A specimen-sample estimation apparatus includes: a light emitter configured to emit white light to irradiate light to a specimen sample including a living tissue; special light filters that are insertable and removable to and from an optical path of the white light, each special light filter being configured to transmit light having a different wavelength band; a driver configured to move one of the special light filters to the optical path; an imager configured to image the specimen sample to generate image data; and a processor including hardware, the processor being configured to detect a core tissue region of the living tissue appearing in an image corresponding to the image data, calculate an amount of tissue of the living tissue, based on the detected core tissue region, and determine whether the calculated amount of tissue is equal to or larger than a predetermined threshold.

Systems for allowing imaging of large specimens in high refractive index solutions, such as those with a refractive index of at least 1.45, for use in microscopes such as fluorescent light sheet microscopes. The systems allow for imaging large specimens in high RI while maintaining the highest optical sectioning provided by the objectives used across the full range of microscope stage travel. The systems also allow the use of a wider range of optics, such as low magnification 2.5 detection objectives, allowing for increased imaging speed and field of view.

An optical density measuring apparatus for measuring density of a gas or a liquid to be measured includes a light source capable of irradiating light into a core layer, a detector capable of receiving light propagated through the core layer, and an optical waveguide that includes a substrate and the core layer. The core layer includes a light propagation unit and a first diffraction grating unit that receives light from the light source and guides the light to the light propagation unit, which includes a propagation channel capable of propagating light in an extending direction of the light propagation unit. The first diffraction grating unit is disposed near to and facing a light-emitting surface of the light source. The first diffraction grating unit includes first diffraction gratings, at least two of which receive light emitted from the same light-emitting surface of the light source.

A scatterometer performs diffraction based measurements of one or more parameters of a target structure. To make two-color measurements in parallel, the structure is illuminated simultaneously with first radiation (302) having a first wavelength and a first angular distribution and with second radiation (304) having a second wavelength and a second angular distribution. The collection path (CP) includes a segmented wavelength-selective filter (21, 310) arranged to transmit wanted higher order portions of the diffracted first radiation (302X, 302Y) and of the diffracted second radiation (304X, 304Y), while simultaneously blocking zero order portions (302, 304) of both the first radiation and second radiation. The illumination path (IP) in one embodiment includes a matching segmented wavelength-selective filter (13, 300), oriented such that a zero order ray passing through the illumination optical system and the collection optical system will be blocked by one of said filters or the other, depending on its wavelength.

An inspection device has an illuminating optical system for forming an illuminated area on a sample, a converging optical system for converging the light from the sample, and a detector for detecting the light converged by the converging optical system. The converging optical system includes an image forming element that includes a lens group that has divided apertures and is configured so as to form a plurality of images. The detector detects a signal for the images formed by the image forming element. The detector has a plurality of partitions disposed in a matrix, the partitions include first and second pixels, and the images are projected onto the partitions.

An image capture device may include a first spectral filter and a second spectral filter arranged so that a panoramic image capture operation captures light filtered by the first spectral filter and light filtered by the second spectral filter in a same region of a combined image and one or more processors to: capture a plurality of images based on the panoramic image capture operation; extract first information and second information from the plurality of images, wherein the first information is associated with the first spectral filter and the second information is associated with the second spectral filter; identify an association between the first information and the second information based on a feature captured in the plurality of images via the first spectral filter and the second spectral filter; and store or provide information based on the association between the first information and the second information.

A beam shaper for an optical inspection tool includes a focal lens to focus an optical beam onto a target at an oblique angle of incidence and a phase modulator to substantially flatten a top of the optical beam in the plane of the target when the optical beam is focused onto the target at the oblique angle of incidence.

System and method of quantifying a gas leak in a specified field of view are disclosed. The system may comprise a cooled detector and two interchangeable band-pass non-cooled filters. A first non-cooled band-pass filter transmits electromagnetic radiation in a first spectral band that coincides with a non-transparent leaking gas spectral band. A second non-cooled band-pass filter transmits only electromagnetic radiation in a second spectral band which coincides with a transparent leaking gas spectral band. The system may comprise a quantification unit arranged to process the images generated by the cooled detector to thereby determine, based on the images thereof, a flowrate of the leaking gas in the specified field of view. The system may comprise a detection unit arranged to determine, based on alternately generated multiple first spectral band images and multiple second spectral band images, a gas leak in the specified field of view.

An imaging reflectometer includes a source module configured to generate a plurality of input beams at different nominal wavelengths. An illumination pupil having a first numerical aperture (NA) is arranged so that each of the plurality of input beams passes through the illumination pupil. A large field lens is configured to receive at least a portion of each of the plurality of input beams and provide substantially telecentric illumination over a sample being imaged. The large field lens is also configured to receive reflected portions of the substantially telecentric illumination reflected from the sample. The reflected portions pass through an imaging pupil having a second NA that is lower than the first NA and are received by an imaging sensor module that generates image information.

A detecting method of optically detecting a surface defect of a moving steel material includes an irradiation step of irradiating an examination target part with illumination light beams from different directions by two or more distinguishable light sources whose light emission durations are set based on at least an allowable positional displacement of an image, the two or more distinguishable light sources repeatedly emitting light such that their light emission timings thereof do not overlap each other; and a detection step of obtaining images by reflected light beams of the respective illumination light beams and detecting a surface defect in the examination target part by executing subtraction processing between the obtained images.