A non-destructive testing method of analyzing a sample comprising a composite material is disclosed. The method comprises: emitting an electromagnetic signal onto the sample, the electromagnetic signal having a range of frequencies; detecting a response signal transmitted and/or reflected by the sample in response to the electromagnetic signal; processing the response signal to determine variation with frequency of a dielectric permittivity of the sample over the range of frequencies; and determining an indication of a structural characteristic of the sample from a measure of the variation with frequency of the dielectric permittivity of the sample.

An object is to provide a measurement device using X-ray reflection that can reduce space required for measurement, simplify the setting procedure, and improve measurement accuracy. The measurement device using X-ray reflection includes an X-ray tube 1 configured to emit an X-ray beam, a detector 7 configured to detect a reflected beam of the X-ray beam, a rotational driving unit configured to rotate the X-ray tube 1 and the detector 7, a calibration plate 22 configured to reflect the X-ray beam emitted from the X-ray tube 1 toward the detector 7, and a control unit configured to perform a predetermined computation. The control unit controls the rotational driving unit to direct the X-ray tube 1 and the detector 7 toward a measurement object 21, causes the detector 7 to detect a reflected beam of an X-ray beam emitted from the X-ray tube 1 toward the measurement object 21, directs the X-ray tube 1 and the detector 7 toward the calibration plate 22, causes the detector 7 to detect a reflected beam of an X-ray beam emitted from the X-ray tube 1 toward the calibration plate 22, and determines a measurement value on the measurement object 21 by a computation using a signal representing the reflected beam from the measurement object 21 and a signal representing the reflected beam from the calibration plate 22.

The X-ray reflectometer of the present invention includes: an irradiation angle variable unit (10) configured to vary an irradiation angle of a focused X-ray beam (6) with a sample surface (8a); a position sensitive detector (14) which is fixed; and a reflection intensity calculation unit (15) configured to, per reflection angle of reflected X-rays (13) constituting a reflected X-ray beam (12), integrate a detected intensity by a corresponding detection element (11), for only the detection elements (11) positioned within a divergence angle width of the reflected X-ray beam (12) in the position sensitive detector (14), in synchronization of variation in the irradiation angle () of the focused X-ray beam (6) by the irradiation angle variable unit (10).

Provided are operation guide system for X-ray analysis to enable users to easily understand measurement of X-ray optical system to be selected. The operation guide system includes: measurement information acquisition unit for acquiring information on a sample and each X-ray measurement optical system part; sample magnification acquisition unit for acquiring magnification for display; incident X-ray shape deformation unit for determining distorted shape of an incident X-ray obtained by magnifying shape of the incident X-ray based on the magnification in a plane perpendicular to an optical axis direction; scattered X-ray shape deformation unit for determining distorted shape of a scattered X-ray obtained by magnifying shape of the scattered X-ray based on the magnification in the plane; and X-ray measurement optical system modeling unit for modeling a deformed shape of the sample, the distorted shape of the incident X-ray, and the distorted shape of the scattered X-ray.

Systems and methods are provided for detecting gaps in composite parts. One method includes radiating a beam of x-rays in a firing direction towards surface of a multi-layer Carbon Fiber Reinforced Polymer (CFRP) part, acquiring data indicating intensity of sidescatter radiation received at an x-ray detector that extends along the CFRP part in the firing direction, and examining the acquired data for gaps at the CFRP part based on differences in intensity indicated by the data.

A spectrometer includes a crystal analyzer having a radius of curvature that defines a Rowland circle, a sample stage configured to support a sample such that the sample is offset from the Rowland circle, an x-ray source configured to emit unfocused x-rays toward the sample stage, and a position-sensitive detector that is tangent to the Rowland circle. A method performed via a spectrometer includes emitting, via an x-ray source, unfocused x-rays toward a sample that is mounted on a sample stage such that the sample is offset from the Rowland Circle, thereby causing the sample to emit x-rays that impinge on the crystal analyzer or transmit a portion of the unfocused x-rays to impinge on the crystal analyzer; scattering, via the crystal analyzer, the x-rays that impinge on the crystal analyzer; and detecting the scattered x-rays via a position-sensitive detector that is tangent to the Rowland circle.

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object, and a plurality of X-ray detectors, wherein each of the plurality of X-ray detectors detects X-rays emitted from a foreign substance existing on an inspection target surface of the inspection target object irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

An object of the present invention is to provide a defect inspection device, a defect inspection method, and a program capable of accurately and rapidly detecting a minute defect and a defect candidate image indicated by a minute signal in a received light image of an inspection object. A defect inspection device (10) includes an image acquisition unit (I/F 16), an input unit (I/F 16), an exposure condition acquisition unit (I/F 16), a storage unit (24), and a parameter determination unit (processing unit 22) that determines an image processing parameter for a received light image on the basis of an exposure condition acquired by the exposure condition acquisition unit, a physical feature received by the input unit, and exposure information stored in the storage unit, and an image processing unit (processing unit 22) that extracts a defect candidate image which is an image corresponding to a defect candidate of the inspection object from the received light image by performing image processing of the received light image on the basis of the image processing parameter determined by the parameter determination unit (processing unit 22).

An x-ray spectrometer system comprising an x-ray imaging system with at least one achromatic imaging x-ray optic and an x-ray detection system. The optical train of the imaging system is arranged so that its object focal plane partially overlaps an x-ray emitting volume of an object. An image of a portion of the object is formed with a predetermined image magnification at the x-ray detection system. The x-ray detection system has both high spatial and spectral resolution, and converts the detected x-rays to electronic signals. In some embodiments, the detector system may have a small aperture placed in the image plane, and use a silicon drift detector to collect x-rays passing through the aperture. In other embodiments, the detector system has an energy resolving pixel array x-ray detector. In other embodiments, wavelength dispersive elements may be used in either the optical train or the detector system.