A method for characterizing a sample combining an X-ray tomography characterization technique and a secondary ionization mass spectrometry characterization technique, includes: a step of providing a tip that includes first and second end surfaces, a first cylindrical region bearing the first end surface and a second region in contact with the first cylindrical region and becoming slimmer towards the second end surface; a step of machining the second region to obtain a sample holder including a flat surface, the flat surface forming an end surface of the sample holder, the area of the flat surface being less than the area of the first end surface; a step of placing the sample on the flat surface of the sample holder; a first step of characterization of the sample using an X-ray characterization technique; a second step of characterization of the sample using a secondary ionization mass spectrometry characterization technique.

A shielded X-ray radiation apparatus is provided comprising an X-ray source, an X-ray attenuation shield including an elongate cavity to house the X-ray source and incorporating a region to accommodate a sample, a neutron attenuation shield, and a gamma attenuation shield. The neutron attenuation shield is situated adjacent to and substantially surrounds the X-ray attenuation shield and the gamma attenuation shield is adjacent to and substantially surrounds the neutron attenuation shield. In some embodiments a removable sample insertion means is provided to insert samples into the elongate cavity and which is composed of adjacent blocks of material, each respective block having a thickness and a composition which substantially matches the thickness and a composition of one of the X-ray attenuation, neutron attenuation and gamma-ray attenuation shields.

A shielded X-ray radiation apparatus is provided comprising an X-ray source, an X-ray attenuation shield including an elongate cavity to house the X-ray source and incorporating a region to accommodate a sample, a neutron attenuation shield, and a gamma attenuation shield. The neutron attenuation shield is situated adjacent to and substantially surrounds the X-ray attenuation shield and the gamma attenuation shield is adjacent to and substantially surrounds the neutron attenuation shield. In some embodiments a removable sample insertion means is provided to insert samples into the elongate cavity and which is composed of adjacent blocks of material, each respective block having a thickness and a composition which substantially matches the thickness and a composition of one of the X-ray attenuation, neutron attenuation and gamma-ray attenuation shields.

The objective of the present invention is to maintain the surrounding of a sample at atmospheric pressure and efficiently detect secondary electrons. In a sample chamber of a charged particle device, a sample holder (4) has: a gas introduction pipe and a gas evacuation pipe for controlling the vicinity of a sample (20) to be an atmospheric pressure environment; a charged particle passage hole (18) and a micro-orifice (18) enabling detection of secondary electrons (15) emitted from the sample (20), co-located above the sample (20); and a charged particle passage hole (19) with a hole diameter larger than the micro-orifice (18) above the sample (20) so as to be capable of actively evacuating gas during gas introduction.

An X-ray analyzer includes an X-ray excitation device, an X-ray detection device, and a gate valve. The X-ray excitation device includes a sample chamber in which a sample as an analysis target can be disposed. The X-ray detection device includes a TES which can detect a characteristic X-ray emitted from the sample, and a room-temperature shield which surrounds the TES. The gate valve is disposed between the X-ray excitation device and the X-ray detection device. The inside of the room-temperature shield is provided to enable communication with the inside of the sample chamber. The gate valve includes a partition plate provided to enable blocking of a communication between the inside of the sample chamber and the inside of the room-temperature shield. The partition plate has a pressure-resistant X-ray window.

An analysis apparatus comprises: a moveable stage assembly; a sample holder on a top surface of the stage assembly; a first photon source and a first photon detector or detector array, the first photon source being configured to emit a first beam of photons that intercepts the surface of a sample at a first location on the sample and the first photon detector or detector array being configured to detect photons that are emitted from the first location; and a second photon source and a second photon detector or detector array, the second photon source being configured to emit a second beam of photons that intercepts the surface of the sample at a second location on the sample, the second location being spaced apart from the first location, and the second photon detector or detector array being configured to detect photons that are emitted from the second location.

An analysis apparatus comprises: a moveable stage assembly; a sample holder on a top surface of the stage assembly; a first photon source and a first photon detector or detector array, the first photon source being configured to emit a first beam of photons that intercepts the surface of a sample at a first location on the sample and the first photon detector or detector array being configured to detect photons that are emitted from the first location; and a second photon source and a second photon detector or detector array, the second photon source being configured to emit a second beam of photons that intercepts the surface of the sample at a second location on the sample, the second location being spaced apart from the first location, and the second photon detector or detector array being configured to detect photons that are emitted from the second location.

The sample mounting system comprises a sample holder and a sample stage having a platform for supporting the sample holder. The sample can be fixed to the sample holder by a mount. The sample holder comprises a holder reference portion, which co-operates with a corresponding reference portion of the sample stage (the stage reference portion) to align the sample holder with the sample stage. When the sample holder is positioned on the platform such that the stage reference portion and the holder reference portion engage each other, the sample holder is aligned with the sample stage.

The sample mounting system comprises a sample holder and a sample stage having a platform for supporting the sample holder. The sample can be fixed to the sample holder by a mount. The sample holder comprises a holder reference portion, which co-operates with a corresponding reference portion of the sample stage (the stage reference portion) to align the sample holder with the sample stage. When the sample holder is positioned on the platform such that the stage reference portion and the holder reference portion engage each other, the sample holder is aligned with the sample stage.

Provided is an X-ray analysis device and an X-ray analysis method capable of easily analyzing a valence of a target element in a sample. A controller 22 of a signal processing device of the X-ray analysis device is provided with: a storage unit 360 for storing a calibration curve generated based on a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray emitted from a metal simple substance, a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray emitted from each of two or more types of compounds each containing the metal simple substance, and a valence of the metal in each of the two or more types of compounds; a processing unit 302 configured to acquire a peak energy of Kα.sub.1 X-ray and a peak energy of Kα.sub.2 X-ray of the metal emitted from the metal contained in an unknown sample; and a calculation unit 308 configured to calculate a mean valence of the metal contained in the unknown sample by applying the obtained peak energy of Kα.sub.1 X-ray and peak energy of Kα.sub.2 X-ray to the calibration curve.