G01N2021/8411

INTEGRATED REFLECTOMETER OR ELLIPSOMETER
20210131786 · 2021-05-06 ·

A reflectometer or ellipsometer integrated with a processing tool includes a source module configured to generate a input beam, and a first mirror arranged to receive the input beam. The first mirror is configured to collimate the input beam and direct the input beam toward an aperture plate. The aperture plate has at least two apertures. One of the at least two apertures is arranged to define a measurement beam from a portion of the input beam, and one of the at least two apertures is arranged to define a reference beam from a portion of the input beam. An optical element is arranged within an optical path of the reference beam and outside an optical path of the measurement beam. The optical element is configured to direct the reference beam toward a third mirror. A second mirror is arranged to receive the measurement beam and focus the measurement beam through a window and onto a surface of a sample. The window forms part of a chamber of the processing tool and the sample is disposed within the chamber. At least a portion of the measurement beam is reflected from the surface of the sample as a reflected beam. The second mirror is arranged to receive the reflected beam and direct the reflected beam toward the optical element. The optical element is configured to direct the reflected beam toward the third mirror. The third mirror is arranged to receive the reference beam and the reflected beam and focus the reference beam and the reflected beam onto a collection plane.

Fluid Self -Modulation
20230405583 · 2023-12-21 · ·

Combining through self-modulation a flow of active media from a working vessel of a bioprocess together with a flow of reference media and making a time- and/or spatially-resolved referenced optical measurement of the active vs reference media in a confined flow region and time, such that the two liquids are measured in substantially identical conditions.

PHOTO-CHEMICAL SYNTHESIS AND CHARACTERIZATION OF SILVER NANOPARTICLES SELF-ARRANGED ON CT-DNA AND BSA

The present invention relates to examination of characteristics of silver nano-clusters self-arranged by means of reduction of silver salt to silver nanoparticles by means of 2-mercapto-thioxanthone on DNA and BSA in short photo-illumination duration of 1 second.

USE OF A BACKSIDE ROUGHENED SAMPLE FOR MULTIPLE OPTICAL MEASUREMENTS TO IMPROVE THIN FILM FABRICATIONS
20210063314 · 2021-03-04 ·

An optical device fabrication system includes a witness sample having a roughened backside that is capable of both optical transmission and ellipsometry measurement analysis. The optical device can be an integrated computing element core.

In-situ photocatalysis monitoring system based on surface-enhanced raman scattering spectroscopy

An in-situ photocatalysis monitoring system based on surface-enhanced Raman Scattering (SERS) spectroscopy. The monitoring system may include a Raman excitation light source, a laser coupling lens, a narrow band filter, a total reflection mirror, a dichroic mirror, a focusing coupling lens, a SERS optical fiber probe, a liquid phase photocatalysis reactor, a photocatalytic light source, a Raman collection lens, and a spectrometer. A first furcation part and a second furcation part each extend from one end of a common detection part of the SERS optical fiber probe; an extending end of the first furcation part is coupled with the focusing coupling lens; an extending end of the second furcation part is coupled with the photocatalytic light source; and the other end of the common detection part is arranged inside the liquid phase photocatalysis reactor. Raman excitation light and photocatalytic light may be transmitted on a common channel.

Metrology for OLED manufacturing using photoluminescence spectroscopy

An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.

DEVICE AND METHOD OF GAS HYDRATE PRESSURE MAINTAINING REPLACEMENT FOR IN-SITU RAMAN ANALYSIS

The invention discloses a gas hydrate pressure maintaining replacement device and method for in-situ Raman analysis. Comprehensive experiments such as the formation/decomposition/displacement of high-pressure gas hydrates can be realized, and in-situ Raman characterization can be performed. Including reaction kettle system with temperature control unit, pressure control gas supply system, pressure holding system, replacement gas system, sample pre-cooling system, vacuum system and data acquisition and processing system. The device can solve the problem that the Raman peak position of the 512 cage is covered by the Raman peak position of the gas when the high-pressure gas hydrate is characterized in situ in the reaction kettle, at the same time, it solves the problems of sampling difficulties in ex-situ Raman characterization and experimental errors caused by sample transfer.

System and method for the detection of acrylamide precursors in raw potatoes and potato-based food products

A method and apparatus for the detection of Acrylamide precursors in raw potatoes including: illuminating at least one region of a raw potato's surface with an illumination beam; measuring the intensity of light scattered by the potato; generating a detection signal based on the measured intensity of scattered light; comparing the detection signal to a predefined threshold; and classifying the potato as having a high Acrylamide precursor concentration if the detection signal exceeds the predefined threshold.

METROLOGY FOR OLED MANUFACTURING USING PHOTOLUMINESCENCE SPECTROSCOPY

An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.

Method and device for producing printed microarrays

Method for manufacturing microarrays and verifying the quality of said microarrays, wherein the method comprises: a) providing at least one reagent, b) loading said at least one reagent in a dispensing print head, in a predetermined arrangement, c) in a first print pass, generating instructions for the print head and moving said print head with respect to a substrate to print said at least one reagent on the substrate to obtain microarrays, d) obtaining an image of the printed microarrays by means of a camera, e) processing the obtained images of the printed microarrays, to calculate parameters indicative for the quality of the printed microarrays, f) comparing, at the end of the first print pass, the calculated parameters for the printed microarrays with predetermined criteria for the microarrays, to identify possible printing defects, g) comparing, for the printed microarrays, the identified printing defects of step f), h) using the outcome of the comparison of step g) to select a corrective action to improve the quality of the microarrays, prior to the printing of a subsequent print pass.