The present invention is a sensor device comprising: a housing; a processing unit assembly disposed within the housing, wherein the processing unit comprising a high frequency oscillator, a first voltage meter, a low frequency oscillator, a second voltage meter; a probe having a predetermined shape and profile attached to the processing unit and extending from the housing a predetermined distance; and a first sensing unit integrated into the probe and in electrical communication with the high frequency oscillator and the first voltage meter; a second sensing unit integrated into the probe relative to the first sensing unit and in electrical communication with the low frequency oscillator and the second voltage meter.

A method includes: delivering a slurry to a semiconductor tool through a piping network of a slurry delivery system; coupling an electrode pair to an outer wall of a pipe of the piping network; measuring one or more capacitance values associated with the electrode pair with the slurry being an insulting layer between the electrode pair; and deriving a quality metric of the slurry according to the one or more capacitance values.

The present disclosure provides a fluid sensor and a method for fabricating a fluid sensor. The fluid sensor includes a substrate including a first material and having a first surface and a second surface opposite to the first surface, wherein the substrate further comprises a recess recessed from the first surface, a first conductive layer over the first surface of the substrate, a protection layer between the first surface of the substrate and the first conductive layer, wherein the protection layer includes a second material, and a through via connected to the recess.

Monolithic humidity sensor devices, and methods of manufacture. The devices include circuitry on or over a silicon substrate. A primary passivation barrier is formed over the circuitry with conductive vias therethrough; a capacitor, comprising metal fingers with spaces therebetween, is formed above said primary passivation barrier and electrically coupled by the conductive vias to the circuitry. A secondary passivation barrier is formed over the capacitor. A hygroscopic material layer is formed over the secondary passivation barrier, wherein the capacitor is operable to exhibit a capacitance value responsive to moisture present in the hygroscopic material layer and the circuitry is operable to generate a signal responsive to said capacitance value.

Disclosed herein are a soil moisture sensor and an operating method thereof. The soil moisture sensor includes a first probe including a pair of first electrodes extending in a first direction; a first resonance circuit connected to the pair of first electrodes of the first probe through a pair of first ports, and configured such that a first AC signal is applied thereto; a second resonance circuit having the same impedance as the first resonance circuit, and configured such that a second AC signal having the same characteristics as the first AC signal while being a reference AC signal is applied thereto; and a determination circuit configured to receive a first electrical signal and a second electrical signal and to determine the moisture in the soil based on the first resonant frequency of the first electrical signal and the second resonant frequency of the second electrical signal.

The present disclosure discloses a microfluidic structure, a microfluidic chip and a detection method. The microfluidic structure includes: a first base substrate and a second base substrate opposite to each other, an antibody area located between the first base substrate and the second base substrate and storing an enzyme-labeled first antibody, a cleaning area storing cleaning liquid, a signal substrate area storing a signal substrate solution and a detection area with a second antibody and an ion sensitive film fixed thereon, wherein all channel areas from the antibody area, the cleaning area and the signal substrate area to the detection area each have a driving electrode structure driving liquid drops to move; and the detection area has a thin film transistor connected with the ion sensitive film.

A device includes a sensor die, an electrical coupling, a substrate, a liquid detection unit, and a housing unit. The sensor die is coupled to the substrate via the electrical coupling. The liquid detection unit electrically is coupled to the sensor die. The housing unit and the substrate are configured to house the sensor die, the liquid detection unit, and the electrical coupling. The housing unit comprises an opening that exposes the sensor die to an environment external to the housing unit. The liquid detection unit detects presence of liquid within an interior environment of the housing unit. In some embodiments, the device further includes a gel filled within the interior environment of the housing unit covering the sensor die and the substrate. The gel, e.g., silicone, fluoro silicone, etc., is configured to protect the sensor die, the electrical coupling, and the substrate from exposure to the liquid.

A mold sensor is configured with an enclosed chamber in which a nutrient-treated substrate is positioned. The mold sensor includes a sensor for measuring electrical properties of the substrate. The substrate includes conductive elements to interface with a controller to measure the electrical properties. The controller operates the sensor and is programmed to detect a presence of mold growing in the chamber based on the electrical properties.

A mold sensor is configured with an enclosed chamber in which a nutrient-treated substrate is positioned. The mold sensor includes a sensor for measuring electrical properties of the substrate. The substrate includes conductive elements to interface with a controller to measure the electrical properties. The controller operates the sensor and is programmed to detect a presence of mold growing in the chamber based on the electrical properties.

Methods and systems are provided for clay detection, clay typing, and clay volume quantification using electromagnetic measurements on a porous media sample at a low frequency less than 5000 Hz. The electromagnetic measurements are used to determine and store permittivity data that characterizes permittivity of the porous media sample at the low frequency less than 5000 Hz. The low frequency electromagnetic measurements can be performed in a laboratory, at a wellsite or other surface location. The low frequency electromagnetic measurements are nondestructive, and the results indicate that the methods and systems are highly sensitive to the existence of clays.