A microspectroscopic device includes: a wavelength-tunable first light source configured to emit pump-light in a mid-infrared wavelength range; a second light source configured to emit probe-light in a visible range; a light source controller configured to change a wavelength of the infrared light source; a first optical system configured to combine the pump-light and the probe-light to acquired combined light and concentrate the combined light on a minute part of a sample; a second optical system configured to block at least the probe-light from transmitted light or reflected light of the sample; a detector configured to detect light incident thereon from the second optical system; a first spectrum acquisition means configured to acquire a spectrum of the incident light during the probe-light emission to the sample as a Raman spectrum or a fluorescence spectrum of the sample; and a second spectrum acquisition means configured to acquire an infrared absorption spectrum of the sample, based on a change in the spectrum of the incident light with respect to a change in a wavelength by the light source controller during the probe-light and pump-light emission to the sample.

Apparatuses and methods for microscopic analysis of a sample using spatial light manipulation to increase signal to noise ratio are described herein.

Asymmetric interferometry is used with various embodiments of Optical Photothermal Infrared (OPTIR) systems to enhance the signal strength indicating the photothermal effect on a sample.

Apparatuses and methods for microscopic analysis of a sample using spatial light manipulation to increase signal to noise ratio are described herein.

Embodiments disclosed include methods and apparatus for Fluorescent Enhanced Photothermal Infrared (FE-PTIR) spectroscopy and chemical imaging, which enables high sensitivity and high spatial resolution measurements of IR absorption with simultaneous confocal fluorescence imaging. In various embodiments, the FE-PTIR technique utilizes combined/simultaneous OPTIR and fluorescence imaging that provides significant improvements and benefits compared to previous work by simultaneous detection of both IR absorption and confocal fluorescence using the same optical detector at the same time.

Mid-infrared photothermal heterodyne imaging (MIR-PHI) techniques described herein overcome the diffraction limit of traditional MIR imaging and uses visible photodiodes as detectors. MIR-PHI experiments are shown that achieve high sensitivity, sub-diffraction limit spatial resolution, and high acquisition speed. Sensitive, affordable, and widely applicable, photothermal imaging techniques described herein can serve as a useful imaging tool for biological systems and other submicron-scale applications.

The present disclosure is directed toward a measurement system capable of rapid spectroscopic and calorimetric analysis of the chemical makeup of a test sample. Systems in accordance with the present disclosure include a low-thermal-mass sample holder having a substrate whose surface has been engineered to create a large-area sample-collection surface. The sample holder includes an integrated temperature controller that can rapidly heat or cool the test sample. As a result, the sample holder enables differential scanning calorimetry Fourier-Transform Infrared Spectroscopy (DSC-FTIR) that can be performed in minutes rather than hours, as required in the prior art.

An inspection system (1600), a lithography apparatus, and an inspection method are provided. The inspection system (1600) includes an illumination system (1602), a detection system (1606), and processing circuitry (1622). The illumination system generates a first illumination beam (1610) at a first wavelength and a second illumination beam (1618) at a second wavelength. The first wavelength is different from the second wavelength. The illumination system irradiates an object (1612) simultaneously with the first illumination beam and the second illumination beam. The detection system receives radiation (1620) scattered by a particle (1624) present at a surface (1626) of the object at the first wavelength. The detection system generates a detection signal. The processing circuitry determines a characteristic of the particle based on the detection signal.

An apparatus (10) for analyzing a material (12) comprising at least one analyte, said apparatus comprising a measurement body (16) having a contact surface (14) suitable to be brought in thermal contact or pressure-transmitting contact with said material (12), an excitation radiation source (26) configured for irradiating excitation radiation (18) into the material (12) to be absorbed therein, and a detection device for detecting a physical response of the measurement body to heat or a pressure wave received from said material (12) upon absorption of said excitation radiation (18) and for generating a response signal indicative of the degree of absorption of excitation radiation, wherein a protrusion (80) is provided, said protrusion having a front surface (82) facing said material (12) and being in contact with the material when the material is brought in contact with the contact surface, and wherein said excitation radiation (18) is irradiated into the material (12) through said front surface (82) of said protrusion (80), wherein said protrusion (80) is formed on said contact surface (14) of said measurement body (16), or wherein said measurement body (16) forms said protrusion or a part of said protrusion, in which said contact surface (14) of said measurement body (16) forms at least a part of said front surface of said protrusion and is elevated with respect to a surrounding structure.

A microscopic object detection system includes a collecting kit and a detection device. The collecting kit has a thin film for converting light into heat and is configured to be capable of holding a sample on the thin film. The detection device detects a plurality of microscopic objects in the sample by collecting the plurality of microscopic objects dispersed in the sample with the collecting kit. The detection device includes a laser module, an optical receiver, and a controller. The laser module emits a laser beam with which the collecting kit is irradiated. The optical receiver detects the laser beam from the sample held by the collecting kit and outputs a detection signal thereof. The controller calculates an amount of the plurality of microscopic objects collected in the sample based on a change of the detection signal over time.