Disclosed is a method for determining physical properties of a test sample using a spectrometric detector with at least three channels, consisting of: performing measurements in each of the channels on the test sample, calculating variables, each formed from a combination of measurements of different channels, and applying a weighting and bias matrix to the variables, enabling the investigated physical properties of the test sample to be determined.

An apparatus is disclosed for the examination and inspection of integrated devices such as integrated circuits. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. For some embodiments of the invention, the photoemissive structure is deposited directly onto the integrated device. In some embodiments, the incidence angle of the x-rays is varied to allow internal three-dimensional structures of the integrated device to be determined. In some embodiments, the recorded image is compared with a reference data to enable inspection for manufacturing quality control.

A system (100) for producing analysis data indicative of presence of one or more predetermined components in a sample (110) is presented. The system includes source equipment (120) for directing a particle stream (130) towards the sample (110), detector equipment (140) for measuring a distribution of particles scattered from the sample (110) as a function of a scattering angle (), and processing equipment (170) for producing the analysis data based on the measured distribution of the scattered particles and on reference information indicative of an effect of the one or more predetermined components on the distribution of the scattered particles. The scattering angle related to each scattered particle is an angle between an arrival direction of the particle stream and a trajectory (160) of the scattered particle. The system utilizes different directional properties of scattering related to different isotopes, different chemical substances, and different isomers.

A security inspection apparatus and a security inspection method are disclosed. In one aspect, an example apparatus includes a CT inspection device and a Raman spectrum inspection device, the CT inspection device includes: a CT scanner scanning an object to be inspected to generate a CT image, an image recognizing device recognizing the CT image to check whether or not the object has a suspected hazardous article, and an object marking device making a predetermined marker on the object which has the suspected hazardous article. The Raman spectrum inspection device includes: a Raman spectrum measuring device extracting a Raman spectrum of the suspected hazardous article in the object, a Raman spectrum comparing device comparing the Raman spectrum of the suspected hazardous article with Raman spectra of known compositions to determine a composition of the suspected hazardous article, and an object marker recognizing device recognizing the predetermined marker on the object.

The present invention provides a radiotherapy apparatus (100) to generate both photon and electron beam mounted with dual KV beam ray source used for stereotactic imaging and CBCT (Cone Beam Computed Tomography) image with a greater FOV (Field Of View). The apparatus (IOO) comprises of a ring gantry (101), which includes at least two KV sources (102a and 102b), at least two movable detector (103 and 104) and a LINAC X-ray tube (106). The two movable detectors (103, 104) include a first movable detector (104) and a second movable detector (103). The second movable detector (103) has mechanism capture a half fan mode of X-ray beam of imaging radiation with a greater FOV having 250450 mm. The half fan mode of X ray is captured by moving the second movable detector (103) or first movable detector (104) further towards the ISO centre (105) of the ring gantry (101).

Disclosed is a nondestructive inspection system includes: a radiation source system generating different types of radiations and irradiating the generated different types of radiations toward an inspection object; a detector system detecting each of the radiations transmitted through the inspection object; a transfer system varying a position of the inspection object such that the radiations generated by the radiation source system are irradiated to the inspection object; and an image system generating an image regarding the inspection object on the basis of a detection result from the detector system, wherein the radiation source system comprises: an electron gun generating an electron beam; an electron accelerator accelerating the electron beam generated by the electron gun; and a target system selectively generating at least one of various types of radiations according to variables when the electron beam accelerated by the electron accelerator is irradiated thereto.

The present disclosure relates to an inspection system and method. The inspection system includes: a ray source, configured to generate rays having different energies; a detector, configured to detect a signal when a ray emitted by the ray source acts on at least one cross section of an inspected object; and a processor, in communication connection with the ray source, configured to adjust an energy of the ray emitted by the ray source according to information representing a material parameter of at least one cross section of the inspected object. The embodiments of the present disclosure is capable of being applicable to radiation inspection of multiple types of inspected objects.

Apparatus and methods for coherent diffraction imaging. This is accomplished by acquiring data in a CDI setup with a CMOS or similar detector. The object is illuminated with coherent light such as EUV light which may be pulsed. This generates diffraction patterns which are collected by the detector, either in frames or continuously (by recording the scan position during collection). Pixels in the CDI data are thresholded and set to zero photons if the pixel is below the threshold level. Pixels above the threshold may be set to a value indicating one photon, or multiple thresholds may be used to set pixels values to one photon, two photons, etc. In addition, multiple threshold values may be used to detect different photon energies for illumination at multiple wavelengths.

A security inspection apparatus and a security inspection method are disclosed. In one aspect, an example apparatus includes a CT inspection device and a Raman spectrum inspection device, the CT inspection device includes: a CT scanner scanning an object to be inspected to generate a CT image, an image recognizing device recognizing the CT image to check whether or not the object has a suspected hazardous article, and an object marking device making a predetermined marker on the object which has the suspected hazardous article. The Raman spectrum inspection device includes: a Raman spectrum measuring device extracting a Raman spectrum of the suspected hazardous article in the object, a Raman spectrum comparing device comparing the Raman spectrum of the suspected hazardous article with Raman spectra of known compositions to determine a composition of the suspected hazardous article, and an object marker recognizing device recognizing the predetermined marker on the object.

Generating image data of an object using a particle beam includes arranging at least one mark in the object or in a support material in which the object is embedded, determining a first examination region, exposing the first examination region by removing material of at least one of: the object and the support material, guiding a first particle beam over the first examination region, and acquiring image data of the first examination region using at least one detector by detecting interaction particles and/or interaction radiation due to an interaction of the first particle beam with the first examination region. Generating image data of an object using a particle beam may also include introducing the object into a support material in such a way that the object is partly or completely surrounded by the support material. A second examination region of the object may be determined relative to the mark.