Molecular structure of a crystal may be solved based on at least two diffraction tilt series acquired from a sample. The two diffraction tilt series include multiple diffraction patterns of at least one crystal of the sample acquired at different electron doses. In some examples, the two diffraction tilt series are acquired at different magnifications.

A correction amount specifying apparatus comprises circuitry for storing diffraction data including a combination of the diffraction angle of the irradiation X-rays with respect to the sample rotation angle and the sample surface height, the diffraction data being acquired by irradiating X-rays to a standard sample that is an aggregate of isotropic and stress free crystal particles, determining a first correspondence relationship based on the diffraction data, and specifying a correction amount of the sample surface height with respect to a desired sample rotation angle and a desired diffraction angle based on the first correspondence relationship.

A metal oxide film including a crystal part and having highly stable physical properties is provided. The size of the crystal part is less than or equal to 10 nm, which allows the observation of circumferentially arranged spots in a nanobeam electron diffraction pattern of the cross section of the metal oxide film when the measurement area is greater than or equal to 5 nmφ and less than or equal to 10 nmφ.

A metal oxide film including a crystal part and having highly stable physical properties is provided. The size of the crystal part is less than or equal to 10 nm, which allows the observation of circumferentially arranged spots in a nanobeam electron diffraction pattern of the cross section of the metal oxide film when the measurement area is greater than or equal to 5 nmφ and less than or equal to 10 nmφ.

There are provided a radiation detector capable of detecting radiation without occurrence of dead time while maintaining an exposure state in which radiation enters continuously, and an X-ray analysis apparatus and a radiation detection method using the radiation detector. A radiation detector 100 that detects radiation in synchronization with an external apparatus 200, includes: a sensor 110 that generates pulses when radiation particles are detected; a plurality of counters 140a, 140b provided so as to be able to count the pulses; and a control circuit 160 configured to switch a counter to count the pulses among the plurality of counters 140a, 140b, when receiving a synchronization signal from the external apparatus 200.

There are provided a radiation detector capable of detecting radiation without occurrence of dead time while maintaining an exposure state in which radiation enters continuously, and an X-ray analysis apparatus and a radiation detection method using the radiation detector. A radiation detector 100 that detects radiation in synchronization with an external apparatus 200, includes: a sensor 110 that generates pulses when radiation particles are detected; a plurality of counters 140a, 140b provided so as to be able to count the pulses; and a control circuit 160 configured to switch a counter to count the pulses among the plurality of counters 140a, 140b, when receiving a synchronization signal from the external apparatus 200.

Provided are a processing method, a processing apparatus and a processing program which can perform pole figure measurement continuously without overlapping of an angle α in a pole figure with the small number of times of φ scan, thereby enabling the efficient measurement. The processing method for determining conditions of pole figure measurement by X-ray diffraction, includes the steps of: receiving input of a diffraction angle 2θ; and determining an angle ω formed by an incident X-ray and an x-axis, and a tilt angle χ of a sample in each φ scan for a rotation angle φ within a sample plane so as to make a range of an angle α continuous from α=90° to α=0° without overlapping, the angle α being formed by the sample plane and a scattering vector, the range of the angle α are detectable at a time on a two-dimensional detection plane in the pole figure measurement at the input angle 2θ, in which determining the angle ω and the angle χ is repeated.

The invention provides a sensitivity correction coefficient calculating system for an X-ray detector with which the sensitivity correction coefficient can be calculated using a multipurpose X-ray source instead of a specific X-ray source. In the sensitivity correction coefficient calculating system for an X-ray detector having a detection surface where detection elements for detection the X-ray intensity are aligned one-dimensionally or two-dimensionally, fitting is carried out on the measured X-ray intensity detected by a detection element using an approximation function so as to calculate the sensitivity correction coefficient using the calculated X-ray intensity calculated from the approximation function and the measured X-ray intensity.

The invention provides a sensitivity correction coefficient calculating system for an X-ray detector with which the sensitivity correction coefficient can be calculated using a multipurpose X-ray source instead of a specific X-ray source. In the sensitivity correction coefficient calculating system for an X-ray detector having a detection surface where detection elements for detection the X-ray intensity are aligned one-dimensionally or two-dimensionally, fitting is carried out on the measured X-ray intensity detected by a detection element using an approximation function so as to calculate the sensitivity correction coefficient using the calculated X-ray intensity calculated from the approximation function and the measured X-ray intensity.

A method of X-ray analysis measures X-ray diffraction in transmission. In order to carry out quantitative measurements, a background measurement is taken slightly away from the diffraction peak and the ratio of measured intensities used to correct for variations in sample composition.