G01N2223/303

IMAGE PROCESSING SYSTEM
20220042936 · 2022-02-10 ·

Provided is an image processing system capable of estimating a three-dimensional shape of a semiconductor pattern or a particle by solving problems of measurement reduction in a height direction and taking an enormous amount of time at a time of acquiring learning data. The image processing system according to the disclosure stores a detectable range of a detector provided in a charged particle beam device in a storage device in advance, generates a simulated image of a three-dimensional shape pattern using the detectable range, and learns a relationship between the simulated image and the three-dimensional shape pattern in advance.

Spacer accessory for XRF handheld analyzers

Disclosed is an attachable spacer applied to the front base plate of a hand-held and self-contained XRF testing device that holds the face plate at a forwards tilt towards a test sample, and ensures that only the top rim of the face plate ever touches a test sample. The resulting triangular gap minimizes contact between the front plate window and the test surface, prevents the transfer of heat to the XRF testing device's circuitry, and locks in a fixed distance between the face plate of the XRF testing device and the sample being tested.

Method for establishing a spectral response function of a system for measuring with X-rays or gamma rays

A method for determining a response of a spectrometric system for measuring ionizing x-ray or gamma-ray photons, the measuring system comprising: a radiation source, configured to emit ionizing radiation along an emission axis; a pixelated detector, which comprises pixels, each pixel being configured to detect radiation emitted by the radiation source, and to acquire thereof an energy spectrum, in a plurality of energy channels; the emission axis being an axis extending between the radiation source and the detector;
the response of the measuring system taking the form of effective spectra, defined for each pixel, and in each energy band, the effective spectrum of a pixel, in an energy band, corresponding to an energy distribution of the photons detected, by the pixel, in the energy channel, in the absence of any object interposed between the source and the pixel.

System and Method for Quantifying X-Ray Backscatter System Performance

A system for quantifying x-ray backscatter system performance may include a support; a plurality of rods mounted on the support; the rods of the plurality of rods arranged parallel to each other, having generally curved outer surfaces, and being arranged in groups of varying widths, each group of the groups having at least two of the rods of a same width; and a user interface configured to be connected to receive a backscatter signal from an x-ray backscatter detector associated with an x-ray tube, apply a transfer function to generate a transfer curve representing x-ray backscatter for each rod of the plurality of rods from x-rays transmitted by the x-ray tube.

METHOD AND APPARATUS FOR X-RAY DETECTION SYSTEM GAIN CALIBRATION USING A PULSER

Disclosed are circuits for automatic calibration of the gain of electronic amplification and digitization systems for use with X-ray detectors. The calibration is based on injecting predetermined pulses into the electronic system and deriving a calibration ratio based the digital value of their amplitude with the digital value of the same pulses, unamplified and digitized with a high accuracy reference ADC. All ADCs, as well as the DACs used to control the pulser amplitude are referenced to a single common reference voltage. Calibration for non-linearity of the gain is disclosed with an alternative embodiment for the same circuits.

X-RAY APPARATUS AND STRUCTURE PRODUCTION METHOD

An X-ray apparatus includes: a mounting unit upon which an object to be measured is mounted; an X-ray generation unit that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured upon the mounting unit; an X-ray detector that acquires a transmission image of the object to be measured being irradiated by the X-rays; a first movement unit that moves at least one of the mounting unit, the X-ray generation unit, and the X-ray detector along a direction of irradiation of the X-rays; a position detection unit that detects a relative position of the mounting unit, the X-ray generation unit, and the X-ray detector; and a calculation unit that calculates a magnification of a transmission image of the object to be measured acquired by the X-ray detector, in a state in which deflection of the mounting unit has occurred while the object to be measured is mounted upon the mounting unit.

OPTICAL GEOMETRY CALIBRATION DEVICES, SYSTEMS, AND RELATED METHODS FOR THREE DIMENSIONAL X-RAY IMAGING
20170219498 · 2017-08-03 ·

Optical geometry calibration devices, systems, and related methods for x-ray imaging are disclosed. An optical-based geometry calibration device is configured to interface with a two-dimensional (2D) imaging device to perform three-dimensional (3D) imaging. The optical-based geometry calibration device includes one or more optical cameras fixed to either an x-ray source or an x-ray detector, one or more markers fixed to the x-ray detector or the x-ray source, with each of the one or more optical cameras being configured to capture at least one photographic image of one or more corresponding optical markers when each x-ray image of the object is captured, and an image processing system configured to compute positions of the x-ray source relative to the x-ray detector for each 2D projection image based on the at least one photographic image of the one or more markers

Method for calibrating an X-ray testing system for a tire type and method for checking the position of cords in a tire

A method for calibrating an X-ray inspection system for a tire. The X-ray inspection system includes an X-ray tube, a linear X-ray detector, and a manipulator for the tire. The method includes moving one of the X-ray tube, the linear X-ray detector, and the manipulator along a travel path from a set starting position to a set end position, capturing, at a preset reading rate during the movement of one of the X-ray tube, the linear X-ray detector, and the manipulator, a continuous capture of X-ray radiography images of a cord within the tire, tracking the cord using successive X-ray radiography images, and deducing an absolute position of the cord using a total shift of the cord in the X-ray radiography images between the starting position and the end position and using known geometric data.

Two-step material decomposition calibration method for a full size photon counting computed tomography system

A method and a system for providing calibration for a photon counting detector forward model for material decomposition. The flux independent weighted bin response function is estimated using the expectation maximization method, and then used to estimate the pileup correction terms at each tube voltage setting for each detector pixel.

CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR CONTROLLING CHARGED PARTICLE BEAM APPARATUS

A charged particle beam apparatus includes a movement mechanism, a particle source, an optical element, a detector, and a control mechanism configured to control, based on an observation condition, the movement mechanism, the particle source, the optical element, and the detector. The control mechanism is configured to acquire a diffraction pattern image including a plurality of Kikuchi lines as a comparison image after inclining the movement mechanism by a first angle, evaluate an error between an inclination angle of the sample and a target inclination angle using a reference image of a reference diffraction pattern and the comparison image, and control inclination of the movement mechanism based on an evaluation result.