Methods for using electron diffraction holography to investigate a sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, forming the plurality of electrons into a first electron beam and a second electron beam, and modifying the focal properties of at least one of the two beams such that the two beams have different focal planes. Once the two beams have different focal planes, the methods include focusing the first electron beam such that it has a focal plane at or near the sample, and focusing the second electron beam so that it is incident on the sample, and has a focal plane in the diffraction plane. An interference pattern of the first electron beam and the diffracted second electron beam is then detected in the diffraction plane, and then used to generate a diffraction holograph.

A metal grid includes: a valve metal plate which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the valve metal plate; and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. Further, a production method for a metal grid includes: a step of bending a principal surface of a valve metal plate including the principal surface; a step of forming an anodic oxide film on the principal surface of the valve metal plate; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.

An X-ray phase contrast imaging system includes an X-ray source, a detector, a plurality of gratings including a first grating and a second grating, and a grating positional displacement acquisition section configured to obtain a positional displacement of the grating based on a Fourier transform image obtained by Fourier transforming an interference fringe image detected by the detector.

A metal grid includes: a member which includes a curved principal surface; an anodic oxide film which is formed on the principal surface of the member, and a lattice structure which has an uneven shape periodically formed on the anodic oxide film. A production method for a metal grid includes: a step of forming a valve metal film on a principal surface of a member, a step of forming an anodic oxide film by performing an anodic oxidation treatment on the valve metal film while the principal surface is curved; and a step of forming a lattice structure with a periodic uneven shape on the anodic oxide film by forming an etching mask with a periodic opening on a surface of the anodic oxide film and etching the anodic oxide film through the opening.

Methods for using electron diffraction holography to investigate a sample, according to the present disclosure include the initial steps of emitting a plurality of electrons toward the sample, forming the plurality of electrons into a first electron beam and a second electron beam, and modifying the focal properties of at least one of the two beams such that the two beams have different focal planes. Once the two beams have different focal planes, the methods include focusing the first electron beam such that it has a focal plane at or near the sample, and focusing the second electron beam so that it is incident on the sample, and has a focal plane in the diffraction plane. An interference pattern of the first electron beam and the diffracted second electron beam is then detected in the diffraction plane, and then used to generate a diffraction holograph.

A radiation phase change detection method includes: arranging a two-dimensional optical image pickup element, which includes a scintillator, so that, when a period of a self-image generated through a phase grating is defined as D.sub.1, and a pixel pitch of the two-dimensional optical image pickup element is defined as D.sub.2=kD.sub.1, k falls in a range of <k3/2, and so that interference fringes formed by D.sub.1 and D.sub.2 depending on a relationship in arrangement of the two-dimensional optical image pickup element with respect to the self-image have a period of 2 times D.sub.2 or more and 100 times D.sub.2 or less; acquiring images of the interference fringes before and after insertion of an object; and outputting an image on a phase change of the radiation caused by at least the object.

Methods for using a single electron microscope system for investigating a sample with twin electron beams having different focal lengths include the steps of emitting electrons toward the sample, forming the electrons into a two beams, and then modifying the focal properties of at least one of the two beams such that they have different focal planes. Once the two beams have different focal planes, the first electron beam is focused at the sample, and the second electron beam is focused so that it acts as a TEM beam that is parallel beam when incident on the sample. Emissions resultant from the first electron beam and the TEM beam being incident on the sample can then be detected by a single detector or detector array and used to generate a TEM image.

An X-ray metal grating structure of the present invention has a grating region in which a plurality of first structural portions are periodically provided, wherein an air gap is formed between each of the plurality of first structural portions and a second structural portion as a remaining part of the grating region other than the plurality of first structural portions. Thus, the X-ray metal grating structure of the present invention is formed as a grating structure having high flatness. A production method therefor comprises a step of forming the air gap between the first structural portion and the second structural portion. Thus, the production method makes it possible to produce an X-ray metal grating structure having high flatness. The present invention further provides an X-ray metal grating unit and an X-ray imaging device each comprising the X-ray metal grating structure.

An X-ray phase contrast imaging system includes an X-ray source, a detector, a plurality of gratings including a first grating and a second grating, and a grating positional displacement acquisition section configured to obtain a positional displacement of the grating based on a Fourier transform image obtained by Fourier transforming an interference fringe image detected by the detector.

The present invention relates to differential phase-contrast imaging, in particular to a structure of a diffraction grating, e.g. an analyzer grating and a phase grating, for X-ray differential phase-contrast imaging. In order to make better use of the X-ray radiation passing the object, a diffraction grating (14) for X-ray differential phase-contrast imaging is provided with at least one portion (24) of a first sub-area (26) and at least one portion (28) of a second sub-area (30). The first sub-area comprises a grating structure (54) with a plurality of bars (34) and gaps (36) being arranged periodically with a first grating pitch P G (38), wherein the bars are arranged such that thy change the phase and/or amplitude of an X-ray radiation and wherein the gaps are X-ray transparent. The second sub-area is X-ray transparent and wherein the at least one portion of the second sub-area provides an X-ray 1 transparent aperture (40) in the grating. Portions of the first and second sub-areas are arranged in an alternating manner in at least one direction (42).