A system for X-ray analysis, the system includes: (a) an X-ray analysis assembly, which is (i) disposed in an X-ray enclosure configured to maintain a controlled first pressure, and (ii) configured to direct a first X-ray beam toward a sample positioned out of the X-ray enclosure at a second pressure different from the first pressure, and to produce a signal indicative of a second X-ray beam emitted from the sample in response to the first X-ray beam impinging on the sample, and (b) a window assembly, which is disposed between the X-ray analysis assembly and the sample and is configured to (i) seal the X-ray enclosure to maintain a pressure difference between the first and second pressures, and (ii) pass the first and second X-ray beams, and the window assembly includes a window layer made from a material transparent to the first and second X-ray beams.

According to an embodiment, a measurement chamber assembly for an X-ray fluorescence (XRF) analyzer instrument is provided, the measurement chamber assembly comprising: a measurement chamber formed in a cavity provided in a casing of the XRF analyzer instrument, wherein the cavity is provided with a measurement aperture which allows for transferring primary radiation from the measurement chamber towards the sample positioned on exterior of the measurement chamber and for transferring secondary radiation invoked in the sample to the measurement chamber; a sample window assembly arranged to close the measurement aperture, wherein the sample window assembly comprises an electrically conductive layer; and a window circuit arranged to supply an electric current through the electrically conductive layer and provide one or more electrical monitoring signals that are at least indirectly indicative of resistance of the electrically conductive layer.

Provided are an X-ray fluorescence analysis method and a sample pouch cell that enable measurement of a liquid sample, and radiation of X-rays while avoiding air bubbles formed during measurement. The sample pouch cell is a sample pouch cell for a liquid sample, which is to be arranged upright in a side-irradiation type X-ray fluorescence spectrometer. The sample pouch cell includes: a first resin film, which is arranged on a side to which primary X-rays are radiated; and a second resin film bonded to the first resin film in a region excluding an inlet for the liquid sample.