A rapid photoreflectance spectroscopy technique using parallel demodulation has been developed. A high-speed spectroscopic photo-reflectometer comprising an intensity modulated pump laser beam to modulate the reflectivity of a semiconductor sample and a second spectroscopic probe light beam to measure the modulated reflectance of the sample is disclosed. The modulated pump beam is focused onto the sample where it interacts with the sample. The spectroscopic probe beam is focused onto the sample where it is reflected. The reflected probe beam is collected and its constituent wavelengths are dispersed onto a compact photosensor array further comprising a parallel demodulation circuit for each photosensor element. Demodulated signals may then be passed to a computer for recordation and/or further analysis. A fit to the data may then be performed using standard nonlinear regression techniques, thereby providing rapid characterization of the sample material and/or electronic properties.

A rapid photoreflectance spectroscopy technique using parallel demodulation has been developed. A high-speed spectroscopic photo-reflectometer comprising an intensity modulated pump laser beam to modulate the reflectivity of a semiconductor sample and a second spectroscopic probe light beam to measure the modulated reflectance of the sample is disclosed. The modulated pump beam is focused onto the sample where it interacts with the sample. The spectroscopic probe beam is focused onto the sample where it is reflected. The reflected probe beam is collected and its constituent wavelengths are dispersed onto a compact photosensor array further comprising a parallel demodulation circuit for each photosensor element. Demodulated signals may then be passed to a computer for recordation and/or further analysis. A fit to the data may then be performed using standard nonlinear regression techniques, thereby providing rapid characterization of the sample material and/or electronic properties.

Implementations disclosed describe a system including a light source, an optical sensor, and a processing device. The light source directs, during a first time, a probe light into a processing chamber through a window. The light source ceases, during a second time, directing the probe light into the processing chamber through the window. The optical sensor detects, during the first time, a first intensity of a first light. The first light includes a portion of the probe light reflected from the window and a light transmitted from an environment of the processing chamber through the window. The optical sensor detects, during the second time, a second intensity of a second light. The second light includes the light transmitted from the environment of the processing chamber through the window. The processing device determines, using the first intensity and the second intensity, a transmission coefficient of the window.

Implementations disclosed describe a system including a light source, an optical sensor, and a processing device. The light source directs, during a first time, a probe light into a processing chamber through a window. The light source ceases, during a second time, directing the probe light into the processing chamber through the window. The optical sensor detects, during the first time, a first intensity of a first light. The first light includes a portion of the probe light reflected from the window and a light transmitted from an environment of the processing chamber through the window. The optical sensor detects, during the second time, a second intensity of a second light. The second light includes the light transmitted from the environment of the processing chamber through the window. The processing device determines, using the first intensity and the second intensity, a transmission coefficient of the window.

The present invention is directed to an assembly for use in detecting an analyte in a sample based on thin-film spectral interference. The assembly includes a light source to emit light signals; a light detector to detect light signals; a coupler to optically couple the light source and the light detector to a waveguide tip; a monolithic substrate having a coupling side and a sensing side; and a lens between the waveguide tip and the monolithic substrate. The lens relays optical signals between the waveguide tip and the monolithic substrate.

A multipass cell (300) comprising: a first reflector arrangement (305A, 305B); and a second reflector arrangement (307), the first (305A, 305B) and second (307) reflector arrangements defining an optical cavity (315) therebetween and the cell; wherein the first reflector arrangement (305A, 305B) is configured such that light incident on the first reflector arrangement (305A, 305B) is at least partially retroreflected towards the second reflector arrangement (307), wherein the second reflector (307) arrangement comprises a concave surface that is reflective, wherein at least one of the first (305A, 305B) and second (307) reflector arrangements comprises an aperture (306) for allowing light to enter and/or exit the optical cavity (315).

A multipass cell (300) comprising: a first reflector arrangement (305A, 305B); and a second reflector arrangement (307), the first (305A, 305B) and second (307) reflector arrangements defining an optical cavity (315) therebetween and the cell; wherein the first reflector arrangement (305A, 305B) is configured such that light incident on the first reflector arrangement (305A, 305B) is at least partially retroreflected towards the second reflector arrangement (307), wherein the second reflector (307) arrangement comprises a concave surface that is reflective, wherein at least one of the first (305A, 305B) and second (307) reflector arrangements comprises an aperture (306) for allowing light to enter and/or exit the optical cavity (315).

A process for detecting the sensitivity of one or more polymers and/or of one or more mixtures of polymers to a compound, including the steps of exposing a plurality of individualized micro-deposits including the polymer(s) and/or the mixture(s) of polymers to the compound, and detecting, by interferometry, a variation in appearance of an assembly of micro-deposits exposed to the compound and/or a variation in the dimensions and/or refractive index of at least one of the micro-deposits exposed to the compound, linked to an interaction between the polymer(s) and/or the mixture(s) of polymers and the compound.

An apparatus related method for measuring a property of a target material. The system may include a pump device that generates a pump beam. A modulation device may receive the pump beam and generate a modulated pump beam by modulating an intensity amplitude of the pump beam, which may be directed to the target material. A probe device may generate a probe beam, which is directed to the target material. A part of the probe beam may be reflected off of the target material, and has similar frequency characteristic as the modulated pump beam. A detection device may detect the reflected probe beam and produce a signal. An analyzing device may receive the signal and calculate the target material property by comparing the modulated frequency characteristics of the signal to those of the pump beam. At least one of the pump and the probe beams may be infrared light.

An apparatus related method for measuring a property of a target material. The system may include a pump device that generates a pump beam. A modulation device may receive the pump beam and generate a modulated pump beam by modulating an intensity amplitude of the pump beam, which may be directed to the target material. A probe device may generate a probe beam, which is directed to the target material. A part of the probe beam may be reflected off of the target material, and has similar frequency characteristic as the modulated pump beam. A detection device may detect the reflected probe beam and produce a signal. An analyzing device may receive the signal and calculate the target material property by comparing the modulated frequency characteristics of the signal to those of the pump beam. At least one of the pump and the probe beams may be infrared light.