The present specification discloses a multi-view X-ray inspection system having, in one of several embodiments, a three-view configuration with three X-ray sources. Each X-ray source rotates and is configured to emit a rotating X-ray pencil beam and at least two detector arrays, where each detector array has multiple non-pixellated detectors such that at least a portion of the non-pixellated detectors are oriented toward both the two X-ray sources.

Methods and systems for estimating values of process parameters, structural parameters, or both, based on x-ray scatterometry measurements of high aspect ratio semiconductor structures are presented herein. X-ray scatterometry measurements are performed at one or more steps of a fabrication process flow. The measurements are performed quickly and with sufficient accuracy to enable yield improvement of an on-going semiconductor fabrication process flow. Process corrections are determined based on the measured values of parameters of interest and the corrections are communicated to the process tool to change one or more process control parameters of the process tool. In some examples, measurements are performed while the wafer is being processed to control the on-going fabrication process step. In some examples, X-ray scatterometry measurements are performed after a particular process step and process control parameters are updated for processing of future devices.

An x-ray inspection device includes an x-ray irradiation unit that irradiates an object for inspection with an x-ray; a sensor that detects an electric signal corresponding to a back-scattered x-ray reflected off the object for inspection; a measurement unit that measures the object for inspection with reference to the electric signal output by the sensor; and a heavy metal plate having a pinhole that allows the back-scattered x-ray to pass therethrough, the pinhole forming an image of the back-scattered x-ray on the sensor.

An x-ray imaging system includes an x-ray source configured to emit x-ray radiation towards a sample, and a primary detector configured to detect x-ray radiation from the x-ray source passing through the sample. The x-ray imaging system also includes a secondary detector configured to detect x-ray radiation from the x-ray source scattered in the sample, and imaging optics configured to guide x-ray radiation scattered in the sample onto the secondary detector.

An X-ray imaging inspection system for inspecting items comprises an X-ray source 10 extending around an imaging volume 16, and defining a plurality of source points 14 from which X-rays can be directed through the imaging volume. An X-ray detector array 12 also extends around the imaging volume 16 and is arranged to detect X-rays from the source points which have passed through the imaging volume, and to produce output signals dependent on the detected X-rays. A conveyor 20 is arranged to convey the items through the imaging volume 16.

A method for analyzing an object, includes irradiating the object with incident photon radiation, acquiring a spectrum transmitted by the object using a spectrometric transmission detector, determining at least one first property of the object from the transmission spectrum, verifying that at least one doubt criterion relating to the first property of the object is met, and translating the fact that the object contains a material that is potentially dubious for the application under consideration. A second part, carried out only when the doubt criterion is met, includes acquiring an energy spectrum scattered by the object using a spectrometric scattering detector at an angle of 1 to 15, and determining a second property of the object from at least the scatter spectrum and comparing at least the second property of the object with properties of standard materials stored in a database to identify the objects composition material.

A method and system for scanning an elongate structure. A scanner in a scanning system is moved axially along the elongate structure using a translating structure in the scanning system. The elongate member is scanned axially as the scanner moves axially along the elongate structure. The scanner is moved rotationally around the elongate structure at a location in which an inconsistency is detected at the location during an axial scan. The elongate structure is scanned rotationally at the location while the scanner moves rotationally around the elongate structure.

The invention provides a novel microfluidic platform for use in electro-crystallization and electro-crystallography experiments. The manufacturing and use of graphene as X-ray compatible electrodes allows the application of electric fields on-chip, during X-ray analysis. The presence of such electric fields can be used to modulate the structure of protein (or other) molecules in crystalline (for X-ray diffraction) or solution form (for X-ray scattering). Additionally, the presence of an electric field can be used to extend the lifetime of fragile samples by expediting the removal of reactive secondary radiation damage species.

A method for improving the quality/integrity of an EBSD/TKD map, wherein each data point is assigned to a corresponding grid point of a sample grid and represents crystal information based on a Kikuchi pattern detected for the grid point; comprising determining a defective data point of the EBSD/TKD map and a plurality of non-defective neighboring data points, comparing the position of Kikuchi bands of a Kikuchi pattern detected for a grid point corresponding to the defective data point with the positions of bands in at least one simulated Kikuchi pattern corresponding to crystal information of the neighboring data points and assigning the defective data point the crystal information of one of the plurality of neighboring data point based on the comparison.

There is presented a screening system and a corresponding method for screening an item. The screening system includes a detection apparatus (100), a rotatable platform (310) to receive the item, and a mechanical arrangement (320, 330). The detection apparatus has an emitter portion to generate a primary beam of ionising radiation and a detector portion to detect an absorption signal and at least one of a diffraction signal and a scattering signal. The mechanical arrangement is adapted to translate the detection apparatus along a translation axis to scan the item with the primary beam. The screening system may be used for identifying restricted or illicit substances that may be present in some luggage or in mail.