A measuring apparatus is capable of measuring chlorine dioxide gas concentration by correcting for changes in light emission of an LED due to heating and passage of time, and applying the correction to the optical absorption rate of chlorine dioxide gas at a photodetector. The measuring apparatus includes a main body with a measuring passage surrounded by a pair of transparent bodies, into which specimen gas or fresh air is fed and then discharged, and a comparing passage arranged in the vicinity of the measuring passage, into which no specimen gas is fed, first and second LEDs for emitting ultraviolet light which both have identical properties and are mounted at one end of the measuring passage and at one end of the comparing passage, respectively, and first and second photodetectors for receiving light respectively from the first and second LEDs and detecting a light emission amount thereof.

A modular flow measuring device comprises a controller, a third module with an optical sensor connected to the controller, and a fourth module with an amperometric sensor connected to the controller.

An inspection device of a semiconductor device includes: a semiconductor device which has a first face and a second face that are opposite to each other; and a measuring device which faces the first face, and measures heat of the semiconductor device, wherein the measuring device includes: a heat generating unit which generates heat on the second face of the semiconductor device, by emitting electromagnetic waves that penetrate through the semiconductor device; and a thermal image capturing unit which generates image data about a temperature of the second face of the semiconductor device.

A method for inspecting a mask is provided. The method includes placing the mask on a stage of an inspection tool; using a fan assembly, introducing a gas flow into the inspection tool; performing an environmental pressure control over the inspection tool; and capturing an image of the mask. The environmental pressure control includes monitoring an in-tool pressure inside the inspection tool and an out-tool pressure outside the inspection tool; determining whether the pressure difference between the in-tool pressure and the out-tool pressure is out of an acceptable range; and in response the determination determines that the pressure difference between the in-tool pressure and the out-tool pressure is out of the acceptable range, adjusting the power of the fan assembly.

An online detection device underwater elements includes an LIBS system in a sealing pressure chamber and an external airflow control system. The airflow control system has a gas probe bin and a gas source. An opening is formed at one end of the gas probe bin while the other end and the sealing pressure chamber are hermetically partitioned through a glass window. A laser in the LIES system outputs laser to an underwater object surface to be detected for generating plasma spectra. A spectrometer collects plasma spectra returned along an original optical path. When the device operates in water, the balance gas storage tank produces gas with the same pressure as underwater. A flow model is invoked according to the current water pressure to accurately control the air flow rate to form a stable gas environment in the gas probe, which improves the plasma excitation and collection efficiency.

The present invention relates to an apparatus (100) for the detection of at least one target analyte in a sample to be analysed applied to a diffractive sensor (1), including a housing (101) delimiting within it a dark chamber (102); a support device (105) suitable for supporting and integrally holding the diffractive sensor (1), said support device (105) being movable within the dark chamber (102) and between the inside and outside of the dark chamber (102); a source (103) of laser light suitable for emitting laser light with a wavelength within the visible spectrum in the darkroom (102); a screen (107) arranged in the dark chamber (102); a vision system (111) configured to capture images on the screen (107); and a control unit operatively connected to the laser source (103), the support device (105) and the vision system (111).

A sensor arrangement for arrangement on a measurement chamber, wherein the sensor arrangement comprises: a sensor; an intake opening; an outlet; and a fluid connection between the intake opening and the outlet.