An x-ray mirror optic includes a plurality of surface segments with quadric cross-sections having differing quadric parameters. The quadric cross-sections of the surface segments share a common axis and are configured to reflect x-rays in a plurality of reflections along a single optical axis or in a scattering plane defined as containing an incident x-ray and a corresponding reflected x-ray.

An x-ray mirror optic includes a plurality of surface segments with quadric cross-sections having differing quadric parameters. The quadric cross-sections of the surface segments share a common axis and are configured to reflect x-rays in a plurality of reflections along a single optical axis or in a scattering plane defined as containing an incident x-ray and a corresponding reflected x-ray.

A measurement system according to an aspect of the present invention enables measurement of an intensity distribution of diffracted X-rays obtained by irradiating a fillet portion of a metallic structure with X-rays, the metallic structure comprising: an axis portion; and a flange portion protruding radially from the axis portion, wherein the metallic structure comprises the fillet portion in a connection portion between the axis portion and the flange portion, the measurement system including: a diffracted X-rays measurement device provided with an irradiation unit that irradiates the fillet portion with X-rays; and a positioning device that positions the diffracted X-rays measurement device with respect to the fillet portion, in which the positioning device including: a moving mechanism that moves three-dimensionally the diffracted X-rays measurement device relative to the fillet portion; and a rotation mechanism that rotates the diffracted X-rays measurement device in such a direction that an angle of incidence of the X-rays with respect to the fillet portion is changed.

A device and system for ultrafast electron diffraction is disclosed. The electron diffraction device includes an electron source, anode, and magnetic lens. A laser probe pulse interacts with electrons from the electron source to generate an electron probe pulse that passes through the anode and diffracts from a sample yielding a diffraction pattern. Data is configured to be collected at one instance using the diffraction pattern to yield a first snapshot of diffractive information. Snapshots may be merged to produce an atomic stroboscopic motion image history of atomic lattice changes. The electron source may include a gas jet with photo-ionizable noble gas atoms to produce photoionized, spin-polarized electrons to form the electron probe pulse when the laser probe pulse impinges upon the electron source.

A device and system for ultrafast electron diffraction is disclosed. The electron diffraction device includes an electron source, anode, and magnetic lens. A laser probe pulse interacts with electrons from the electron source to generate an electron probe pulse that passes through the anode and diffracts from a sample yielding a diffraction pattern. Data is configured to be collected at one instance using the diffraction pattern to yield a first snapshot of diffractive information. Snapshots may be merged to produce an atomic stroboscopic motion image history of atomic lattice changes. The electron source may include a gas jet with photo-ionizable noble gas atoms to produce photoionized, spin-polarized electrons to form the electron probe pulse when the laser probe pulse impinges upon the electron source.

Embodiments may include methods, systems, and apparatuses for care area based swath speed for throughput and sensitivity improvement. A method may comprise receiving scan region of a die. The scan region of the die may have a first care area at a controller configured to control an inspection tool, wherein the inspection tool includes a stage having the die disposed thereon. The method may then include scanning a first portion of the scan region at a fast feed rate and the first care area at a slow feed rate. Scanning may include emitting particles in a particle beam toward the die resulting an incidence on the die. Emitting may be performed using a particle emitter. Scanning may then include detecting a portion of particles reflected from the incidence. Detecting may be performed using a detector. Scanning may then include changing a position of the stage relative to the incidence.

A sample inspection apparatus includes a source of electromagnetic radiation, a beam former for producing a plurality of coaxial and substantially conical shells of radiation, a detection surface and a set of conical shell slot collimators. Each conical shell has a different opening angle. The detection surface is arranged to receive diffracted radiation after incidence of one or more of the conical shells upon the sample to be inspected. The set of conical shell slot collimators is provided at or close to the detection surface which each stare at different annular regions of different corresponding conical shells.

A sample inspection apparatus includes a source of electromagnetic radiation, a beam former for producing a plurality of coaxial and substantially conical shells of radiation, a detection surface and a set of conical shell slot collimators. Each conical shell has a different opening angle. The detection surface is arranged to receive diffracted radiation after incidence of one or more of the conical shells upon the sample to be inspected. The set of conical shell slot collimators is provided at or close to the detection surface which each stare at different annular regions of different corresponding conical shells.

The present invention provides a novel method for identifying a molecular structure by a single crystal X-ray analysis. A single crystal that gives an X-ray diffraction spectrum sufficient for determining a structure of a molecule can be efficiently obtained by including a test molecule in a metal complex, and then crystallizing the test-molecule included in the metal complex. By analyzing this single crystal by an X-ray analysis, it is possible to determine a structure of the test molecule without obtaining a single crystal of the test molecule. With the novel method according to the present invention, the structure of a test molecule in a trace amount of a sample can also be determined.

The present invention provides a novel method for identifying a molecular structure by a single crystal X-ray analysis. A single crystal that gives an X-ray diffraction spectrum sufficient for determining a structure of a molecule can be efficiently obtained by including a test molecule in a metal complex, and then crystallizing the test-molecule included in the metal complex. By analyzing this single crystal by an X-ray analysis, it is possible to determine a structure of the test molecule without obtaining a single crystal of the test molecule. With the novel method according to the present invention, the structure of a test molecule in a trace amount of a sample can also be determined.