Determining a property of a layer of an integrated circuit (IC), the layer being formed over an underlayer, is implemented by performing the steps of: irradiating the IC to thereby eject electrons from the IC; collecting electrons emitted from the IC and determining the kinetic energy of the emitted electrons to thereby calculate emission intensity of electrons emitted from the layer and electrons emitted from the underlayer calculating a ratio of the emission intensity of electrons emitted from the layer and electrons emitted from the underlayer; and using the ratio to determine material composition or thickness of the layer. The steps of irradiating IC and collecting electrons may be performed using x-ray photoelectron spectroscopy (XPS) or x-ray fluorescence spectroscopy (XRF).

Provided is an electrostatic deflection convergence-type energy analyzer having a wide acceptance angle and high two-dimensional convergence performance, is capable of imaging two-dimensional real-space images and emission angle distributions, and enables two-dimensional convergence and imaging at 90 deflection with respect to an incident direction. Outer electrodes and inner electrodes are disposed along the shapes of two rotation bodies formed on the inside and the outside for a common rotation axis. The inner-surface shape of the outer electrode has a tapered shape becoming smaller in diameter toward both ends. The outer-surface shape of the inner electrodes has a tapered shape becoming smaller in diameter toward both ends. An electron incident hole and exit hole are formed in each of the outer electrodes at both ends on the rotation axis. The outer and the inner electrodes have applied thereto voltages for accelerating and decelerating electrons in proportion to the energy of incident electrons.

A probe for collecting optically stimulated electron emission to inspect chemical reactions of a surface includes a light source to emit light on the surface, a collector, and a controller. The light source emits light on the surface. The collector is configured to detect photoelectrons emitted from the surface in response to the light from the light source impinging on the surface. The collector is further configured to provide a photocurrent based on the detected photoelectrons. The controller includes at least one processor and is operably coupled to the light source and the collector. The controller is configured to cause the light source to emit light on the surface, receive the photocurrent from the collector, and determine at least one chemical reaction of the surface based on the received photocurrent.

A probe for collecting optically stimulated electron emission to inspect chemical reactions of a surface includes a light source to emit light on the surface, a collector, and a controller. The light source emits light on the surface. The collector is configured to detect photoelectrons emitted from the surface in response to the light from the light source impinging on the surface. The collector is further configured to provide a photocurrent based on the detected photoelectrons. The controller includes at least one processor and is operably coupled to the light source and the collector. The controller is configured to cause the light source to emit light on the surface, receive the photocurrent from the collector, and determine at least one chemical reaction of the surface based on the received photocurrent.

Electrons excited by irradiation of a visible light to a sample is at an energy level lower than a vacuum level, thus photoelectrons are not emitted from the sample and energy of excited electrons cannot be measured. The visible light is irradiated to the sample through a mesh electrode. A surface film for reducing the vacuum level is formed on a surface of the sample. With the surface film being formed, photoelectrons are obtained by the visible light, and these photoelectrons are accelerated by the mesh electrode toward a photoelectron spectrometer. Ultraviolet light may be irradiated to the sample and metal having same potential therewith. In this case, the mesh electrode is set at a retracted position to prohibit interaction of the mesh electrode and the ultraviolet light. A difference between the valence band and the Fermi level of the sample can be measured.

A system includes a signal generator that is configured to generate a first electrical signal. The system also includes a light source configured to generate a light beam based on the first electrical signal. The light source is also configured to direct the light beam towards a structural member of an aircraft. The system also includes a photoelectric sensor configured to receive a reflected light beam and convert the reflected light beam to a second electrical signal. The reflected light beam corresponds to a portion of the light beam that is reflected from one or more optical reflectors coupled to the structural member. The system also includes circuitry configured to estimate a location of a center-of-gravity of the aircraft based on a timing difference between the first electrical signal and the second electrical signal.

A system includes a signal generator that is configured to generate a first electrical signal. The system also includes a light source configured to generate a light beam based on the first electrical signal. The light source is also configured to direct the light beam towards a structural member of an aircraft. The system also includes a photoelectric sensor configured to receive a reflected light beam and convert the reflected light beam to a second electrical signal. The reflected light beam corresponds to a portion of the light beam that is reflected from one or more optical reflectors coupled to the structural member. The system also includes circuitry configured to estimate a location of a center-of-gravity of the aircraft based on a timing difference between the first electrical signal and the second electrical signal.

A detector supplement device for integration in a spectroscopy setup with the spectroscopy setup including a vacuum chamber, a light source, a sample irradiating a reflected photon beam and a charged particle beam in the same direction of propagation into a radiation detector which is able to detect ultrafast electric currents originating from charged particles. The detector supplement device includes a Rogowski coil placeable inside the vacuum chamber between the sample and radiation detector. The charged particle beam is guided through the hollow core of the Rogowski coil allowing synchronized measurements of electrical currents due to the charged particle beam correlated to the reflected photon beam, while irradiation of the reflected photon beam and the charged particle beam takes place in the same direction of propagation.

A detector supplement device for integration in a spectroscopy setup with the spectroscopy setup including a vacuum chamber, a light source, a sample irradiating a reflected photon beam and a charged particle beam in the same direction of propagation into a radiation detector which is able to detect ultrafast electric currents originating from charged particles. The detector supplement device includes a Rogowski coil placeable inside the vacuum chamber between the sample and radiation detector. The charged particle beam is guided through the hollow core of the Rogowski coil allowing synchronized measurements of electrical currents due to the charged particle beam correlated to the reflected photon beam, while irradiation of the reflected photon beam and the charged particle beam takes place in the same direction of propagation.

A detector supplement device for integration in a spectroscopy setup with the spectroscopy setup including a vacuum chamber, a light source, a sample irradiating a reflected photon beam and a charged particle beam in the same direction of propagation into a radiation detector which is able to detect ultrafast electric currents originating from charged particles. The detector supplement device includes a Rogowski coil placeable inside the vacuum chamber between the sample and radiation detector. The charged particle beam is guided through the hollow core of the Rogowski coil allowing synchronized measurements of electrical currents due to the charged particle beam correlated to the reflected photon beam, while irradiation of the reflected photon beam and the charged particle beam takes place in the same direction of propagation.