In some embodiments, a piezoelectric biosensor is provided. The piezoelectric biosensor includes a semiconductor substrate. A first electrode is disposed over the semiconductor substrate. A piezoelectric structure is disposed on the first electrode. A second electrode is disposed on the piezoelectric structure. A sensing reservoir is disposed over the piezoelectric structure and exposed to an ambient environment, where the sensing reservoir is configured to collect a fluid comprising a number of bio-entities.

A gas sensor comprises a substrate, a first semiconductor-based sensor element for determining the density and/or viscosity of a gas, which element is arranged above the substrate and which has a resonant element, and a cover arranged above the first sensor element, wherein the substrate and/or the cover has an opening to allow the passage of a gas to the first sensor element.

A sensor system that combines the sensing application of surface acoustic wave (SAW) sensor and sensor signal transfer though the enclosure wall via acoustic means. The sensor system includes SAW sensor placed inside the enclosure and at least one pair of bulk acoustic wave (BAW) transducers, one mounted inside and second outside the enclosure wall, allowing the interrogation of SAW sensor from outside the enclosure. The external BAW transducer converts interrogation electrical pulse into acoustic pulse which travels though the enclosure wall to the internal BAW transducer. The internal BAW transducer converts the interrogation electrical pulse to electrical pulse and transfers it to SAW sensor. The response of the SAW transducer containing series of electric pulses is converted to the series of acoustic pulses by internal BAW transducer which propagates though enclosure wall. The external BAW transducer converts the series of acoustic pulses into series of electrical pulses and is received by the interrogation circuit for processing.

A detection device, a detecting method for the detection device, and a detecting system are provided. The detection device includes: a first interdigital transducer and a second interdigital transducer, wherein the first interdigital transducer is arranged opposite to the second interdigital transducer, and a surface wave of the first interdigital transducer is transmitted in a direction toward the second interdigital transducer; and a reaction layer arranged between the first interdigital transducer and the second interdigital transducer.

A method of manufacturing a plurality of resonators, each formed by a membrane sealing a cavity, includes forming a plurality of cavities starting from one face called the front face of a support substrate, the plurality of cavities comprising central cavities and peripheral cavities arranged around the assembly formed by the central cavities, and forming central membranes and peripheral membranes covering the central cavities and peripheral cavities, respectively, by the transfer of a coverage film on the front face of the support substrate. At least part of the peripheral membranes is removed.

In some embodiments, a piezoelectric biosensor is provided. The piezoelectric biosensor includes a semiconductor substrate. A first electrode is disposed over the semiconductor substrate. A piezoelectric structure is disposed on the first electrode. A second electrode is disposed on the piezoelectric structure. A sensing reservoir is disposed over the piezoelectric structure and exposed to an ambient environment, where the sensing reservoir is configured to collect a fluid comprising a number of bio-entities.

Various liquid cells for use in surface acoustic wave-based sensors are disclosed. The sensor can include a substrate, at least one sensor element, and at least one pair of electrical components. The electrical components can be located on opposite ends of the sensor element. The liquid cell can include a top layer that is configured to cover at least a portion of the pair of electrical components. The liquid cell can also include a fluidic channel. The fluidic channel can be configured to receive a liquid media and is arranged not intersect with any of the pair of electrical components. The liquid cell can also include a plurality of peripheral walls that are configured to form a plurality of air pockets. Each of the plurality of air pockets are configured to form virtual non-physical walls to prevent the liquid media from contacting the at least one sensor element.

Disclose herein is a portable platform based on a direct digital synthesizer (DDS) is investigated for the orthogonal SAW sensor, integrating signal synthesis, gain control, phase/amplitude measurement, and data processing in a small, portable electronic system. The disclosed platform allows for simultaneous removal of non-specific binding proteins, and mixing, as well as improved incubation time.

The invention relates to a test kit which is designed for bioanalysis, in particular for an immunoassay. The test kit comprises at least one measuring sensor (M) for the quantitative detection of a substance and at least one reference sensor (R1, R2, R3) which is already supplied with the substance in a defined manner. In the method for analyzing a test kit, the measuring sensor (M) is read and a measurement value for a concentration, a substance quantity, or a mass is obtained, wherein the read value of the at least one measuring sensor (M) is scaled using the read values of the at least one reference sensor (R1, R2, R3), or a measured value which corresponds to the read value is obtained by means of a compensation curve which puts the read values of the reference sensors (R1, R2, R3) into relationship with the defined supply of the substance to the reference sensors (R1, R2, R3).

A combined vapor and/or gas concentration sensor and switch includes a resonating structure, a first alternating current, AC, voltage source coupled to a drive electrode, the first AC voltage source providing the resonating structure with a first voltage having an amplitude causing a first vibration mode of the resonating structure to exhibit a pull-in band and having a first frequency response adjacent to the pull-in band, where the first frequency response is nonlinear, a second AC voltage source coupled to the drive electrode and providing a second voltage having a frequency so that a second frequency response of the resonant structure, adjacent to a third vibration mode, is linear, and a read-out circuit coupled configured to determine a vapor and/or gas concentration based on a difference between (1) the frequency of the second voltage and (2) a frequency obtained by the read-out circuit from the resonating structure.