sheet; depositing crystal substance in inner pores of the reservoir sheet of the reservoir sheet electrode using chemical deposition; obtaining the crystal substance by removing rock portions of the reservoir sheet in which the crystal substance is deposited; and scanning the shapes of the obtained crystal substance, the result of the scanning being the reservoir micro pore structure.