A method of forming a semiconductor structure includes forming a substrate, forming an anchor layer, and forming one or more self-aligned nanotip pillar pairs disposed vertically between the substrate and the anchor layer. A given one of the nanotip pillar pairs comprises a bottom nanotip pillar and a top nanotip pillar, the bottom nanotip pillar comprising a base portion disposed on a top surface of the substrate and the top nanotip pillar comprising a base portion disposed in the anchor layer. The bottom nanotip pillar and the top nanotip pillar comprise sidewalls that taper to points as distance from the respective base portions increases.

A method of forming a semiconductor structure includes forming a substrate, forming an anchor layer, and forming one or more self-aligned nanotip pillar pairs disposed vertically between the substrate and the anchor layer. A given one of the nanotip pillar pairs comprises a bottom nanotip pillar and a top nanotip pillar, the bottom nanotip pillar comprising a base portion disposed on a top surface of the substrate and the top nanotip pillar comprising a base portion disposed in the anchor layer. The bottom nanotip pillar and the top nanotip pillar comprise sidewalls that taper to points as distance from the respective base portions increases.

A first shutter gate is disposed at an entrance of a drift region, and a second shutter gate is disposed on the downstream side in an ion-drifting direction. In a high-resolution measurement mode, a controller (9) controls voltage generators to open the second shutter gate to collect ions into a pulsed form at the first shutter gate. In this mode, the controller controls the voltage generators to open the first shutter gate to collect ions into a pulsed form at the second shutter gate. In a zoom-in measurement mode where ions within a specified range of ion mobility are measured with high resolving power, the controller controls the voltage generators to open the first shutter gate for a short period of time, and then to open the second shutter gate for a short period of time after a lapse of a predetermined time period.

A first shutter gate is disposed at an entrance of a drift region, and a second shutter gate is disposed on the downstream side in an ion-drifting direction. In a high-resolution measurement mode, a controller (9) controls voltage generators to open the second shutter gate to collect ions into a pulsed form at the first shutter gate. In this mode, the controller controls the voltage generators to open the first shutter gate to collect ions into a pulsed form at the second shutter gate. In a zoom-in measurement mode where ions within a specified range of ion mobility are measured with high resolving power, the controller controls the voltage generators to open the first shutter gate for a short period of time, and then to open the second shutter gate for a short period of time after a lapse of a predetermined time period.

The present disclosure discloses a corona discharge assembly, an ion mobility spectrometer and a corona discharge method. The corona discharge assembly includes at least one corona discharge unit, wherein, the corona discharge unit includes a pair of corona metal wires arranged in parallel, and pulses having the same amplitude but opposite polarities are applied to the corona metal wires arranged in parallel, respectively. The present disclosure can generate more reactive ions than corona needles or tips, facilitate improving sensitivity of the ion mobility spectrometer, and effectively prolong service life of a corona source to 3-10 years.

The present disclosure discloses a corona discharge assembly, an ion mobility spectrometer and a corona discharge method. The corona discharge assembly includes at least one corona discharge unit, wherein, the corona discharge unit includes a pair of corona metal wires arranged in parallel, and pulses having the same amplitude but opposite polarities are applied to the corona metal wires arranged in parallel, respectively. The present disclosure can generate more reactive ions than corona needles or tips, facilitate improving sensitivity of the ion mobility spectrometer, and effectively prolong service life of a corona source to 3-10 years.

A molecular detection apparatus according to an arrangement includes: a collection unit collecting a detection target gas containing a molecule to be detected; a detector including a detection cell that has an organic probe provided in a sensor unit, the organic probe capturing the collected molecule, and a discriminator discriminating the molecule by a detection signal generated by the molecule being captured by the organic probe of the detection cell. The detection cell has the organic probe including a dicyanovinyl structure or a coumarin structure.

A molecular detection apparatus according to an arrangement includes: a collection unit collecting a detection target gas containing a molecule to be detected; a detector including a detection cell that has an organic probe provided in a sensor unit, the organic probe capturing the collected molecule, and a discriminator discriminating the molecule by a detection signal generated by the molecule being captured by the organic probe of the detection cell. The detection cell has the organic probe including a dicyanovinyl structure or a coumarin structure.

An electric-charge generating element that generates electric charges by gaseous discharge includes a dielectric layer, a discharge electrode disposed on one surface of the dielectric layer, a ground electrode disposed on the other surface or inside of the dielectric layer and a nozzle that is disposed in the dielectric layer at a position such that the nozzle does not interfere with the discharge electrode and the ground electrode so as to penetrate through the dielectric layer.

An electric-charge generating element that generates electric charges by gaseous discharge includes a dielectric layer, a discharge electrode disposed on one surface of the dielectric layer, a ground electrode disposed on the other surface or inside of the dielectric layer and a nozzle that is disposed in the dielectric layer at a position such that the nozzle does not interfere with the discharge electrode and the ground electrode so as to penetrate through the dielectric layer.