A tool stabilization mechanism is disclosed including a stabilizing device connected to a tool and movable between a deployed position and a non-deployed position, and an actuator for actuating the stabilizing device to move between the deployed position and the non-deployed position. In some forms the tool stabilization mechanism is integrated into a borescope unit, while in other forms it may be an accessory attachable to conventional borescope units. Related methods to the above are also disclosed herein.

Inspection methods, apparatuses, and techniques are described herein for identifying defects in a plugged honeycomb body (100). The inspection apparatuses and methods herein utilize reduced distortion imaging to identify the defects in the plugged honeycomb body. Backlit and/or directly illuminated images (by e.g. first light source 308) of the plugged honeycomb body (100) can be captured (by e.g. camera 302) and analyzed to align (by e.g. actuators 306) the plugged honeycomb body (100) in an imaging apparatus and to identify the defects.

An optical fiber laser induced breakdown spectroscopy detection device and a detection method are provided. The device comprises an optical fiber LIBS detector and a master control detection system. The master control detection system is installed in the master control room of a nuclear power plant, and the optical fiber LIBS detector is configured to perform detection in a pipeline. The master control detection system and the optical fiber LIBS detector are connected to each other via the transmission optical fiber and the control signal line. The remote on-line detection of the positioning and fixed point of the designated area of the inner wall of the main pipeline of the nuclear power plant can be detected on line in the master control room of the nuclear power plant.

The automatic inspection machine for containers and contents thereof, comprises a serial horizontal conveyor line of the containers oriented with a vertical axis through at least one inspection station comprising lighting means of the containers, at least one television camera for acquiring images of the illuminated containers, the lighting means comprising a first, a second and at least a third lighting device.

Provided are a diffraction-based metrology apparatus having high measurement sensitivity, a diffraction-based metrology method capable of accurately performing measurement on a semiconductor device, and a method of manufacturing a semiconductor device using the metrology method. The diffraction-based metrology apparatus includes a light source that outputs a light beam, a stage on which an object is placed, a reflective optical element that irradiates the light beam onto the object through reflection, such that the light beam is incident on the object at an inclination angle, the inclination angle being an acute angle, a detector that detects a diffracted light beam that is based on the light beam reflected and diffracted by the object and a processor that measures a 3D pupil matrix for the diffracted light beam and analyze the object based on the 3D pupil matrix.

Apparatus and methods for acquiring a Raman spectral map of a sample including a material species. The apparatus includes: a pulsed illumination source providing pulsed illumination radiation for exciting the sample and producing scattered radiation; a microscope objective focusing the pulsed illumination radiation onto a region of the sample corresponding to a data point of the map, and collecting emitted radiation from the region; a translation stage translating the sample relative to the microscope objective in at least two directions; a spectral filter spectrally filtering the emitted radiation collected by the objective to obtain a filtered portion of radiation corresponding to a characteristic Raman spectral feature of the material species; a detector receiving the filtered portion and providing output electrical pulses indicative thereof; and readout electronics applying a time gate to the output electrical pulses to distinguish detection events corresponding to the Raman scattered radiation from events associated with photoluminescence.

Surface inspection apparatus includes stage for holding substrate, light source, scanning optical system for scanning light from the light source along first direction for plural times, stage scanning mechanism for scanning the stage in second direction intersecting with the first direction, and detector for detect scattered light from the substrate Inspection target region of the substrate is scanned by the light from the light source by an operation of the scanning optical system and the stage scanning mechanism. Chromatic aberration of the scanning optical system is corrected to fall within predetermined wavelength range. Fluctuation range of wavelength of the light from the light source is determined based on variation in total lighting time of the light source in scanning period of each light scanning operation along the first direction. The fluctuation range falls within the predetermined wavelength range.

A device to detect defects in a finished surface by analyzing images thereof taken under lighting of different colors includes a supporting mechanism, a transmitting mechanism, a detecting mechanism, and a processor. The transmitting mechanism carries and transmits the product. The detecting mechanism includes a detecting frame, and a light source assembly. The processor connects to a camera assembly, and preprocesses images obtained of the long side surfaces, of the width side surfaces, and of the chamfered side surfaces of the product to detect any defects of these surfaces of the product.

Disclosed is a wavefront sensor for measuring a wavefront of a radiation. The wavefront sensor comprises a mask comprising a pattern located in path of the radiation to interact with the radiation. The radiation impinging on the mask forms a radiation detection pattern on a radiation detector subsequent to the mask, and the pattern of the mask is designed at least partly based on a requirement of the radiation detection pattern.

An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.