The apparatus for inspecting the electrostatic chuck for substrate processing includes the electrostatic chuck including a ceramic layer and an electrode layer coupled to an inside of the ceramic layer, an ultrasonic sensor unit disposed on the electrostatic chuck, allowing an ultrasonic wave to be incident into the electrostatic chuck, and converting a reflected signal reflected through the electrostatic chuck into an ultrasonic voltage signal, and an ultrasonic inspection unit to divide the ceramic layer and the electrode layer, based on a size value of the ultrasonic voltage signal.

An ultrasonic scanning device includes at least one pair of cylindrical rollers. The axes of each pair of cylindrical rollers are parallel to each other. A liquid for transmitting the ultrasound is stored in each cylindrical roller. In use, a pair of cylindrical rollers rotate around their respective axes in reverse directions, the test subject passes between the pair of cylindrical rollers and is tested by ultrasound. The ultrasonic scanning device can be applied in the field of lithium-ion battery testing. The internal flaws and health status of the lithium-ion battery can be determined by acquiring an ultrasonic image in the test subject. The device of the present invention has a simple structure and an ingenious conception, and is ready-to-use and less expensive, which is successfully applied in the field of lithium-ion battery testing.

An ultrasonic scanning device includes at least one pair of cylindrical rollers. The axes of each pair of cylindrical rollers are parallel to each other. A liquid for transmitting the ultrasound is stored in each cylindrical roller. In use, a pair of cylindrical rollers rotate around their respective axes in reverse directions, the test subject passes between the pair of cylindrical rollers and is tested by ultrasound. The ultrasonic scanning device can be applied in the field of lithium-ion battery testing. The internal flaws and health status of the lithium-ion battery can be determined by acquiring an ultrasonic image in the test subject. The device of the present invention has a simple structure and an ingenious conception, and is ready-to-use and less expensive, which is successfully applied in the field of lithium-ion battery testing.

There are described a system and method for performing ultrasound testing of a component comprising a first material layer and a second material layer bonded by an adhesive layer. The method comprises applying input ultrasound to the component to cause longitudinal propagation of ultrasonic guided waves through the first material layer and the adhesive layer; acquiring acoustic waves from the component, wherein the acoustic waves produced by the longitudinal propagation of the ultrasonic guided waves; generating a signal representation of the acoustic waves; comparing the signal representation of the acoustic waves to a plurality of reference signals to identify a characteristic of the adhesive layer; and outputting an output signal indicative of the characteristic of the adhesive layer.

There are described a system and method for performing ultrasound testing of a component comprising a first material layer and a second material layer bonded by an adhesive layer. The method comprises applying input ultrasound to the component to cause longitudinal propagation of ultrasonic guided waves through the first material layer and the adhesive layer; acquiring acoustic waves from the component, wherein the acoustic waves produced by the longitudinal propagation of the ultrasonic guided waves; generating a signal representation of the acoustic waves; comparing the signal representation of the acoustic waves to a plurality of reference signals to identify a characteristic of the adhesive layer; and outputting an output signal indicative of the characteristic of the adhesive layer.

An apparatus for scanning a cylindrical part is provided. The apparatus includes an ultrasonic transducer operable to emit ultrasonic waves into and receive ultrasonic waves from the part, with the ultrasonic transducer connected to a translation stage to move it up and down the part and around the circumference of the part. The apparatus does not mechanically contact the cylindrical or maintains contact only with soft elements, such that the apparatus does not damage sensitive parts. The apparatus also contains no magnetic parts, nor any elements that rely on magnetic detection, such that the apparatus is capable of being used in the vicinity of a part exhibiting a strong magnetic field.

An apparatus for scanning a cylindrical part is provided. The apparatus includes an ultrasonic transducer operable to emit ultrasonic waves into and receive ultrasonic waves from the part, with the ultrasonic transducer connected to a translation stage to move it up and down the part and around the circumference of the part. The apparatus does not mechanically contact the cylindrical or maintains contact only with soft elements, such that the apparatus does not damage sensitive parts. The apparatus also contains no magnetic parts, nor any elements that rely on magnetic detection, such that the apparatus is capable of being used in the vicinity of a part exhibiting a strong magnetic field.

An acoustic matching material for gas measurement including a matrix material having an acoustic impedance and an acoustic impedance reduction material, having an acoustic impedance lower than the acoustic impedance of the matrix material, the acoustic impedance reduction material being dispersed in the matrix material to create an acoustic impedance graduation through a thickness of the matching material.

An acoustic matching material for gas measurement including a matrix material having an acoustic impedance and an acoustic impedance reduction material, having an acoustic impedance lower than the acoustic impedance of the matrix material, the acoustic impedance reduction material being dispersed in the matrix material to create an acoustic impedance graduation through a thickness of the matching material.

Embodiments provide systems, apparatuses, and method for determining the Modulus of Elasticity (MOE) of a wood workpiece based on the travel time and/or velocity of an impact-induced acoustic stress wave. A housing may be configured to reduce extraneous acoustic waves and/or contaminants near an acoustic transducer to thereby reduce errors in the detection/identification of the acoustic stress wave. A computer system may be programmed to determine the MOE of the workpiece based on the travel time and/or velocity of multiple acoustic stress waves induced by corresponding impacts at respective locations along the end of the workpiece as the workpiece travels in a first direction. Corresponding methods and an induction system for rapidly and repeatedly striking the end of the workpiece are also described herein.