A specimen processing system 100 which performs preprocessing and analysis of a specimen includes sensors 5a, 5b, . . . each detecting a driving state of a driving device installed in the system, an abnormality detecting part 3a determining from signal waveforms detected by the sensors 5a, 5b, . . . whether an abnormality occurs in the driving device, and a recording device sequentially recording the signal waveforms detected by the sensors 5a, 5b, . . . and storing a sensor signal waveform before or after the occurrence of an operation abnormality into an unerasable area when the abnormality is determined to have occurred in the abnormality detection part 3a. Consequently, there is provided a specimen processing system capable of realizing restoration from the time of the occurrence of an abnormality faster than in the past.

A specimen processing system 100 which performs preprocessing and analysis of a specimen includes sensors 5a, 5b, . . . each detecting a driving state of a driving device installed in the system, an abnormality detecting part 3a determining from signal waveforms detected by the sensors 5a, 5b, . . . whether an abnormality occurs in the driving device, and a recording device sequentially recording the signal waveforms detected by the sensors 5a, 5b, . . . and storing a sensor signal waveform before or after the occurrence of an operation abnormality into an unerasable area when the abnormality is determined to have occurred in the abnormality detection part 3a. Consequently, there is provided a specimen processing system capable of realizing restoration from the time of the occurrence of an abnormality faster than in the past.

Provided is a measuring apparatus, comprising a measuring unit that irradiates a film with light and measures the light transmitted through the film or the light reflected by the film, a moving mechanism that allows the measuring unit to move in a first direction intersecting the direction in which the film is conveyed, the measuring unit includes a light projecting unit that irradiates the film with light, an integrating sphere that collects light from the film, and a light receiving portion that receives the light collected by the integrating sphere.

Provided is a measuring apparatus, comprising a measuring unit that irradiates a film with light and measures the light transmitted through the film or the light reflected by the film, a moving mechanism that allows the measuring unit to move in a first direction intersecting the direction in which the film is conveyed, the measuring unit includes a light projecting unit that irradiates the film with light, an integrating sphere that collects light from the film, and a light receiving portion that receives the light collected by the integrating sphere.

Systems and methods for non-contact characterization of semiconductor devices. Systems may include: an infrared radiation source directing radiation towards the semiconductor device; a radiation directing device positioned proximal the infrared radiation source to direct radiation towards an opposing side of the semiconductor device, the semiconductor device receivable between the radiation directing device and the infrared radiation source; and a radiation detector proximal to the infrared radiation source to sense radiation associated with a plurality of infrared wavebands from the semiconductor device for determining a dopant profile property of the semiconductor device. The sensed radiation may include radiation originating from the infrared radiation source reflected from the semiconductor device. The sensed radiation may include radiation originating from the radiation directing device and emerging from the semiconductor device. The dopant profile properties may be based on infrared reflectance or infrared transmittance associated with the plurality of respective infrared wavebands.

Systems and methods for non-contact characterization of semiconductor devices. Systems may include: an infrared radiation source directing radiation towards the semiconductor device; a radiation directing device positioned proximal the infrared radiation source to direct radiation towards an opposing side of the semiconductor device, the semiconductor device receivable between the radiation directing device and the infrared radiation source; and a radiation detector proximal to the infrared radiation source to sense radiation associated with a plurality of infrared wavebands from the semiconductor device for determining a dopant profile property of the semiconductor device. The sensed radiation may include radiation originating from the infrared radiation source reflected from the semiconductor device. The sensed radiation may include radiation originating from the radiation directing device and emerging from the semiconductor device. The dopant profile properties may be based on infrared reflectance or infrared transmittance associated with the plurality of respective infrared wavebands.

Exemplary optical scanner apparatus, method and computer-accessible medium for obtaining information regarding the sample can be provided. In certain exemplary embodiments of the present disclosure, the optical scanner, method and computer-accessible medium can utilize a container configured to hold the sample which is provided in a fluid. A light source can be provided which is configured to emit a light radiation to the container and the sample. Further, with an optic taper, it is possible to receive, taper and combine substantially parallel beams of an output radiation exiting the sample. The output radiation can be provided in response to an irradiation of the sample by the light radiation. Further, using a light detector, it is possible to receive and detect the combined tapered parallel beams so as to obtain the information regarding the sample.

Exemplary optical scanner apparatus, method and computer-accessible medium for obtaining information regarding the sample can be provided. In certain exemplary embodiments of the present disclosure, the optical scanner, method and computer-accessible medium can utilize a container configured to hold the sample which is provided in a fluid. A light source can be provided which is configured to emit a light radiation to the container and the sample. Further, with an optic taper, it is possible to receive, taper and combine substantially parallel beams of an output radiation exiting the sample. The output radiation can be provided in response to an irradiation of the sample by the light radiation. Further, using a light detector, it is possible to receive and detect the combined tapered parallel beams so as to obtain the information regarding the sample.

When a measurement sample whose absorbance greatly changes depending on a wavelength range is measured, measurement with a high S/N ratio and accuracy can be efficiently performed in a short time.

For a plurality of wavelength ranges in wavelength scanning measurement of a measurement sample, based on measurement conditions including one of a plurality of dimming plates (16a to 16e) to be disposed in each wavelength range and a scanning speed of a wavelength to be set in each wavelength range, when wavelength scanning measurement in which the entire measurement wavelength range including all of the plurality of wavelength ranges is scanned at once is performed, a spectrophotometer (100) changes one of the plurality of dimming plates (16a to 16e) and the scanning speed according to the measurement conditions for each wavelength range.

When a measurement sample whose absorbance greatly changes depending on a wavelength range is measured, measurement with a high S/N ratio and accuracy can be efficiently performed in a short time.

For a plurality of wavelength ranges in wavelength scanning measurement of a measurement sample, based on measurement conditions including one of a plurality of dimming plates (16a to 16e) to be disposed in each wavelength range and a scanning speed of a wavelength to be set in each wavelength range, when wavelength scanning measurement in which the entire measurement wavelength range including all of the plurality of wavelength ranges is scanned at once is performed, a spectrophotometer (100) changes one of the plurality of dimming plates (16a to 16e) and the scanning speed according to the measurement conditions for each wavelength range.