System and method for nanoscale X-ray imaging. The imaging system comprises an electron source configured to generate an electron beam along a first direction; an X-ray source comprising a thin film anode configured to receive the electron beam at an electron beam spot on the thin film anode, and to emit an X-ray beam substantially along the first direction from a portion of the thin film anode proximate the electron beam spot, such that the X-ray beam passes through the sample specimen. The imaging apparatus further comprises an X-ray detector configured to receive the X-ray beam that passes through the sample specimen. Some embodiments are directed to an electron source that is an electron column of a scanning electron microscope (SEM) and is configured to focus the electron beam at the electron beam spot.

A fluorescence mode x-ray absorption spectroscopy apparatus includes an electron bombardment source of x-rays, a crystal analyzer, the source and the crystal analyzer defining a Rowland circle having a Rowland circle radius (R), a detector, and at least one stage configured to position a sample at a focal point of the Rowland circle with the detector facing the sample.

An x-ray source for a backscatter imager can include a first electron beam (e-beam) emitter for emitting a first e-beam and at least a second e-beam emitter for emitting at least a second e-beam. The first and second e-beam emitters can be powered by a at least one power supply, and can be configured to direct the first e-beam and the second e-beam toward an anode. An interaction of the anode with the first and second e-beams produces x-rays. The x-ray source is configured to output an amount of x-rays equivalent to a conventional x-ray source that includes a single e-beam emitter. However, because the x-ray source uses at least two e-beam emitters and a single anode, the power source required to power the e-beam emitters can operate at a lower wattage than a conventional power source powering the single e-beam emitter. The x-ray source is thus lighter in weight and outputs less radiation than conventional systems with a comparable x-ray output.

A multi-channel static CT device is provided, and the multi-channel static CT device includes: a scanning channel including a plurality of scanning sub-channels; a distributed X-ray source including a plurality of ray emission points arranged around the scanning channel; and a detector module including a plurality of detectors arranged around the scanning channel, wherein the plurality of detectors are arranged corresponding to the plurality of ray emission points.

A shielded X-ray radiation apparatus is provided comprising an X-ray source, an X-ray attenuation shield including an elongate cavity to house the X-ray source and incorporating a region to accommodate a sample, a neutron attenuation shield, and a gamma attenuation shield. The neutron attenuation shield is situated adjacent to and substantially surrounds the X-ray attenuation shield and the gamma attenuation shield is adjacent to and substantially surrounds the neutron attenuation shield. In some embodiments a removable sample insertion means is provided to insert samples into the elongate cavity and which is composed of adjacent blocks of material, each respective block having a thickness and a composition which substantially matches the thickness and a composition of one of the X-ray attenuation, neutron attenuation and gamma-ray attenuation shields.

Disclosed herein is an x-ray backscatter apparatus for non-destructive inspection of a part. The apparatus comprises an emission shaping mechanism that is configured to receive an electron emission from a cathode and to adjust a shape of the electron emission from a circular cross-sectional shape into a first elliptical cross-sectional shape. The x-ray source further comprises an anode that is configured to convert the electron emission into an unfiltered x-ray emission having a second elliptical cross-sectional shape. The apparatus also comprises an x-ray filter that comprises an emission aperture having a cross-sectional area smaller than an area of the second elliptical cross-sectional shape of the unfiltered x-ray emission. The x-ray filter is located relative to the unfiltered x-ray emission to allow only a portion of the unfiltered x-ray emission to pass through the emission aperture and form a filtered x-ray emission.

Controlling total emission current of an electron emitting construct in an x-ray emitting device by providing a cathode, providing multiple active areas each active area having a gated cone electron source, including multiple emitter tips arranged in an array, a gate electrode, and a gate interconnect lead connected to the gate electrode, providing an x-ray emitting construct comprising an anode, the anode being an x-ray target, situating the x-ray emitting construct facing the active areas face each other, selecting a set of active areas, and activating selected active areas by conductively connecting a voltage source to their associated the gate electrode interconnect lead.

An X-ray generation device includes a cathode including an electron source generating an electron beam, an anode including a target to transmit an X-ray generated by collision of the electron beam, and a convergence electrode converging the electron beam toward the target. The target has a first region having a locally small thickness and a second region having a larger thickness than the first region. The X-ray generation device further includes a deflection unit to switch an incident position of the electron beam between the first region and the second region. The deflection unit has an adjustment mode to adjust an X-ray focal spot diameter and an X-ray generation mode to generate an X-ray, the electron beam is caused to enter the first region in the adjustment mode, and the electron beam is caused to enter the second region in the X-ray generation mode.

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

An x-ray interferometric imaging system in which the x-ray source comprises a target having a plurality of structured coherent sub-sources of x-rays embedded in a thermally conducting substrate. The system additionally comprises a beam-splitting grating G.sub.1 that establishes a Talbot interference pattern, which may be a π phase-shifting grating, and an x-ray detector to convert two-dimensional x-ray intensities into electronic signals. The system may also comprise a second analyzer grating G.sub.2 that may be placed in front of the detector to form additional interference fringes, a means to translate the second grating G.sub.2 relative to the detector. The system may additionally comprise an antiscattering grid to reduce signals from scattered x-rays. Various configurations of dark-field and bright-field detectors are also disclosed.